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ax2600/ax2700 microwave plasma subsystem
Microwave Plasma Subsystem, 1.8 or 3.0 kW, 2440 - 2470 MHz, Automatic Tuning

Specifications

  • Type
    AX2600 & AX2700
  • Maximum Plasma Power Output
    1.8 or 3.0 kW
  • Frequency
    2440 - 2470 MHz
  • Output Accuracy
    ±1.5% (from 20 - 100% of max. power)
  • Power Requirements
    200/208 VAC ±10%, 3 phase, 50/60 Hz
  • Chemistries
    O2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3
  • Applicator Material
    Quartz, Sapphire
  • Operating Pressure
    2 - 8 Torr
  • Communications
    Analog, RS485, DeviceNet™ or EtherCAT®
  • Compliance
    CE, ETL, SEMI S2-93A, SEMI F47
  • Time to Match
    < 2 sec
  • Total Gas Flow
    1 - 7 slm

Features

Flexibility

  • Microwave plasma sources, available for fluorine or non-fluorine chemistries, are designed for high power with multiple gases, flows and pressure ranges
  • Subsystems are lid mountable and configurable to accommodate available chamber real estate
  • Process changes are handled by the flexible system software and require no hardware modification
  • Quartz and Sapphire version to adapt multiple chemistries

Reliability

  • MKS microwave plasma subsystems are fully integrated and tested for true turnkey implementation
  • Components have been optimized for long life, reducing cost of ownership
  • Based on MKS's highly reliable, field proven technology, MTBF exceeds 100,000
  • Secure operations with analog control and remote only versions

AX2600 Series

The AX2600 Series is a fully integrated, “packaged” solution designed for easy on-chamber integration. The AX2600 system includes the AX2500 SmartPower® Microwave Generator, SmartMatch® Tuner, Isolator, and the patented AX7610 Microwave Applicator

AX2700 Series

The AX2700 Series, provided in kit form, consists of all components necessary for microwave plasma processing and is ideal for customers looking to optimize placement of the individual components on a system. All AX2700 system components are highly reliable, factory tested, and field-proven.

SmartPower™ System Performance

SmartPower system performance with 50% NH3 / 50% N2 plasma at 3kW

Relative Strip Rates

Relative strip rates for quartz applicator with oxygen plasma, compared to 7slm flow @ 2 kW

Need help?

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