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ax2600/ax2700 microwave plasma subsystem
Microwave Plasma Subsystem, 1.8 or 3.0 kW, 2440 - 2470 MHz, Automatic Tuning

Specifications

  • Type
    AX2600 & AX2700
  • Maximum Plasma Power Output
    1.8 or 3.0 kW
  • Frequency
    2440 - 2470 MHz
  • Output Accuracy
    ±1.5% (from 20 - 100% of max. power)
  • Power Requirements
    200/208 VAC ±10%, 3 phase, 50/60 Hz
  • Chemistries
    O2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3
  • Applicator Material
    Quartz, Sapphire
  • Operating Pressure
    2 - 8 Torr
  • Communications
    Analog, RS485, DeviceNet™ or EtherCAT®
  • Compliance
    CE, ETL, SEMI S2-93A, SEMI F47
  • Time to Match
    < 2 sec
  • Total Gas Flow
    1 - 7 slm

Features

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