Compare Model Drawings, CAD & Specs Maximum Power Plasma Tube Material Availability Price
chemical downstream plasma source
Chemical Plasma Source, 3 kW, Quartz
3.0 kW Quartz
chemical downstream plasma source
Chemical Plasma Source, 3 kW, Sapphire
3.0 kW Sapphire
chemical downstream plasma source
Plasma Source Tube Assembly, Quartz, AX7610
Quartz
chemical downstream plasma source
Plasma Source Tube Assembly, Sapphire, AX7610
Sapphire

Specifications

  • Type
    AX7610 Downstream Plasma Source
  • Maximum Power
    3.0 kW
  • Electrical Requirements for UV Lamp
    24 VDC, 1.0 Amp
  • Cooling
    Water (3/8 in. Swagelok® fitting) 0.35 gpm, 30°C Max at 30psid minimum
  • Gas Line Connection
    1/4 or 3/8 inch VCR®
  • Output Flange
    KF40, KF50 or custom
  • Process Gas Supply
    Quartz Tube: O2, N2, H2O, Ar, non-fluorine based gases and perating pressure 1 to 8 Torr typical
    Sapphire Tube: O2, N2, H2O, Ar, NF3, CF4, C2F6, and other Fluorine-based gases and operating pressure 2 to 8 Torr typical
  • Dimensions
    15.3 in (388 mm) Long
  • Weight
    10 lb. (4.5 kg)

Features

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