The High Power Microwave Plasma Source can be combined with a 6kW microwave generator for a high concentration of radicals providing a high productivity manufacturing solution. The High Power Microwave Plasma source is capable of igniting in multiple process gases, over a wide operating range with performance benefits in current and emerging applications such as, high throughput photoresist removal, advanced surface cleaning and conditioning, as well as, advanced deposition applications at the atomic level.
Higher productivity compatible with 6kW MKS microwave generator
High power technology enables processes with high output of H* radicals
Wider operating range and higher flow capability for higher throughput
Delivers a high concentration of radicals at low electron temperature for advanced applications
Brass-free component design
Backward compatible with existing 3kW SmartPower® installed base