Compare Model Drawings, CAD & Specs Plasma Tube Material Availability Price
high power microwave plasma source
Microwave Plasma Source, 6 kW, Quartz
Quartz
high power microwave plasma source
Microwave Plasma Source, 6 kW, Sapphire
Sapphire

Specifications

  • Type
    High Power Plasma Source
  • Plasma Tube Material
    HMPSQ-MKS: Quartz
    HMPSS-MKS: Sapphire
  • Operating Frequency
    2.44-2.47 GHz
  • Maximum Power
    6 kW
  • Operating Pressure
    1-10 Torr
  • Total Gas Flow
    1-10 slm
  • Minimum Water Flow
    0.50 gpm at min 37 psid
  • Waveguide
    WR284
  • Waveguide Flange Connection
    CPR284F with bolts
  • Water Inlet Connection
    3/8 inch Swagelok®
  • Water Outlet Connection
    3/8 inch Swagelok®
  • Electrical Requirements for UV Lamp
    24 VDC, 1.0 Amp
  • Gas Line Connection
    4 VCR® male
  • Dimensions
    18.52 x 4.5 x 6.32 inches
  • Weight
    18 lbs
  • Compliance
    CE

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