Specifications

  • Full Scale Flow Range
    100 - 250 slm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    30 to 55 psid
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for >20% to 100% Full Scale
    ±0.25% of Full Scale for 5% to 20% Full Scale
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Reading
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Rdg./°C
  • Inlet Pressure Coefficient
    <0.03% of Reading
  • Typical Settling Time
    1 to 2 seconds typical above 10% Full Scale @ 50 psi
  • Warm-up Time
    1 hour
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 65°C
  • External Leak Integrity
    <1 x 10-9 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% Full Scale at 40 psia to vac (<500 mTorr)
  • Wetted Materials
    316 S.S., 17-1 S.S., Elgiloy, 430FR (Standard)
  • Seal Material
    Viton® (Class VI) or EPDM (Class VI)
  • Surface Finish
    16 µinch average Ra
  • Weight
    4.5 lbs. (2.05 kg)
  • Enclosure Rating
    IP66
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ (<4 watts)
  • Flow Input Output Signal
    Voltage: 0 to 5 VDC
    Current: 4 to 20 mA
  • Analog I/O Connector
    Voltage: 15-pin Type "D" male
    Current: 15-pin Type "D" male

Features

Fast Settling Times

Settling times of 1 to 2 seconds and set point accuracies below 1% of set point outperform those of other typical high flow mass flow controllers. Precise control is maintained down to 2% of the IE250A configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers.

Multi-Gas / Multi-Range Capability

The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis.

Resources

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