IP66 Rated Multi-gas, Multi-range Elastomer-sealed 100-250 slm Mass Flow Controllers

Overview
Products
Configuration Options
Features
Accessories
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ie250a ip66-rated, elastomer-sealed 100-250 slm mass flow controller

Overview

The I-Series IE250A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC with an IP66-rated enclosure designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential. The IE250A is capable of Full Scale ranges from 100 to 250 slm (N2 equivalent). The IE250 is available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.

Flow Rates from 100 to 250 slm
Seal and valve plug option of Viton, Buna, Neoprene or EPDM
1 to 2 second settling time
Standard closed conductance leak rate of less than 1.0% of Full Scale

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Products

Configuration Options

		Description
		IE250A Mass Flow Controller, IP66-rated, Elastomer-sealed, 100 - 250 slm

Show Configuration Options

IE250A Elastomer-sealed 250 slm Mass Flow Controllers are available with the following options.

Configuration Option	Option Code
IE250A Mass Flow Controller	IE250A
Gas (Per Semi Standard E52-0703)
Helium (He)	001
Argon = (Ar)	004
Hydrogen = (H₂)	007
Nitrogen (N₂)	013
Other Gas Options	See Here
Flow Range Full Scale
250 slm (250,000 sccm)	255
Fittings (compatible with)
12 mm tube compression	F
3/8 in. tube compression	J
1/2 in. tube compression	S
1/2 in. tube compression (1559 replacement)	W
1/2 in. NPT female	M
8 VCR Male	T
8 VCO Male	D
8 VCR male (1559 replacement)	L
8 VCO male long	Q
W-Seal	H
Connector
Profibus (1480 Compatible)	4
Profibus (1179B Compatible)	3
Analog 0 to 5 VDC (15 pin D connector)	B
Analog 4 to 20 mA (15 pin D connector)	H
Analog 0 to 5 VDC (15 pin D connector) Brooks	E
Analog 0 to 5 VDC (15 pin D connector) Celerity	U
Seal Materials
EPDM (FDA Compliant)	R
Viton (FDA Compliant)	W
Valve Type
Normally closed	0
Mass Flow Meter	3
Reserved
Standard	0
Firmware
MKS will ship firmware revision current to date	20

Specifications

Full Scale Flow Range

100 - 250 slm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

30 to 55 psid
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for >20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale
Repeatability

±0.5% of Reading
Resolution

0.1% of Reading
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Rdg./°C
Inlet Pressure Coefficient

<0.03% of Reading
Typical Settling Time

1 to 2 seconds typical above 10% Full Scale @ 50 psi
Warm-up Time

1 hour
Operating Temperature

10° to 50°C

Storage Humidity

0 to 95% Relative Humidity, non-condensing
Storage Temperature

-20° to 65°C
External Leak Integrity

<1 x 10^-9 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% Full Scale at 40 psia to vac (<500 mTorr)
Wetted Materials

316 S.S., 17-1 S.S., Elgiloy, 430FR (Standard)
Seal Material

Viton® (Class VI) or EPDM (Class VI)
Surface Finish

16 µinch average Ra
Weight

4.5 lbs. (2.05 kg)
Enclosure Rating

IP66
Compliance

CE
Power Requirements

+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal

Voltage: 0 to 5 VDC
Current: 4 to 20 mA
Analog I/O Connector

Voltage: 15-pin Type "D" male
Current: 15-pin Type "D" male

Specifications

Full Scale Flow Range

100 - 250 slm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

30 to 55 psid
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for >20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale
Repeatability

±0.5% of Reading
Resolution

0.1% of Reading
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Rdg./°C
Inlet Pressure Coefficient

<0.03% of Reading
Typical Settling Time

1 to 2 seconds typical above 10% Full Scale @ 50 psi
Warm-up Time

1 hour
Operating Temperature

10° to 50°C

Storage Humidity

0 to 95% Relative Humidity, non-condensing
Storage Temperature

-20° to 65°C
External Leak Integrity

<1 x 10^-9 (scc/sec He)
Leak Integrity Through Closed Valve

<1.0% Full Scale at 40 psia to vac (<500 mTorr)
Wetted Materials

316 S.S., 17-1 S.S., Elgiloy, 430FR (Standard)
Seal Material

Viton® (Class VI) or EPDM (Class VI)
Surface Finish

16 µinch average Ra
Weight

4.5 lbs. (2.05 kg)
Enclosure Rating

IP66
Compliance

CE
Power Requirements

+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal

Voltage: 0 to 5 VDC
Current: 4 to 20 mA
Analog I/O Connector

Voltage: 15-pin Type "D" male
Current: 15-pin Type "D" male

Features

Fast Settling Times

Settling times of 1 to 2 seconds and set point accuracies below 1% of set point outperform those of other typical high flow mass flow controllers. Precise control is maintained down to 2% of the IE250A configured Full Scale flow range. The multi-gas/multi-range capability, along with tight performance specifications for accuracy, control range, and transient response allow users to minimize inventory of high flow MFC part numbers.

Multi-Gas / Multi-Range Capability

The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFCs embedded diagnostic interface, which requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired Full Scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow response, and store operating data for offline analysis.

Features

Accessories

Description	Compatibility	Avail.	Price
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	4 Weeks	$75
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	Contact Us	$75
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	4 Weeks	$76