Products
Solutions
Support
Company
Contact

Menu

Sign In
- Product Comparison

Search

Products
Solutions
Support
Company
Contact

Products
Mass Flow Controllers & Meters
Mass Flow Controllers
I-Series IP66 Rated Mass Flow Controllers

I-Series IP66 Rated Mass Flow Controllers

I-Series Thermal Mass Flow Controllers are designed specifically for mass flow controller applications in harsh environments to protect against water and dust. The IP66-rated enclosure for I-Series Mass Flow Controllers protect it from direct water spray as well as dusty environments.

I-Series IP66 Rated Mass Flow Controllers

Showing 6 products in 6 families

Showing 6 products in 6 families

View:

Filter by:

Full Scale Flow Range

5 sccm - 50 slm (N2 equivalent) 2

50 - 100 slm (N2 equivalent) 1

100 - 250 slm (N2 equivalent) 1

250 - 500 slm (N2 equivalent) 1

500 - 1,000 slm (N2 equivalent) 1

Elastomer 4

Metal 2

Typical Accuracy

±1% of set point for >20 - 100% Full Scale, ±0.25% of Full Scale for 5 - 20% Full Scale 3

±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale (with N2 calibration gas) 2

±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale (with N2 calibration gas) 1

i-series, ip66-rated, 5-50000 sccm mass flow controller

IE50A IP66-rated, Elastomer-sealed 5-50,000 sccm Mass Flow Controllers

Flow rates from 50 to 50,0000 sccm
Seal and valve plug options of Viton, Buna, Neoprene or Kalrez
Less than 750 millisecond settling time

i-series, ip66-rated, 5-50000 sccm mass flow controller

IE50A IP66-rated, Elastomer-sealed 5-50,000 sccm Mass Flow Controllers

i-series, ip66-rated, 5-50000 sccm mass flow controller

IM50A IP66-rated Metal-sealed 5-50,000 sccm Mass Flow Controllers

Flow rates from 50 to 50,000 sccm
Metal sealed MFC with Teflon valve plug, MFM is all metal
Less than 750 millisecond settling time

i-series, ip66-rated, 5-50000 sccm mass flow controller

IM50A IP66-rated Metal-sealed 5-50,000 sccm Mass Flow Controllers

im100a ip66-rated metal-sealed 50-100 slm mass flow controller

IM100A IP66-rated Metal-sealed 50-100 slm Mass Flow Controllers

Flow rates from 50 to 100 slm
Metal-sealed MFC with Teflon valve plug, MFM is all metal
Less than 750 millisecond settling time

im100a ip66-rated metal-sealed 50-100 slm mass flow controller

IM100A IP66-rated Metal-sealed 50-100 slm Mass Flow Controllers

ie250a ip66-rated, elastomer-sealed 100-250 slm mass flow controller

IE250A IP66-rated, Elastomer-sealed 100-250 slm Mass Flow Controllers

Flow Rates from 100 to 250 slm
Seal and valve plug option of Viton, Buna, Neoprene or EPDM
1 to 2 second settling time

ie250a ip66-rated, elastomer-sealed 100-250 slm mass flow controller

IE250A IP66-rated, Elastomer-sealed 100-250 slm Mass Flow Controllers

ie500a ip66-rated, elastomer-sealed 250-500 slm mass flow controller

IE500A IP66-rated, Elastomer-sealed 250-500 slm Mass Flow Controllers

Flow rates from 250 to 500 slm
Seal and valve plug option of Viton, Buna, Neoprene or EPDM
Analog, RS485, Profibus™, or DeviceNet™ I/O

ie500a ip66-rated, elastomer-sealed 250-500 slm mass flow controller

IE500A IP66-rated, Elastomer-sealed 250-500 slm Mass Flow Controllers

ie1000a ip66-rated, elastomer-sealed 500-1000 slm mass flow controller

IE1000A IP66-rated, Elastomer-sealed 500-1000 slm Mass Flow Controllers

Flow rates from 500 to 1000 slm
Seal and valve plug option of Viton, Buna, Neoprene or EPDM
Analog, RS485, Profibus™, or DeviceNet™ I/O

ie1000a ip66-rated, elastomer-sealed 500-1000 slm mass flow controller

IE1000A IP66-rated, Elastomer-sealed 500-1000 slm Mass Flow Controllers

Need help?

Contact an Applications Specialist by sending us an email

©2019 MKS Instruments. All rights reserved.
Terms of Use Privacy

Support: (978) 645-5500
Mon.-Fri.8am - 5pm EST

Contact Us Careers Legal About Us Investors Web Feedback

Sign In

Email Address: Required

Password: Required

Need a new account?

Register

Password Reset

Enter your email address below to reset your account password.

Email Address: Required

Password Reset

Email Verification Required

Cart Merge

Success

Check Order Status

Provide an order number and postal code to quickly check the status of an order.Login to view your complete order history.

Order Number: Required

Delivery ZIP/Postal Code: Required

Sign In Required

To access this and other valuable technical resources, please sign in or register for a new online account.

Add to Cart

Model:

Availability:

Also available on Newport.com

Qty:

Availability:

Shop at Newport.com

Ultra-High Velocity Learn More

Invalid VAT ID

VAT ID has invalid format. It will not be saved with the order when submitted.

added to your cart

Model:

Availability:

View Cart & Checkout Continue Shopping

added to quote

Model:

Request Quote Continue Shopping