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Multi-gas, Multi-range, Metal-sealed, 5-50,000 sccm Mass Flow Controller
Overview
The GM50A & GM51A digitally-controlled mass flow controllers are available with either analog or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow rates from 5 to 50,000 sccm
- Metal sealed with Teflon valve plug
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- Less than 750 millisecond settling time
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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GM50A013101RMM020 |
3 Weeks
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$1,925 |
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GM50A013102RMM020 |
3 Weeks
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$1,925 |
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GM50A013103RMM020 |
3 Weeks
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$1,925 |
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GM50A013201RMM020 |
3 Weeks
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$1,925 |
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GM50A013202RMM020 |
3 Weeks
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$1,925 |
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GM50A013203RMM020 |
3 Weeks
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$1,925 |
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GM50A013501RMM020 |
3 Weeks
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$1,925 |
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GM50A013502RMM020 |
3 Weeks
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$1,925 |
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GM50A013503RMM020 |
3 Weeks
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$1,925 |
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Configuration Options
The following options are available for GM50A Mass Flow Controllers
Ordering Code Example: GM50A013502R6V020
|
Configuration Option |
Option Code |
|---|---|
| GM50A Mass Flow Controller | GM50A |
| Gas (Per Semi Standard E52-0703) | |
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
| Flow Range Full Scale | |
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
| Fittings (compatible with) | |
| 6 mm Swagelok | M |
| 8 mm Swagelok | E |
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 1/8 in. Swagelok (1000 sccm or below) | A |
| 1/4 in. Swagelok | S |
| 1/2 in. Swagelok | K |
| 3/8 in. Swagelok | J |
| 2 VCR Male (1000 sccm or below) | B |
| 4 VCR Male | R |
| 8 VCR Male | T |
| C-seal surface mount | C |
| W-seal surface mount | H |
| NW16 ISO-KF | U |
| Connector | |
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) | H |
| Analog 0 to 5 VDC (15 pin D Connector), Brooks | E |
| Analog 0 to 5 VDC (15 pin D Connector), Celerity | U |
| Valve/Device Type | |
| Normally Closed/Mass Flow Controller, Teflon® | M0 |
| No Valve/Mass Flow Meter | 30 |
| Normally Open/Mass Flow Controller, Teflon® | PT |
| Firmware | |
| MKS will ship firmware revision current to date | 20 |
The following options are available for GM51A Mass Flow Controllers
Ordering Code Example: GM51A013502R6V020
|
Configuration Option |
Option Code |
|---|---|
| GM51A Mass Flow Controller | GM51A |
| Gas (Per Semi Standard E52-0703) | |
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
| Flow Range Full Scale | |
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
| Fittings (compatible with) | |
| 4 VCR Male | R |
| C-seal surface mount as per SEMI 2787.1 | C |
| W-seal surface mount as per SEMI 2787.3F | H |
| Connector | |
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) | H |
| Valve/Device Type | |
| Normally Closed/Mass Flow Controller, Teflon® | M0 |
| No Valve/Mass Flow Meter | 30 |
| Reserved for Future Use | |
| Std. | 0 |
| Firmware | |
| MKS will ship firmware revision current to date | 20 |
Specifications
-
Control Range2% to 100% of Full Scale
-
Full Scale Flow Range5 - 50000 sccm (N2 equivalent)
-
Maximum Inlet Pressure150 psig
-
Normal Operating Pressure Differential10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
-
Repeatability± 0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
-
Inlet Pressure Coefficient<0.02% of Reading/psi
-
Typical Settling Time<750 msec, typical above 5% Full Scale
-
Warm-up Time30 minutes
-
Operating Temperature10°C to 50°C
-
Storage Humidity0 to 95% Relative Humidity, non-condensing
-
Storage Temperature-20° to 80°C
-
External Leak Integrity<1 x 10-09 (scc/sec He)
-
Leak Integrity Through Closed ValveUp to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
-
Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
-
Weight3 lbs (1.4 kg)
-
ComplianceCE
Features
Wide Choice of Digital and Analog Interfaces
The GM50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
Standard 3 inch Footprint
The GM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
Metal Sealed
The GM50A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.
Percent of Setpoint Accuracy
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
Embedded User Interface
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
Patented Thermal Sensor
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.
Resources
Application Notes
- Accelerated Automotive Emission Control Catalyst Research (0, PDF)
- Gas Delivery in Biopharmaceutical Applications (271.8 kB, PDF)
- Gas Delivery for Low-E Glass Coating Applications (530.2 kB, PDF)
- MFCs for Gas Control in Case Hardening Processes (246.3 kB, PDF)
- Gas Delivery for Plasma Spray Coating Applications (320.8 kB, PDF)
- Sample Gas Codes for Mass Flow Controllers
Manuals
- G and I Series Mass Flow Controller Manual (2.2 MB, PDF)
- G-Series Mass Flow Controller DeviceNet™ Supplement (112.5 kB, PDF)
- G and I-Series MFC Profibus Manual Supplement (86.9 kB, PDF)
- G-Series Mass Flow Controller RS485 Supplement (149.3 kB, PDF)
- G-Series Mass Flow Controller PROFINET Communications Supplement (1 MB, PDF)
Drawings And Cad
- GM50A Mass Flow Controller Dimensional Drawing (336.4 kB, PDF)
- GM50A Mass Flow Controller 3D Model Files
- GM51A Mass Flow Controller 3D Model Files
Literature
- GM50A Metal-sealed, Digital Mass Flow Controllers & Meters (0, PDF)
- GM51 Mass Flow Controller (553.1 kB, PDF)
Ultra-High Velocity 