Compare Model Drawings, CAD & Specs Full Scale Flow Range Fitting Type Analog Connector Availability Price
GM50A013101RMM020
$1,925
3 Weeks
 GM50A013101RMM020 10 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013101SMM020
$1,925
3 Weeks
 GM50A013101SMM020 10 sccm 0.25 in. Swagelok-style 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013102RMM020
$1,925
3 Weeks
 GM50A013102RMM020 100 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013103RMM020
$1,925
3 Weeks
 GM50A013103RMM020 1000 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013103SMM020
$1,925
Contact Us
 GM50A013103SMM020 1000 sccm 0.25 in. Swagelok-style 15-pin D-sub (tied grounds)
Contact Us
 $1,925
GM50A013201RMM020
$1,925
3 Weeks
 GM50A013201RMM020 20 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013202RMM020
$1,925
3 Weeks
 GM50A013202RMM020 200 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013203RMM020
$1,925
3 Weeks
 GM50A013203RMM020 2000 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013204RMM020
$1,925
Contact Us
 GM50A013204RMM020 20,000 sccm 4 VCR male 15-pin D-sub (tied grounds)
Contact Us
 $1,925
GM50A013204SMM020
$1,925
Contact Us
 GM50A013204SMM020 20,000 sccm 0.25 in. Swagelok-style 15-pin D-sub (tied grounds)
Contact Us
 $1,925
GM50A013501RMM020
$1,925
3 Weeks
 GM50A013501RMM020 50 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013502RMM020
$1,925
3 Weeks
 GM50A013502RMM020 500 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925
GM50A013503RMM020
$1,925
3 Weeks
 GM50A013503RMM020 5000 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
 $1,925

Configuration Options

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Description
GM50A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.45 in. Wide
GM51A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.25 in. Wide

Specifications

  • Control Range
    2% to 100% of Full Scale
  • Full Scale Flow Range
    5 - 50000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ± 0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec, typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10°C to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-09 (scc/sec He)
  • Leak Integrity Through Closed Valve
    Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Features

Wide Choice of Digital and Analog Interfaces

The GM50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).

Standard 3 inch Footprint

The GM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.

Metal Sealed

The GM50A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Resources

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