Compare Model Drawings, CAD & Specs Full Scale Flow Range Fitting Type Analog Connector Availability Price
Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
10 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
100 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
1000 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
20 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
200 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 2000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
2000 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
50 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
500 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks
Mass Flow Controller, 5000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
5000 sccm 4 VCR male 15-pin D-sub (tied grounds)
3 Weeks

Configuration Options

Description
  GM50A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.45 in. Wide
  GM51A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.25 in. Wide

Specifications

  • Control Range
    2% to 100% of Full Scale
  • Full Scale Flow Range
    5 - 50000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ± 0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec, typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10°C to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-09 (scc/sec He)
  • Leak Integrity Through Closed Valve
    Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Features

Need help?

Contact an Applications Specialist bysending us an email