Multi-gas, Multi-range, Metal-sealed, 50-50,000 sccm Mass Flow Controller
Overview
The GM50A & GM51A digitally-controlled mass flow controllers are available with either analog or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow rates from 5 to 50,000 sccm
- Metal sealed with Teflon valve plug
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- Less than 750 millisecond settling time
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013101RMM020 Mass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013102RMM020 Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013103RMM020 Mass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013201RMM020 Mass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013202RMM020 Mass Flow Controller, 200 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 2000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013203RMM020 Mass Flow Controller, 2000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013501RMM020 Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013502RMM020 Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
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Mass Flow Controller, 5000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal
$1,925
3 Weeks
|
GM50A013503RMM020 Mass Flow Controller, 5000 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal |
3 Weeks
|
$1,925 |
|
Configuration Options
GM50A Metal-sealed 50 slm Mass Flow Controllers are available with the following options.
|
Configuration Option |
Option Code |
|---|---|
| GM50A Mass Flow Controller | GM50A |
| Gas (Per Semi Standard E52-0703) | |
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
| Flow Range Full Scale | |
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
| Fittings (compatible with) | |
| 6 mm Swagelok | M |
| 8 mm Swagelok | E |
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 1/8 in. Swagelok (1000 sccm or below) | A |
| 1/4 in. Swagelok | S |
| 1/2 in. Swagelok | K |
| 3/8 in. Swagelok | J |
| 2 VCR Male (1000 sccm or below) | B |
| 4 VCR Male | R |
| 8 VCR Male | T |
| C-seal surface mount | C |
| W-seal surface mount | H |
| NW16 ISO-KF | U |
| Connector | |
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) | H |
| Analog 0 to 5 VDC (15 pin D Connector), Brooks | E |
| Analog 0 to 5 VDC (15 pin D Connector), Celerity | U |
| Valve/Device Type | |
| Normally Closed/Mass Flow Controller, Teflon® | M0 |
| No Valve/Mass Flow Meter | 30 |
| Normally Open/Mass Flow Controller, Teflon® | PT |
| Firmware | |
| MKS will ship firmware revision current to date | 20 |
Specifications
-
Control Range2% to 100% of Full Scale
-
Full Scale Flow Range5 - 50000 sccm (N2 equivalent)
-
Maximum Inlet Pressure150 psig
-
Normal Operating Pressure Differential10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
-
Repeatability± 0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
-
Inlet Pressure Coefficient<0.02% of Reading/psi
-
Typical Settling Time<750 msec, typical above 5% Full Scale
-
Warm-up Time30 minutes
-
Operating Temperature10°C to 50°C
-
Storage Humidity0 to 95% Relative Humidity, non-condensing
-
Storage Temperature-20° to 80°C
-
External Leak Integrity<1 x 10-09 (scc/sec He)
-
Leak Integrity Through Closed ValveUp to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
-
Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
-
Weight3 lbs (1.4 kg)
-
ComplianceCE
Resources
Application Notes
- Accelerated Automotive Emission Control Catalyst Research (0, PDF)
- Gas Delivery in Biopharmaceutical Applications (271.8 kB, PDF)
- Gas Delivery for Low-E Glass Coating Applications (530.2 kB, PDF)
- MFCs for Gas Control in Case Hardening Processes (246.3 kB, PDF)
- Gas Delivery for Plasma Spray Coating Applications (320.8 kB, PDF)
- Sample Gas Codes for Mass Flow Controllers
Manuals
- G and I Series Mass Flow Controller Manual (2.2 MB, PDF)
- G-Series Mass Flow Controller DeviceNet™ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller Profibus Supplement (86.9 kB, PDF)
- G-Series Mass Flow Controller RS485 Supplement (149.3 kB, PDF)
- G-Series Mass Flow Controller PROFINET Communications Supplement (1 MB, PDF)
Drawings And Cad
- GM50A Mass Flow Controller Dimensional Drawing (336.4 kB, PDF)
- GM50A Mass Flow Controller 3D Model Files
- GM51A Mass Flow Controller 3D Model Files
Literature
- GM50A Metal-sealed, Digital Mass Flow Controllers & Meters (0, PDF)
- GM51 Mass Flow Controller (553.1 kB, PDF)
Ultra-High Velocity