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The GM50A & GM51A digitally-controlled mass flow controllers are available with either analog or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
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GM50A013101RMM020 |
3 Weeks
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$1,925 |
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GM50A013102RMM020 |
3 Weeks
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$1,925 |
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GM50A013103RMM020 |
3 Weeks
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$1,925 |
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GM50A013201RMM020 |
3 Weeks
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$1,925 |
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GM50A013202RMM020 |
3 Weeks
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$1,925 |
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GM50A013203RMM020 |
3 Weeks
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$1,925 |
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GM50A013501RMM020 |
3 Weeks
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$1,925 |
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GM50A013502RMM020 |
3 Weeks
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$1,925 |
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GM50A013503RMM020 |
3 Weeks
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$1,925 |
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GM50A Metal-sealed 50 slm Mass Flow Controllers are available with the following options.
Configuration Option |
Option Code |
---|---|
GM50A Mass Flow Controller | GM50A |
Gas (Per Semi Standard E52-0703) | |
Nitrogen (N2) | 013 |
Ammonia (NH3) | 029 |
Sulfur Hexafluoride (SF6) | 110 |
Other Gas Options | See Here |
Flow Range Full Scale | |
5 sccm | 500 |
10 sccm | 101 |
20 sccm | 201 |
50 sccm | 501 |
100 sccm | 102 |
200 sccm | 202 |
500 sccm | 502 |
1000 sccm | 103 |
2000 sccm | 203 |
5000 sccm | 503 |
10000 sccm | 104 |
20000 sccm | 204 |
30000 sccm | 304 |
50000 sccm | 504 |
Fittings (compatible with) | |
6 mm Swagelok | M |
8 mm Swagelok | E |
10 mm Swagelok | P |
12 mm Swagelok | F |
1/8 in. Swagelok (1000 sccm or below) | A |
1/4 in. Swagelok | S |
1/2 in. Swagelok | K |
3/8 in. Swagelok | J |
2 VCR Male (1000 sccm or below) | B |
4 VCR Male | R |
8 VCR Male | T |
C-seal surface mount | C |
W-seal surface mount | H |
NW16 ISO-KF | U |
Connector | |
EtherCAT | 8 |
DeviceNet | 6 |
RS485 (uses 9 pin connector) | 5 |
Profibus (1480 Compatible) | 4 |
Profibus (1179B Compatible) | 3 |
PROFINET | 9 |
Analog 0 to 5 VDC (9 pin D connector) | A |
Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
Analog 0 to 5 VDC (15 pin D connector) | B |
Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
Analog 4 to 20 mA (15 pin D connector) | H |
Analog 0 to 5 VDC (15 pin D Connector), Brooks | E |
Analog 0 to 5 VDC (15 pin D Connector), Celerity | U |
Valve/Device Type | |
Normally Closed/Mass Flow Controller, Teflon® | M0 |
No Valve/Mass Flow Meter | 30 |
Normally Open/Mass Flow Controller, Teflon® | PT |
Firmware | |
MKS will ship firmware revision current to date | 20 |
The GM50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM50A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
The GM50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
The GM50A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.