Mass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Metal Seal

Technical Specs

  • Type
    Mass Flow Controller
  • Calibration Gas
    N2 (or equivalent)
  • Control Range
    2 - 100 sccm
  • Full Scale Flow Range
    100 sccm
  • Fitting Type
    4 VCR male
  • Seal Material
    Metal
  • Flow Input Output Signal
    0 - 5 VDC
  • Analog Connector
    15-pin D-sub (tied grounds)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10 - 40 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ± 0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec, typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10 - 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20 to 80°C
  • External Leak Integrity
    <1 x 10-09 (scc/sec He)
  • Leak Integrity Through Closed Valve
    Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
  • Surface Finish
    10µ inch average Ra (electropolished)
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

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