GM51A Metal-sealed, Digital Mass Flow Controller/Meter

More about the GM51A here

Full Scale Flow Ranges 5 - 50000 sccm
(N2 equivalent)
Maximum Inlet Pressure 150 psig
(can not exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 5 to 5000 sccm; 10 to 40 psid
10000 to 20000 sccm; 15 to 40 psid
30000 to 50000 sccm; 25 to 40 psid
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale (range on mech.)
Typical Accuracy ±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
±1% of Reading for Meters
(with N2 calibration gas)
Repeatability ±0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.05% of Full Scale/°C
Span < 0.08% of Reading/°C
Inlet Pressure Coefficient <0.02% of Reading/psi
Typical Controller Settling Time <750 msec., typical above 5% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time 30 min
(to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range (Ambient) 10°C to 50°C
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C
(-4° to 149° F)
Fittings Compatible with Swagelok® 4 VCR® male, surface mount (c-seal and w-seal)
Leak Integrity
External (scc/sec He) <1 x 10-10
Through Closed Valve < 1.0% of Full Scale at 40 psig inlet to atmosphere
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard 316L Stainless Steel VAR (equivalent to 316 Stainless Steel SCQ for semiconductor quality)
316 Stainless Steel, Elgiloy®, Nickel, KM45
Valve Seat Teflon® (MFC only)
Surface Finish MFC 10µ inch average Ra (electropolished)
MFM 16µ inch average Ra
Weight less than 3 lbs (1.4kg)
Compliance CE
Analog I/O
Input Power Required +15 to +24 VDC @ (< 4 watts)
Flow Input/Output Signal Voltage (0 to 5 VDC): 9 pin Type "D" male
Current (4 - 20 mA): 15 pin Type "D" male
Digital I/O
Input Power Required
DeviceNet™ +11 to +25 VDC per (<4 watts)
RS-485 +15 to +24 VDC per (<4 watts)
EtherCAT® +24 VDC per (<5 watts)
PROFINET® +24 VDC per (<5 watts)
DeviceNet™ 5 pin micro connnector (power and comm.)
RS-485 9 pin Type D male (power and comm.)
EtherCAT® 2 x RJ-45 (comm.) male
M8 male, 5 pin (power)
PROFINET® 2 x RJ-45 (comm.) male
M8 male, 5 pin (power)
Data Rate Switch/Selection
DeviceNet™ 4 positions: 125, 250, 500K (Default)programmable over network
RS-485 No switch Set Data Rate via RS485
EtherCAT® No switch
PROFINET® No switch
Comm. Rate(s)
DeviceNet™ 125 Kbps, 250 Kbps, 500 Kbps
RS-485 9.6 Kbps, 19.2 Kbps, 38.4 Kbps
EtherCAT® 100 Mbps
PROFINET® 100 Mbps
MAC ID Switches/Addresses
DeviceNet™ 2 switches, 10 positions
0,0 to 6,3
1 to 254
RS-485 Set address over RS485
Station Addresses 0,0 to 9,9
EtherCAT® 3 switches, 16 positions
Network Size
DeviceNet™ Up to 64 nodes
RS-485 Up to 32 nodes
EtherCAT® Up to 4095 nodes
Visual Communication Indicators
DeviceNet™ LED network status (green/red)
LED module status (green/red)
RS-485 LED Comm (yellow)
LED Error (red)
EtherCAT® LED Power (green)
LED Run (green)
LED Error (red)
LED /Comm (green)
PROFINET® LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.
Viton® is a registered trademark of E.I. Dupont Company, Wilmington, DE.
Elgiloy® is a registered trademark of Elgiloy Specialty Metals, Elgin, IL.
Copyright MKS Instruments, Inc. unless noted otherwise.

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Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.