DELTAII Flow Ratio Controller

More about the DELTAII Flow Ratio Controller here

Full Scale Ranges 500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, 10000/10000 sccm
(N2 equivalent)
Maximum Operating Outlet Pressure 200 torr
Delta II will operate with outlet pressures above 200 Torr. For device performance at higher pressures, consult MKS Application Engineers.
Max. Allowable Outlet Pressure Differential 50 torr (between Q1 and Q2)
Normal Operating Pressure Differential <150 torr (<450 torr for 10000/10000)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Input Flow Range 5 to 100% of each channel Full Scale rating
(N2 equivalent)
Ratio Control Range 1:1 to 20:1 and 20:1 to 1:1
Ratio Accuracy 2% of ratio set point
Ratio Repeatability & Reproducibility 0.3% of ratio set point
Resolution 0.02% of channel Full Scale
Temperature Coefficient (per channel)
Zero 0.05% Full Scale/°C
Span 0.08% Reading/°C
Ratio Settling Time <2 seconds
Warm-up Time 30 minutes
Normal Operating Temperature 10 to 40°C
Storage Temperature -20 to 65°C
Storage Humidity 0 to 95% relative humidity, non-condensing
Temperature Display 0 to 100°C
Temperature Readout Units °C
Temperature Accuracy ±2°C
Temperature Resolution 0.1°C
Fittings Swagelok® 4 VCR®
Inlet: male (non-rotatable)
Outlets: male (non-rotatable)
Display 4 digits for value, 4 characters for unit
Leak Integrity
External <1x10-10 (scc/sec He)
Through Closed Valve <2% of Channel FS at 400 torr differential
Wetted Materials 316 stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality)
316 stainless steel, Inconel®, KM-45, PTFE
Surface Finish 5 microinch average Ra
Weight Less than 5 lbs. (2.3 kg)
Connector Digital I/O: 5 pin microconnector (DeviceNet™)
Analog: 9 pin D male
Input Voltage Digital I/O: 11-25 VDC
Analog: +15 to 24 VDC±5%
Power Consumption <9 Watts
Set Point and Output Signals Digital I/O: Digital
Analog: 0 to 5 VDC or 0 to 10 VDC

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.