R Series Gate Valve
Roughing Pump Isolation for Semiconductor Subfab and General Vacuum Applications
The MKS R Series Gate Valve is optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R Series is available with a range of options, including pneumatic and manual actuators, lockout tagout capability, and position indicators.
For more information on these options, download below the Technical Note, "R Series Gate Valve: Preventing Out-of-Sequence Actuation with Lockout/Tagout and Position Indicators."