R Series Gate Valve
Roughing Pump Isolation for Semiconductor Subfab and General Vacuum Applications

R Series Gate Valve - click to enlarge
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The MKS R Series Gate Valve is optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R Series is available with a range of options, including pneumatic and manual actuators, lockout tagout capability, and position indicators.

For more information on these options, download below the Technical Note, "R Series Gate Valve: Preventing Out-of-Sequence Actuation with Lockout/Tagout and Position Indicators."

Features & Benefits:

  • Cost effective and high value
  • Allows roughing pump to stay in operation during foreline maintenance
  • High-Performance Heater Options:
    Excellent temperature uniformity ensures no cold spots on internal surfaces Prevents condensation of effluents and corrosive gases
  • Long cycle life
    DN80 & DN100 > 200,000 cycles
    DN160 > 100,000 cycles
  • Stainless steel and aluminum versions
  • Available in DN80, DN100, DN160mm sizes

Configurations:

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Part NumberPriceQTY
R Series Gate ValveQuote Only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.