Static Mixer

A contactor for dissolving ozone gas in fluids

The Static Mixer is designed to dissolve gases efficiently in fluids. Both gas and fluid are injected into the Static Mixer under pressure. A series of baffles converts the kinetic energy into turbulence, which results in improved mixing and solution. The fluids can be ultra pure water, sulphuric acid or in the PFA version water containing HF. Common applications include the solution of ozone gas in fluids for photoresist strip or for cleaning steps in semiconductor wet wafer processing.


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LIQUOZON StaticMixerQuote Only

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Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.