As a complete ozone source, MKS offers not only ozone expertise, but also solutions to make using ozone easier. Ozone is a highly toxic gas. Wherever ozone is used, safety measures have to be taken in order to protect personnel and equipment from unintended ozone exposure. One such important safety measure is the destruction of excess ozone gas that is not used in a process. The OVS Ozone gas destruct unit is designed to safely convert high levels of ozone into oxygen, reducing the ozone level down to detection limit, well below safety thresholds.