Integrated Pressure Controller with Mass Flow Meter
The PPCMA pressure controller with integrated mass flow meter provides pressure measurement and control while monitoring mass flow rates for critical process applications (e.g. backside wafer cooling) in a compact package that saves critical space when compared to the previous multi-component systems needed to accomplish the task.
The PPCMA utilizes MKS Instruments' leading Baratron® capacitance manometer technology for pressure measurement and patented thermal flow meter to monitor gas mass flow. Both are integrated along with a proportioning control valve and the latest in control electronics for fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PPCMA can be configured for 5 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. The valve and flow meter can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.
The PPCMA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device's micro USB user interface accessible via virtually any PC with a web browser.