PPCMA
Integrated Pressure Controller with Mass Flow Meter

PPCMA Pressure Controller - click to enlarge
click to zoom

The PPCMA pressure controller with integrated mass flow meter provides pressure measurement and control while monitoring mass flow rates for critical process applications (e.g. backside wafer cooling) in a compact package that saves critical space when compared to the previous multi-component systems needed to accomplish the task.

The PPCMA utilizes MKS Instruments' leading Baratron® capacitance manometer technology for pressure measurement and patented thermal flow meter to monitor gas mass flow. Both are integrated along with a proportioning control valve and the latest in control electronics for fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PPCMA can be configured for 5 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. The valve and flow meter can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.

The PPCMA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device's micro USB user interface accessible via virtually any PC with a web browser.

Features & Benefits:

  • Fast response to set point with minimal overshoot
  • Metal-sealed, cleanroom manufactured units meet critical high purity application needs
  • Integral Baratron® capacitance manometer technology provides accuracy, reliability, and wide range
  • Integral pressure measurement and control with flow metering in a single package requires less space and reduces system cost
  • CE Mark compliant meets requirements for European Union

Applications:

The PPCMA Pressure Controller is suitable for transport chamber pressure control, critical backside wafer pressure control and process gas panel pressure balancing as well as run-vent pressure control applications.

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberPriceQTY
PPCMA Pressure Controller with Mass Flow MeterQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.