Configuration Options

Description
  ppca integrated pressure controller PPCA Absolute Pressure Controller, 5-1000 Torr, 4 VCR Fittings, PPCA

Specifications

  • Type
    PPCA Absolute Pressure Controller
  • Pressure Range
    10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale
  • Fitting Type
    Swagelok® 4 VCR Male
  • Valve Position
    Normally Closed
  • Valve Seat
    PTFE (Teflon®) or Elastomer (Viton®), Buna-N, Neoprene, EPDM
  • Flow Rate
    50, 200, 1000, 5000, 10000, 20000, 30000, 50000 (sccm)
  • Pressure Readout Units
    Torr, kPa, mbar
  • Pressure Resolution
    0.1 Torr
  • Pressure Control Accuracy
    ±1.0% of Reading (≥10% Full Scale)
    ±0.2% of Full Scale (<10% Full Scale)
  • Transducer Over Pressure Limit
    2x Full Scale for all ranges
  • Maximum Differential Pressure
    45 psid
  • Burst Pressure
    1500 psig
  • Control Mode
    Upstream or Downstream
  • Pressure Measurement Accuracy
    ±0.5% of Reading
  • Zero Temperature Coefficient
    ±0.02% of Full Scale/°C
  • Span Temperature Coefficient
    ±0.04% of Reading/°C
  • Control Range
    >5 to 100% of Full Scale
  • Typical Response Time
    <1.0 second (excluding system time constant)
  • Operating Temperature
    10 to 50°C (50 to 122°F)
  • Storage Temperature
    -20 to 80°C (minus 4 to176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of orifice Full Scale
    (Nitrogen at 25 psig on inlet to atmosphere)
    <0.1% of orifice Full Scale - Elastomer
  • Wetted Materials
    Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45, Inconel® 718, 825 Incoloy®
    Optional: (Valve Seat) PTFE (Teflon) or Elastomer (Viton)
  • Surface Finish
    <10 µinches, average Ra electropolished
  • Power Required
    DeviceNet™: +11 to +25 VDC per (<4 watts)
    EtherCAT®: +24 VDC (<5 watts)
  • Connector-Interface
    DeviceNet™: 5 pin micro connector (power and comm.)
    EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
  • Data Rate Switch
    DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)
    EtherCAT®: No switch
  • EtherCAT Communication Rate
    100 Mbps
  • DeviceNet Communication Rate
    125 Kbps, 250 Kbps, 500 Kbps
  • MAC ID Switches
    DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
    EtherCAT®: 3 switches, 16 positions
  • Network Size
    DeviceNet™: Up to 64 nodes
    EtherCAT®: Up to 4095 nodes
  • Indicators
    DeviceNet™: LED Network (green/red), LED Module (green/red)
    EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
  • Weight
    <3 lbs (1.36 kg)
  • Compliance
    CE

Features

Baratron® Capacitance Manometer Technology

The PPCA utilizes leading Baratron® capacitance manometer technology for pressure measurement from MKS Instruments. It is integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PPCA can be configured for 10 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. This configurability makes the device suitable for transport chamber pressure control, critical backside wafer pressure control as well as run-vent pressure control applications. The control valve can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.

DeviceNet™ or EtherCAT® I/O

The PPCA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s micro USB user interface accessible via virtually any PC with a web browser.

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