PPCA Integrated Upstream Pressure Controllers are available with the following options.
|Configuration Option||Option Code|
PPCA Integrated Upstream Pressure Controller
|Pressure Range Full Scale|
|Swagelok 4 VCR||R|
|A (50 sccm)||A|
|#1 (200 sccm)||1|
|#2 (1000 sccm)||2|
|#3 (5000 sccm)||3|
|#4 (10000 sccm)||4|
|#5 (20000 sccm)||5|
|#6 (30000 sccm)||6|
|#7 (50000 sccm)||7|
|Customer must specify firmware version at time of order||10|
The PPCA utilizes leading Baratron® capacitance manometer technology for pressure measurement from MKS Instruments. It is integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PPCA can be configured for 5 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. This configurability makes the device suitable for transport chamber pressure control, critical backside wafer pressure control as well as run-vent pressure control applications. The control valve can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.
The PPCA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s micro USB user interface accessible via virtually any PC with a web browser.