Next Generation Ozonated Water Delivery System with Optional Recirculation
LIQUOZON® VariO3 Ozonated Water Delivery System is the next step in wet processing with dissolved ozone, for the semiconductor and display industries. A compact standalone system providing ultra-pure ozonated water (DIO3) with closed loop control of ozone concentration and pressure; where both parameters are kept stable under changing flow conditions. The VariO3 was designed for easy integration with the production tools used in today’s advanced electronics industries.
With flow rates of up to 60 L/min and ozone concentrations up to a maximum 140 ppm @2 L/min, LIQUOZON® VariO3 covers multiple applications.