LIQUOZON® VariO3
Next Generation Ozonated Water Delivery System with Optional Recirculation

LIQUOZON® VariO3 Next Generation Ozonated Water Delivery System with Optional Recirculation - click to enlarge
click to zoom

LIQUOZON® VariO3 Ozonated Water Delivery System is the next step in wet processing with dissolved ozone, for the semiconductor and display industries. A compact standalone system providing ultra-pure ozonated water (DIO3) with closed loop control of ozone concentration and pressure; where both parameters are kept stable under changing flow conditions. The VariO3 was designed for easy integration with the production tools used in today’s advanced electronics industries.

With flow rates of up to 60 L/min and ozone concentrations up to a maximum 140 ppm @2 L/min, LIQUOZON® VariO3 covers multiple applications.

Performance:

Concentration and Flow Diagram - click to enlarge
Concentration and Flow Diagram - click to zoom
System Flow and Configuration Diagram (typical) - click to enlarge
System Flow and Configuration - click to zoom

Features & Benefits:

  • Compact footprint with excellent performance and reliability
  • Faster, easier installation, system integration and operation
  • Clean, safe alternative to conventional chemical processing
  • Low cost of ownership

Applications:

  • Wet wafer cleaning
  • Contaminant removal
  • Surface conditioning
  • Water mark removal
  • Oxide growth

Configurations:

Purchase now or request a quote:
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Part NumberPriceQTY
LIQUOZON VariO3Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.