Ozonated Water Delivery System, 3-90 ppm, 2-140 lpm, Optional Recirculation
Model: LIQUOZON-VariO3
Ozonated Water Delivery System, 3-90 ppm, 2-140 lpm, Optional Recirculation
Ozonated Water Delivery System, 3-90 ppm, 2-140 lpm, Optional Recirculation
Model: LIQUOZON-VariO3
Overview
Overview
MKS' LIQUOZON® VariO3 is a dissolved ozone gas delivery system providing high purity ozone in ultrapure water for Semiconductor and Electronic Thin Film applications like contaminant removal and surface conditioning via wet clean or rinsing methods. The high redox potential of ozone causes rapid conversion back to oxygen making it an environmentally friendly alternative to other chemical processes.
Technical Specs
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TypeOzone Water Delivery System
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Ozone Concentration3-90 ppm
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Flow Rate2-140 lpm
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Operating PressureAdjustable 1.0 to 3.0 barg (dependent on UPW supply pressure) without DIO3 Outlet Pump, Adjustable 1.4 to 3.7 barg (dependent on UPW supply and system pressure)with DIO3 Outlet Pump
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Wetted SurfacesLiquid: PFA, PTFE, quartz glass
Gas: 316L stainless steel, PFA, PTFE
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Control InterfacesBinary in/out (dry contacts), RS232, RS485, analog 4 - 20 mA in/out, USB (RS232 Com Port emulation)
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Dimensions1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
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Weight315-400 kg, depending on configuration
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ComplianceCE, SEMI F47, SEMI S2
Resources & Downloads
Drawings & CADs
Ozonated Water Delivery System, 3-90 ppm, 2-140 lpm, Optional Recirculation
Ultra-High Velocity