Ozonated Water Delivery System, 3-90 ppm, 2-140 lpm, Optional Recirculation

Technical Specs

  • Type
    Ozone Water Delivery System
  • Ozone Concentration
    3-90 ppm
  • Flow Rate
    2-140 lpm
  • Operating Pressure
    Adjustable 1.0 to 3.0 barg (dependent on UPW supply pressure) without DIO3 Outlet Pump, Adjustable 1.4 to 3.7 barg (dependent on UPW supply and system pressure)with DIO3 Outlet Pump
  • Wetted Surfaces
    Liquid: PFA, PTFE, quartz glass
    Gas: 316L stainless steel, PFA, PTFE
  • Control Interfaces
    Binary in/out (dry contacts), RS232, RS485, analog 4 - 20 mA in/out, USB (RS232 Com Port emulation)
  • Dimensions
    1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
  • Weight
    315-400 kg, depending on configuration
  • Compliance
    CE, SEMI F47, SEMI S2

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