Soft Start Bellows-sealed Isolation Valves
MKS Two-Stage valves achieve a soft pumpdown and vacuum system isolation in one common housing. A small bypass valve is integrated into the main isolation valve, simplifying setup and reducing costs. With the integrated soft pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage. The bypass valve can be user adjustable by selecting a micrometer or thumb screw adjustment option. Additionally, a fixed flow orifice can be sized for the application that is housed internal to the valve to prevent unwanted adjustment. These legacy valves are supported by MKS for configurations not supported by the LoPro™ product line. For increased cycle life and reduced size, please see the MKS LoPro™ Two-Stage products.