728A Baratron® Reduced Size, Heated Absolute Capacitance Manometer
(1-1000 Torr), Temperature Controlled to 100°C
Direct, Absolute, Analog Pressure/Vacuum Measurement

photo - 728A Baratron Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C

Many thin film and industrial applications require accurate, reliable, and cost-sensitive measurement of vacuum in processes where condensation of by-products could affect the performance of the sensor. The Baratron® heated manometer's blend of small size, high operating temperatures, rugged corrosion-resistant Inconel® sensor, and performance make this heated capacitance diaphragm gauge an ideal solution for new process equipment and retrofits into existing process tools.

Features & Benefits:

  • Smallest Baratron® heated vacuum gauge available, easily mounts inside process systems and gas cabinets
  • Operating temperature of 100°C prevents deposition of process gases and by-products that cause drift
  • Analog output of 0-10VDC interfaces with most control systems

Applications:

  • Semiconductor Precursor Gas Delivery
  • Flat Panel Display Manufacturing Equipment
  • Optical and Magnetic Data Storage Manufacturing Equipment
  • Biopharmaceutical Processing Systems
  • Advanced Materials Thermal Processing Systems

Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberPressure Range full scaleFittingInputOutputTemperatureConnectorPriceQTY
728A11TGA2FA10 mmHg (Torr)NW 16 KF± 15 VDC input, 0-10 VDC output100°C9-pin Type "D"Quote Only
728A11TGA2FB10 mmHg (Torr)NW 16 KF± 15 VDC input, 0-10 VDC output100°C15-pin Type "D" on 4.70" (118mm) ±0.5" (12.7mm) cableQuote Only
728A11TCE2FA10 mmHg (Torr)Swagelok® 8 VCR® female± 15 VDC input, 0-10 VDC output100°C9-pin Type "D"Quote Only
728A11TCE2FB10 mmHg (Torr)Swagelok® 8 VCR® female± 15 VDC input, 0-10 VDC output100°C15-pin Type "D" on 4.70" (118mm) ±0.5" (12.7mm) cableQuote Only
728A12TGA2FA100 mmHg (Torr)NW 16 KF± 15 VDC input, 0-10 VDC output100°C9-pin Type "D"Quote Only
728A12TGA2FB100 mmHg (Torr)NW 16 KF± 15 VDC input, 0-10 VDC output100°C15-pin Type "D" on 4.70" (118mm) ±0.5" (12.7mm) cableQuote Only
728A12TCE2FA100 mmHg (Torr)Swagelok® 8 VCR® female± 15 VDC input, 0-10 VDC output100°C9-pin Type "D"Quote Only
728A12TCE2FB100 mmHg (Torr)Swagelok® 8 VCR® female± 15 VDC input, 0-10 VDC output100°C15-pin Type "D" on 4.70" (118mm) ±0.5" (12.7mm) cableQuote Only
728A13TGA2FA1000 mmHg (Torr)NW 16 KF± 15 VDC input, 0-10 VDC output100°C9-pin Type "D"Quote Only
728A13TGA2FB1000 mmHg (Torr)NW 16 KF± 15 VDC input, 0-10 VDC output100°C15-pin Type "D" on 4.70" (118mm) ±0.5" (12.7mm) cableQuote Only
728A13TCE2FB1000 mmHg (Torr)Swagelok® 8 VCR® female± 15 VDC input, 0-10 VDC output100°C15-pin Type "D" on 4.70" (118mm) ±0.5" (12.7mm) cableQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.