ASTRON® Paragon® AX7700 & AX7710
Reactive Gas Source Platform for New Process Applications
(rated to 6.0 slm NF3 flow)
The new ASTRON® Paragon® Reactive Gas Generator is the latest platform in the industry leading family of ASTRON remote plasma sources. Building on the production proven attributes of the existing ASTRON reactive gas generators, Paragon® is designed with improvements and enhancements to enable the next generation of process development. The Paragon® reactive gas generator is designed for NF flows up to 6 slm and pressures up to 10 Torr while maintaining a high gas dissociation rate, allowing for added process flexibility, decreased processing time as well as increased throughput. Based on the MKS patented Low-Field-Toroidal plasma technology, the Paragon® incorporates a new PEO coating that offers superior performance and extended block life.
The Paragon® reactive gas generator is available in two models, the AX7700 with a standard DB25 communication port and the new AX7710 with an EtherCAT communication port. The EtherCAT protocol is optimized for process data and is transported directly within the standard IEEE 802.3 Ethernet frame. The EtherCAT slave devices read the data addressed to them while the telegram passes through the device. Similarly, input data are inserted while the telegram passes through. The result is much faster response times in data transfer and subsequently better device control overall.