Remote Plasma Source, 8 slm, NF3 Flow, Paragon

Technical Specs

  • Type
    Remote Plasma Source
  • Gas Supply During Ignition
    1 - 8 Torr @ 1 - 5 slm for Ar
  • Gas Supply Post Ignition
    1 - 10 Torr @ 1 - 8 slm
  • Process Gas Supply Post Ignition
    Up to 8 slm of NF3 (post ignition NF3 can be added and Ar removed)
  • NF3 Operation Reactant Output
    >95% dissociation across operating space, 1 - 10T, 1 - 8 slm
  • O2: NF3 Mix Operation Reactant Output
    >95% dissociation across operating space, 1 - 10T, 1 - 8 slm
  • Ignition Gas Supply
    100% Ar
  • Process Gas Feed & Exhaust
    Inlet: KF40, Outlet: KF50
  • Duty Cycle
    2 sec on time minimum to 100% (process times >45 minutes)
  • Gas Flow
    8 slm, NF3 Flow
  • Control Interface
    EtherCAT and analog I/O 25 pin D
  • Wetted Materials
    PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina
  • Operating Temperature
    Ambient air 40°C max.
  • Cooling Water Required
    2.0 gpm, <30°C
  • Power Requirements
    208 VAC, 50/60 Hz, 35A, 3 phase (50 A Service recommended)
  • Dimensions
    18.40 x 9.50 x 10.50 in. (467 x 241 x 267 mm nominal)
  • Weight
    54 lb. (24.5 Kg)
  • Compliance
    NRTL, CE Safety (EN61010-1, UL 61010-1, CSA C22.2.61010-1), CE EMC (EN61326-1, EN61000-6-2, EN61000-6-4), Semi F47, Semi S2 Safety (S8, S10, S14)

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