653 B Exhaust Throttle Valve with High-Speed Motor/Gear Assembly

photo - 653 B Exhaust Throttle Valve with High-Speed Motor/Gear Assembly

The 653's high speed motor and gear/driver assembly provides fast response to a given set point to quickly achieve desired pressure and increase system throughput. High accuracy is attained by microstepping the flapper to give more precise control, and no drift, of pressure at the desired set point. The 653 has sufficient torque to operate sealing valves up to four inches and non-sealing valves to 12 inches to prevent clogging from contamination build-up. The valve body can be heated up to 150°C (using optional sealing materials) for operation in high temperature applications and processes. The 653 has a flapper position indicator to identify valve angle during system troubleshooting, is available in a variety of sizes and flange styles, and is compatible with MKS 651 and 1651 controllers.

For additional flange styles and valve body heaters, contact MKS Applications Engineering.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberNominal Inside Diameter in inches mmFlange SizeFlapper OringCAD DiagramsPriceQTY
653B-20-40-10.779 (20)ISO KF-40Yes122771.dwg
122771.dxf
Quote Only
653B-20-40-20.779 (20)ISO KF-40No122771.dwg
122771.dxf
Quote Only
653B-1-40-11.270 (32)ISO KF-40Yes122746.dwg
122746.dxf
Quote Only
653B-1-40-21.270 (32)ISO KF-40No122746.dwg
122746.dxf
Quote Only
653B-2-50-11.886 (48)ISO KF-50Yes122749.dwg
122749.dxf
Quote Only
653B-2-50-21.886 (48)ISO KF-50No122749.dwg
122749.dxf
Quote Only
653B-60-63-12.360 (60)ISO NW-63Yes122761.dwg
122761.dxf
Quote Only
653B-60-63-22.360 (60)ISO NW-63No122761.dwg
122761.dxf
Quote Only
653B-3-80-12.886 (73)ISO NW-80Yes122763.dwg
122763.dxf
Quote Only
653B-3-80-22.886 (73)ISO NW-80No122763.dwg
122763.dxf
Quote Only
653B-4-100-13.885 (99)ISO NW-100Yes122751.dwg
122751.dxf
Quote Only
653B-4-100-23.885 (99)ISO NW-100No122751.dwg
122751.dxf
Quote Only
653B-6-160-25.869 (149)ISO NW-160No122753.dwg
122753.dxf
Quote Only
653B-8-200-27.650 (194)ISO NW-200No122755.dwg
122755.dxf
Quote Only
653B-10-250-29.700 (246)ISO NW-250No122757.dwg
122757.dxf
Quote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.