T2B EtherCAT® Exhaust Throttle Valves with Integrated Controller

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t2b ethercat exhaust throttle valve with integrated controller

Overview

The T2B EtherCAT® Exhaust Throttle Valve is specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2B integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The unique modelbased control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement.

ETG.5003.1 common device profile and ETG.5003.2030 process control valve
Three motor options for optimizing speed and torque requirements
Available with the "F-seal" soft sealing flapper option for reliable pressure control at high pressure setpoints
High-performance pressure control either using PID or MKS Model-based control
Heatable valve body (105°C standard, 150°C optional)
Dual channel Baratron® sensor input with range auto switching

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Products

Product Options

		Description
		T2BA Exhaust Throttle Valve, EtherCAT Communications, Series T2B

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T2B Downstream Pressure Controllers are available with the following options.

Configuration Option	Option Code
T2B Downstream Pressure Controller	T2BA
Valve Bore/Flange Size
1 in./NW40 ISO-KF	01K
2 in./NW50 ISO-KF	02K
60 mm/NW63	60N
3 in./NW80	03N
4 in./NW100	04N
Flapper Type
Non-Sealing	2
Drive Type
Direct Drive, NEMA 23-2, 8 in-lb	2
Direct Drive, NEMA 24-2, 25 in-lb	4
Geared Drive, NEMA 17-1 20:1, 40 in-lb	3
Nominal Radial Gap (NRG), Flapper/Body
0.002 in. (std for 1”, 2”, 60mm)	020
0.003 in. (std for 3", 4")	030
Heatability
Up to 150°C, with fan	1
Up to 150°C	2
Up to 105°C, without fan	3
Seal Materials (Valve Shaft)
Viton	V
Chemraz E38	C
Chemraz 592	D
Kalrez 4079	L
Kalrez 8085	K
Kalrez 9100	M
Kalrez 9500	N
Communications
EtherCAT, no analog w/LCD	4
Pressure Sensor Power
No Power	4
Reserved
Reserved	00
Firmware
MKS will ship the current firmware revision	VV

Specifications

Type

T2B EtherCAT® Exhaust Throttle Valve
Accuracy

0.25% of set point, or 5mV (whichever is greater)
Control Range

0.0001%-100% Full Scale (with Dual Transducer Input)
Flapper Types

Non-sealing and low-conductance soft-sealing
Operating Temperature

Motor and Electronics: 0 - 50°C
Valve Body: 0 - 105°C or optionally up to 150°C
Storage Temperature: -20 - 80°C
Exposed Materials

Non-sealing Types: 316 SST, Tefzel
Low closed-conductance soft-sealing Types: 316 SST, Tefzel, PTFE
Shaft Seal Material: Viton, Kalrez®, Chemraz®, and others
Shaft Seal Material

Viton shaft seals are available for valve body temperatures that will not exceed 105°C and process gases compatible with Viton. For valve body heating as high as 150°C and/or process gas compatibility, various Kalrez and Chemraz compounds are also offered.
External Leak Rate

1 e^-9 atm cc/sec
Power Requirements

24 VDC @ <100 W max.

Valve Bore and Flange Size

KF40, KF50, NW63, NW80 and NW100
Additional sizes available, contact MKS Applications Engineering.
Pressure Sensor Power

An optional integrated power supply can supply up to 650 mW of power for one or two manometers.
Nominal Radial Gap

Standard clearances (Radial Clearance) are appropriate for most applications. Consult MKS for applications with high internal heating.
Heatability

All T2B valves allow the valve body to be heated up to 105°C without concern. T2B valve bodies may be heated up to 150°C with the heatability option and appropriate selection of shaft seal compound.
Drive

Direct drive is the lowest cost and highest speed solution.
8 in-lb Direct Drive: Ideal for clean processes where the valve is not subject to deposits inside the valve.
25 in-lb Direct Drive: Suited for slightly depositing processes where the valve may be subject to deposits inside the valve.
40 in-lb High Torque: Geared Drive Increase available drive torque for the most harsh processes. Utilizes a 20:1 planetary gear box to deliver reliable torque to combat harsh deposits in tough processes like Epi, CVD, MOCVD and others.
Communications

ETG. 5003.1 Common Device Profile; ETG.5003.2030 Process Control Valve.
Pressure Input

T2B with an EtherCAT interface do not include nor need analog connections to the process tool pressure sensors. EtherCAT pressure sensors exchange data to the master and the data is available (typically ~ 1 ms refresh) as standard PDO data to the T2B enabling fast, noise-free, and precise closed-loop pressure control. Communication interfaces other than EtherCAT support up to two analog capacitance manometers.
Firmware

To support copy-exact methodologies, the firmware revision shipped is defined by this code. Re-ordering by the same code assures an identical product when desired. First-time orders where no specific version is noted or required can be identified with a "VV". The T2B unit will be configured and shipped with the most up-to-date firmware available.
Compliance

CE

Specifications

Type

T2B EtherCAT® Exhaust Throttle Valve
Accuracy

0.25% of set point, or 5mV (whichever is greater)
Control Range

0.0001%-100% Full Scale (with Dual Transducer Input)
Flapper Types

Non-sealing and low-conductance soft-sealing
Operating Temperature

Motor and Electronics: 0 - 50°C
Valve Body: 0 - 105°C or optionally up to 150°C
Storage Temperature: -20 - 80°C
Exposed Materials

Non-sealing Types: 316 SST, Tefzel
Low closed-conductance soft-sealing Types: 316 SST, Tefzel, PTFE
Shaft Seal Material: Viton, Kalrez®, Chemraz®, and others
Shaft Seal Material

Viton shaft seals are available for valve body temperatures that will not exceed 105°C and process gases compatible with Viton. For valve body heating as high as 150°C and/or process gas compatibility, various Kalrez and Chemraz compounds are also offered.
External Leak Rate

1 e^-9 atm cc/sec
Power Requirements

24 VDC @ <100 W max.

Valve Bore and Flange Size

KF40, KF50, NW63, NW80 and NW100
Additional sizes available, contact MKS Applications Engineering.
Pressure Sensor Power

An optional integrated power supply can supply up to 650 mW of power for one or two manometers.
Nominal Radial Gap

Standard clearances (Radial Clearance) are appropriate for most applications. Consult MKS for applications with high internal heating.
Heatability

All T2B valves allow the valve body to be heated up to 105°C without concern. T2B valve bodies may be heated up to 150°C with the heatability option and appropriate selection of shaft seal compound.
Drive

Direct drive is the lowest cost and highest speed solution.
8 in-lb Direct Drive: Ideal for clean processes where the valve is not subject to deposits inside the valve.
25 in-lb Direct Drive: Suited for slightly depositing processes where the valve may be subject to deposits inside the valve.
40 in-lb High Torque: Geared Drive Increase available drive torque for the most harsh processes. Utilizes a 20:1 planetary gear box to deliver reliable torque to combat harsh deposits in tough processes like Epi, CVD, MOCVD and others.
Communications

ETG. 5003.1 Common Device Profile; ETG.5003.2030 Process Control Valve.
Pressure Input

T2B with an EtherCAT interface do not include nor need analog connections to the process tool pressure sensors. EtherCAT pressure sensors exchange data to the master and the data is available (typically ~ 1 ms refresh) as standard PDO data to the T2B enabling fast, noise-free, and precise closed-loop pressure control. Communication interfaces other than EtherCAT support up to two analog capacitance manometers.
Firmware

To support copy-exact methodologies, the firmware revision shipped is defined by this code. Re-ordering by the same code assures an identical product when desired. First-time orders where no specific version is noted or required can be identified with a "VV". The T2B unit will be configured and shipped with the most up-to-date firmware available.
Compliance

CE

Features

High-speed Stepper Motor

The T2B utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and reduces preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2B is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments. An encoder-based position feedback system is provided for diagnostic purposes.