FTIR Analyzers

photo - MultiGas 2030 Gas Analyzer

MultiGas FTIR Spectroscopy

MultiGas FTIR Spectroscopy gas analyzer instruments from MKS Instruments are capable of ppb to ppm sensitivity for multiple gas species in a variety of gas analysis applications, such as:

MultiGas & Precisive® TFS Optical Gas Analyzers Featured in Ceramics Industry Magazine!

photo - AIRGARD CWA/HPM/TIC Ambient Air Analyzer

AIRGARD CWA/HPM/TIC Ambient Air Analyzer

AIRGARD® ambient air analyzer is an ultra-sensitive, FTIR-based gas analyzer designed to rapidly detect toxic gases, including:

  • Continuous Chemical Warfare Agents (CWA)
  • Hazardous Production Materials (HPM)
  • Toxic Industrial Chemicals (TIC)
  • Siloxane analysis in Biogas

AIRGARD® is capable of detecting parts per billion (ppb) levels of most CWAs and TICs below toxic, "Immediately Dangerous to Life or Health" (IDLH) levels within 20 seconds.


MKS Optical Gas Analysis Products

Technical Papers:
Exhaust Gas Analysis Helps to Reduce Costs
Catalytic and Engine Exhaust Characterization Utilizing Gas Phase FTIR for Real Time Feedback
HCl Monitoring – A Best Practice Guide for Measurement
Continuous Emission Monitoring for Clay Ceramic Manufacturing
from Ceramics Industry Magazine
Monitoring for CWAs and TICs in Homeland Security Applications
Ethylene Oxide Analysis for Medical Equipment Sterilization

Application Notes:
MKS FTIR Analysis for Syngas Reactions
Hydrogen Purity Analysis by FTIR
Siloxanes Analysis in Biogas Using AIRGARD® FTIR
5 Hz Automobile, Diesel, and Catalyst Emissions Measurements with MKS MultiGas™ 2030 HS
5 Hz Catalytic Emissions FT-IR Monitoring During Lean-Rich Engine Cycles
Ammonia (NH3) Contaminant Detection using MultiGas™ Purity Analyzer
Aqueous Scrubber Efficiency Analysis with the MultiGas™ 2030
Formaldehyde Emissions Monitoring with MultiGas™ 2030
Gas Analysis Solutions for Yield Improvement of Deposition Processes for LEDs and Large Area Coating Applications
Infrared Analysis of E85 Engines
Nitrogen Trifluoride (NF3) Contaminant Detection using MultiGas™ Purity Analyzer
Nitrous Oxide (N2O) Contaminant Detection using MultiGas™ Purity Analyzer
PFC Abatement Efficiencies - MultiGas™ 2030
Power Plant Emissions and SCR Monitoring with MultiGas™ 2030 Analyzers
Rapid Catalytic Performance Evaluation with MultiGas™ Analyzers
Real-Time Monitoring of Trace Impurities in Semiconductor Nitride Deposition Processes
Fluorinated Greenhouse Gas Monitoring in Semiconductor Fabs
High Purity Silane Analysis for Solar Applications
Comparison of MultiGas™ 1065-Ready FTIR with Standard Bench Analyzers

Conference Presentations:
Recent Developments in FTIR for Stack Emissions and CEM Monitoring in the Power Generation Industry conference presentation
FTIR for EPA Protocol Gas Certification conference presentation
Method Validation Using FTIR for H2 Gas Purity Analysis conference presentation
On-Line H2 PPB Impurity Analysis Using FTIR conference presentation
HCl Emissions Measurements Using FTIR - EUEC 2013 conference presentation
On-Line Analysis of Total Si in Landfill & Digester Gas conference presentation
Field Validation of an On-Line FTIR Analyzer for Measuring Total Siloxane Content in Landfill Gas conference presentation
Improved Techniques for Measuring & Validating Siloxanes Present in Biogas conference presentation

Market Briefs:
Maintaining Bulk Gas Purity in Semi Applications

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.