T3B High-speed Exhaust Throttle Valves
Butterfly Valves for Pressure Control

photo - T3B High Speed Exhaust Throttle Valve

The T3B High-speed Exhaust Throttle Valves are specifically designed for high-performance pressure control in semiconductor and thin film processes. The T3B is available in a wide range of sizes, configurations, and I/O Protocols. The T3B offers robust, reliable, and accurate pressure control even in the most difficult applications.

Features & Benefits:

  • Analog, RS232, or DeviceNet™ communications protocols are available
  • High-speed option (up to 180 msec) - faster set point and recovery from flow/pressure disturbances
  • High-torque option - extends uptime in harsh process conditions
  • Available with the "F-seal" soft sealing flapper option for precise, reliable pressure control at high-pressure set points (up to 1 atmosphere)
  • Dual-channel Baratron® manometer input with range auto switching for high-pressure control accuracy
  • Programmable for pressure, position, or set point limits
  • Heatable (105°C standard, 150°C optional)

Applications:

T3B Exhaust Throttle Valves are suitable for CVD, RTP, or Load Lock Pressure Control in Semiconductor, Solar, Display or Thin Film Applications.

Configurations:

Purchase now or request a quote:
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Part NumberPriceQTY
T3BIB (RoHS compliant version)Quote Only
T3BIA High Speed Exhaust Throttle ValveQuote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.