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300mm photoresist detection monitor for high pressure degas
Photoresist Detection Monitor, 300 mm Resist-Torr®

Specifications

  • Mass Range
    1-200 amu
  • Detector
    Dual (Faraday and Secondary Electron Multiplier)
  • Minimum Detectable Concentration
    <100ppb for all common gases except <10ppm for H2
  • Mass Stability
    Better than ±0.1 amu over 8 hours at stable ambient temperature
  • Resolution
    Better than 10% valley between peaks of equal height throughout the mass range
  • Bakeout Temperature and Bakeout Jacket
    Included for 200°C bakeout
  • Ion Source
    High sensitivity, closed ion source
  • Filaments
    Replaceable twin Thoria filaments
  • Mass Filter
    Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
  • Power Requirements
    88-264 VAC, 47/63 Hz, 600 Watts
  • Operating Temperature
    Electronics: 10-40°C
  • Maximum Operating Conditions
    80% RH (non condensing)
  • LED Status Indication
    Interlock status, filament emission, SEM, power and communications
  • I/O Capability
    4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
  • Other Facilities
    Leak check headset socket, external filament trip socket, instrument reset
  • Software
    Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7 (recommended)
  • Communication
    Ethernet CAT-5e
  • PC Requirements
    Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use.
  • Simultaneous Multi-Sensor
    Process Eye Professional client/server configuration offers flexible multi-sensor operation
  • Shipping Weight
    85 pounds (38.5 Kg)
  • Mounting Flange
    2.75 inch Conflat® flange, SS capillary
  • Vacuum Hardware
    60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
  • Pneumatics
    60-80 psig CDA
  • Foreline Pump
    Dry diaphragm standard
  • Analyzer Housing Base Pressure
    Better than 5x10-9 Torr after bakeout
  • Inlet
    Dual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
  • RGA to Vacuum System Cable Length
    33 feet (10 m)

Features

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