Mass Flow Controller, 100 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal

Technical Specs

  • Type
    Mass Flow Controller
  • Calibration Gas
    Argon
  • Control Range
    2 - 100 slm
  • Full Scale Flow Range
    100 slm
  • Fitting Type
    8 VCR male
  • Flow Input Output Signal
    0 - 5 VDC
  • Analog I/O Connector
    15-pin D-sub
  • Seal Material
    Viton
  • Maximum Inlet Pressure
    100 psig
  • Normal Operating Pressure Differential
    15 - 60 psid
  • Typical Accuracy
    ±1% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    16 Bit
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.10% of Full Scale/°C
  • Pressure Coefficient
    ±0.02% of Reading/psi
  • Warm-up Time
    <30 min
  • Typical Settling Time
    <1 sec
  • Operating Temperature
    15 - 40°C (59 - 104°F)
  • Power Requirements
    20.5 - 30 VDC, maximum 300 mA
  • Set Point Command Signal
    0 - 5 VDC from <20 kOhm
  • Wetted Materials
    316L stainless steel, Nickel, Viton®
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    <0.1% of Full Scale
  • Compliance
    CE
  • Valve State
    Normally Closed

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