Compare Model Drawings, CAD & Specs Full Scale Flow Range Calibration Gas Fitting Type Availability Price
1579a mass flow controller and 579a mass flow meter, 50-300 slm
1579A00412LR1BV
Mass Flow Controller, 100 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal
$2,900
3 Weeks
 1579A00412LR1BV Mass Flow Controller, 100 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal 100 slm Argon 8 VCR male
3 Weeks
 $2,900
1579a mass flow controller and 579a mass flow meter, 50-300 slm
1579A00422LR1BV
Mass Flow Controller, 200 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal
$2,900
3 Weeks
 1579A00422LR1BV Mass Flow Controller, 200 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal 200 slm Argon 8 VCR male
3 Weeks
 $2,900
1579a mass flow controller and 579a mass flow meter, 50-300 slm
1579A00432LR1BV
Mass Flow Controller, 300 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal
$2,900
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 1579A00432LR1BV Mass Flow Controller, 300 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal 300 slm Argon 8 VCR male
Contact Us
 $2,900
1579a mass flow controller and 579a mass flow meter, 50-300 slm
1579A01312LR1BV
Mass Flow Controller, 100 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal
$2,900
3 Weeks
 1579A01312LR1BV Mass Flow Controller, 100 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal 100 slm N2 (or equivalent) 8 VCR male
3 Weeks
 $2,900
1579a mass flow controller and 579a mass flow meter, 50-300 slm
1579A01322LR1BV
Mass Flow Controller, 200 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal
$2,900
3 Weeks
 1579A01322LR1BV Mass Flow Controller, 200 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal 200 slm N2 (or equivalent) 8 VCR male
3 Weeks
 $2,900
1579a mass flow controller and 579a mass flow meter, 50-300 slm
1579A01332LR1BV
Mass Flow Controller, 300 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal
$2,900
3 Weeks
 1579A01332LR1BV Mass Flow Controller, 300 slm, 8 VCR Male, 0-5 VDC, DB15, Viton Seal 300 slm N2 (or equivalent) 8 VCR male
3 Weeks
 $2,900

Configuration Options

Description
  1579a mass flow controller and 579a mass flow meter, 50-300 slm 1597A Mass Flow Controller, Elastomer-sealed, 50 - 300 slm

Specifications

  • Control Range
    2 to 100% of Full Scale
  • Full Scale Flow Range
    50, 100, 200, 300 slm (N2 in slm)
  • Fitting Type
    Standard: 8 VCR® male
  • Analog I/O Connector
    15-pin Type "D" male
  • Seal Material
    Buna-N, Neoprene®, Kalrez®
  • Maximum Inlet Pressure
    100 psig
  • Normal Operating Pressure Differential
    15 to 60 psid (50, 100 slm)
    25 to 60 psid (200 slm)
    40 to 60 psid (300 slm)
  • Typical Accuracy
    Standard: ±1% of Full Scale
  • Repeatability
    ± 0.2% of Full Scale
  • Resolution
    16 Bit
  • Zero Temperature Coefficient
    <0.05% of Full Scale /°C
  • Span Temperature Coefficient
    <0.10% of Full Scale /°C
  • Pressure Coefficient
    ± 0.02% of Reading/psi
  • Warm-up Time
    30 minutes
  • Typical Settling Time
    <1 sec
  • Operating Temperature
    15° to 40°C
  • Power Requirements
    20.5 to 30 VDC, 300 mA
  • Set Point Command Signal
    0 to 5 VDC from < 20 kΩ
  • Profibus Connector
    2 x 9-pin Type "D" male (analog) and female (Profibus)
  • Wetted Materials
    316L S.S.T, Nickel, Viton®
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    <0.1% of Full Scale
  • Compliance
    CE

Features

Compact Footprint

Because of its compact design, the 1579 may be used in space saving gas panel systems. The electrical connections are made with D-Sub connectors for both Analog and Profibus versions, in conformance with all CE regulations. While MFC applications in research and development typically use local analog power supply/readouts, many industrial applications are moving to digital bus-compatible communications and power distribution. The 1579 meets both of these requirements.

Profibus DP Communications

In 1997, MKS Instruments was the first manufacturer to develop a Profibus standard for Mass Flow Controllers with the 1179A. The 1579 follows this standard with respect to both the interface and the communications. Further advances in digital electronics and flow design have allowed the development of a coordinated product line using digital processing with both analog and digital interfaces ranging from a minimum of flow rate of 0.2 sccm in the 1179B to a maximum of 300 slm in the 1579.

Resources

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