Vapor Mass Flow Controller, Viscous Flow Through a Laminar Flow Tube

Technical Specs

  • Type
    Vapor Mass Flow Controller
  • Flow Method
    viscous flow through a laminar flow tube
  • Full Scale Flow Range
    1 - 1000 sccm (N2 equivalent typical - dependent upon source material)
  • Control Range
    5 - 100% of Full Scale
  • Typical Accuracy
    ±5.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    ±0.1% of Full Scale
  • Operating Temperature
    30 - 100°C, adjustable
  • Optional Operating Temperature Range
    90 - 150°C
  • Settling Time
    1 second to within 2% of set point
  • Controller Input Power Required
    ±15 VDC (±2%) @ 0.28 Amps
  • Heater Input Power Required
    ±15 VDC @ 1.5 Amps (3 Amps with 90 - 150°C option)
  • Set Point Signal
    0 - 5 VDC from <20 kOhm
  • Flow Output Signal
    0 - 5 VDC into >10 kOhm
  • Temperature Output
    10 mV/°C (0°C=0 VDC)
  • Relay Contact Ratings
    2 Amps @ 28 VDC, 1 Amp @ 120 VAC resistive
  • Signal Connector
    15-pin Type "D", RFI/EMI shielded
  • Heater Connector
    9-pin Type "D", RFI/EMI shielded
  • Maximum Line Pressure
    35 psia
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    <1% of Full Scale or 1 sccm, whichever is greater
  • Wetted Materials
    Inconel, 316 Stainless Steel, Nickel
  • Mounting Position
    Do not mount upside-down
  • Fitting Type
    Swagelok® 8 VCR® male

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