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1150c/1152c vapor source mass flow controller
Vapor Mass Flow Controller, Viscous Flow Through a Laminar Flow Tube

Specifications

  • Flow Method
    Viscous flow through a laminar flow tube
  • Full Scale Flow Range
    1 to 1000 sccm typical
  • Control Range
    5.0 to 100% of Full Scale
  • Typical Accuracy
    ±5.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    ±0.1% of Full Scale
  • Operating Temperature
    30°C to 100°C, adjustable
  • Optional Operating Temperature Range
    90°C to 150°C
  • Settling Time
    1 second to within 2% of set point
  • Controller Input Power Required
    ±15 VDC (±2%) @ 0.28 Amps
  • Heater Input Power Required
    ±15 VDC @ 1.5 Amps
  • Set Point Signal
    0-5 VDC from <20 KΩ
  • Flow Output Signal
    0-5 VDC into >10 KΩ
  • Temperature Output
    10 mV/°C
  • Relay Contact Ratings
    2 Amps @ 28 VDC; 1 Amp @ 120 VAC resistive
  • Signal Connector
    15-pin Type "D", RFI/EMI shielded
  • Heater Connector
    9-pin Type "D", RFI/EMI shielded
  • Maximum Line Pressure
    35 psia
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    <1% of Full Scale or 1 sccm, whichever is greater
  • Wetted Materials
    Inconel, 316 S.S., nickel
  • Mounting Position
    Do not mount upside-down
  • Fitting Type
    Swagelok® 8 VCR® male
  • Compliance
    CE

Features

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