Overview

Wet scrubbers are used in many semiconductor processes to treat byproducts. Water in the scrubber often migrates back into the exhaust line. This can cause surface chemical reactions to occur with system byproducts, which in turn solidify and clog the inlet. This results in system downtime to clean the scrubber inlet. Our Scrubber Inlet Transition Kits are customized to the process chemistries to prevent chemical reactions from occurring or reduce sublimation and keep byproducts moving into the scrubber.

• Customized to process chemistries
• Prevent chemical reactions from occurring
• Reduce sublimation