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revolution 10 slm oxygen flow remote plasma source
Remote Plasma Source, 10 slm, O2 Flow, R*evolution V


  • Type
    AX7696MKS-01 Remote Plasma Source
  • Ignition Gas Supply
    In process gas
  • Process Gas Supply
    up to 10 SLM ( 9:1 O2: N2)
  • Operating Pressure
    0.5 to 4 torr
  • Duty Cycle
  • Interlocks
    Internal thermal switch and internal water flow switch to protect against insufficient cooling
  • Wetted Materials
    6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Nickel, Fluorosilicone
  • Control Interface
    Analog, EtherCAT
  • Power Requirements
    208 VAC, 50/60 Hz, 30A, 3 phase
  • Cooling Water
    1.75 gpm, <30°C Ambient 40°C max.
  • Dimensions
    15.7 x 13.7 x 12.14 inches (399mm x 348mm x 308mm nominal)
  • Weight
    81 lb. (38.6 Kg)
  • Compliance
    CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1


EtherCAT Communication

The R*evolution V EtherCAT communication protocol permits near real-time data reporting of critical plasma source operating parameters to the process tool or fab network. EtherCAT can be used for direct control of the R*evolution V, or in combination with the analog port, as a data monitoring port only. The R*evolution V streams intelligent data sets to the tool or fab database to monitor or modify operating parameters to keep process tools running at peak efficiency and to support diagnostic (APC/FDC) applications.

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