Specifications

P9B Pressure Insensitive, Multi-gas/Multi-range Mass Flow Controller

More about the P9B Pressure Insensitive, Multi-gas/Multi-range Mass Flow Controller here

P9B
Full Scale Flow Ranges 5 - 50000 sccm (N2 equivalent)
consult factory for available flow ranges
Maximum Inlet Pressure 150 psig
(cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential 10 to 5000 sccm; 10 to 40 psid
10000 to 20000 sccm; 15 to 40 psid
30000 to 50000 sccm; 25 to 40 psid
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of Full Scale (range on mech.)
Typical Accuracy ± 1% of set point for 20 to 100% Full Scale
± 0.2% of Full Scale for 2 to 20% Full Scale
Repeatability ± 0.3% of Reading
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero < 0.05% of Full Scale/°C
Span < 0.08% of Reading/°C
Inlet Pressure Coefficient < 0.02% of Reading/psi
Typical Controller Settling Time < 750 msec., typical above 5% Full Scale
(per SEMI Guideline E-17-0600)
Warm-up Time < 30 minutes (to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range 10°C to 50°C (Ambient)
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature -20° to 80°C (-4° to 149° F)
Pressure Display 0 to 100 psia
Pressure Readout Units psia, kPA
Pressure Accuracy 1% Full Scale
Pressure Resolution 0.1 psia
Temperature Display 0 to 100°C
Temperature Readout Units °C
Temperature Accuracy ± 2°C
Temperature Resolution 0.1°C
Attitude Insensitivity 0.25% of Full Scale for indicated zero, span and actual span
Pressure Transient ±5% of set point from 20 to 100% of Full Scale when subject to a 2 psi inlet pressure transient
(Inlet/Outlet Pressure Sensitivity)
Fittings Compatible with Swagelok® 4 VCR®, 11/8 inch surface mount (C-seal, W-seal), 11/2 inch W-seal
Display 4 digits for value
4 characters for unit
Leak Integrity
External < 1 x 10-10 (scc/sec He)
Through closed valve < 1.0% of Full Scale at 25 psig inlet to atmosphere (range on mech.)
To assure no flow-through, a separate positive shut-off valve is required.
Wetted Materials
Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45
Valve Seat PTFE (Teflon)
Surface Finish 10µ inch average Ra
Weight less than 3 pounds (1.4kg)
Input Power Required
DeviceNet™ +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
RS-485 +15 to +24 VDC @ 350mA max
Connector
DeviceNet™ 5 pin microconnnector (DeviceNet)
RS-485 9 pin Type D male
Data Rate Switch
DeviceNet™ 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
RS-485 3 positions: 9.6, 19.2, 38.4K (Default)
Data Rate/Network Length
DeviceNet™ Data Rate (User Selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet)
RS-485 Data Rate (User Selectable)
9.6 Kbps, 1200 meters (4,000 feet)
19.2 Kbps, 1200 meters (4,000 feet)
38.4 Kbps, 1200 meters (4,000 feet)
MAC ID Switches
DeviceNet™ 2 switches, 10 positions
0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3
RS-485 2 switches, 10 positions; 0,0 to 9,9.
Available MAC ID�s are 3,2 to 9,9.
Network Size
DeviceNet™ Up to 64 nodes
RS-485 Up to 32 nodes
Network Topology
DeviceNet™ Linear (trunkline/dropline) power and signal on same network cable
RS-485 Master/slave
Visual Communication Indicators
DeviceNet™ LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31))
RS-485 LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31))

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Swagelok® and Elgiloy® are registered trademarks of Swagelok Marketing Co., Solon, OH.
DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.