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Automation & Control Automation Platforms MKS Automation Platform Automation & Control Hardware Controllers Programmable Automation Controllers PAC 100 & PAC 1000 Programmable Automation Controllers MKS CM Communications & Fieldbus Coupler Module Temperature Controllers MultiTherm™ 2000 Modular Temperature Controller Interface Modules I/O Modules MKS Automation Platform I/O AIO Analog Input/Output Module DIO Digital Input/Output Module MFC Mass Flow Controller Module PWM Pulse Width Modulating Slice Module PWR Power Supply Module TEMP Temperature Input Module Serial Communication Module Pressure Input Module Ethernet I/O Control Devices MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces MultiTherm™ 2000 Modular Temperature Controller DeviceNet™ I/O Control Devices MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces AS01391 DeviceNet Digital I/O for a VME card cage (formerly CDN391R) AS01396 DeviceNet Analog I/O for a VME card cage (formerly CDN396R) AS01394 DeviceNet Mixed Digital and Analog I/O for a VME card cage (formerly CDN394R) AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R) AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R) AS01494 DeviceNet Mixed Digital and Analog I/O for CompactPCI (formerly CDN494R) Profibus I/O Control Devices MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces CompactPCI (cPCI) Cards & Cages CDCG-0760 3U CompactPCI (cPCI) Card Cage AIAO-0700 3U Analog Input/Output Card DIDO-0710 3U Digital Input/Output Card PWRS-0720 3U Power Supply Card AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R) AS01494 DeviceNet Mixed Digital and Analog I/O for CompactPCI (formerly CDN494R) AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R) Gateways ToolLink™ CDN466/CDN466-5 DeviceNet™ to RS232 Gateways AS01367 Serial Gateway, DeviceNet™ to RS422/485 Interface AS01366 RS232 to DeviceNet™ Gateway with Built-in Data Conversion and Multiple TX/RX Instance Support AS02366 Profibus Serial Gateway, RS232 to Profibus Interface Automation & Control Software MKS Controls Workbench (CWB) SenseLink™ QM In-Line Quality Detection IEC 61131-3 Programming Software Custom Vacuum Solutions Custom Vacuum Fabrication Custom-manufactured Pumpkits Custom-manufactured Manifolds Custom-manufactured Valves, Heaters, & Gauges Custom-manufactured Process Piping Gauge Manifold Kits Custom-manufactured Effluent Management Subsystems Flow/Gas Delivery Thermal & Pressure-based Mass Flow Controllers & Meters G-Series Thermal Mass Flow Controllers and Meters with Fast & Repeatable Performance GE50A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates up to 50 slm GM50A/GM51A General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option GV50A General Purpose Multi-gas, Multi-range, Elastomer sealed Mass Flow Controller with Integral Shut-off Valve GM100A General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option for Flow Rates up to 100 slm GE250A/GE300A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controllers for Flow Rates from 100 to 300 slm I-Series IP66-rated Thermal Mass Flow Controllers & Meters IE50A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controllers for Flow Rates up to 50 slm IM50A IP66-rated, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers for Flow Rates up to 50 slm IM100A IP66-rated, Multi-gas, Multi-range, Metal-sealed Mass Flow Controller for Flow Rates from 1 to 100 slm IM250 IP66-rated, High Flow, Multi-gas, Multi-Range, Metal-sealed Mass Flow Controllers for Flow Rates up to 250 slm IE250A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE500A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm IE1000A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 500 to 1000 slm P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers P2A High Performance Metal-sealed Mass Flow Controllers for Very Low Pressure Drop Applications P4B High Performance Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm P250A High Performance, High Flow Mass Flow Controllers for Flow Rates up to 250 slm High-flow Thermal Mass Flow Controllers & Meters GE250A General Purpose Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE250A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE500A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm IE1000A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 500 to 1000 slm P250A High Performance Mass Flow Controller for Flow Rates up to 250 slm IM250A High Performance Mass Flow Controller with Ingress Protection, IP66 Rating, for Flow Rates up to 250 slm 1579A General Purpose Mass Flow Controller for Flow Rates up to 300 slm 579A General Purpose Mass Flow Meter for Flow Rates up to 300 slm Compact, General Purpose Thermal Mass Flow Controllers MF1 General Purpose Mass Flow Controller with Available EtherCAT, Profinet, Profibus, USB, Modbus, Analog Interfaces Thermal & Pressure-based Mass Flow Controllers for Special Applications P2 Low Pressure, Metal-sealed, Multi-gas, Multi-range, Thermal Mass Flow Controller 1640A Pressure-based Mass Flow Controller Using Sonic Flow for Ambient Temperature Operation up to 50 degrees C 1150C Heated Pressure-based Mass Flow Controller, Using Sonic Flow for High Temperature Operation up to 150 degrees C 1152C Heated Pressure-based Mass Flow Controller, Using Laminar Flow for High Temperature Operation up to 150 degrees C Legacy Mass Flow Controllers & Meters 1179C General Purpose Mass-Flo® Controller 179C All-metal Mass-Flo® Meter ALTA™ MC20A Metal-sealed Mass Flow Controllers for Flow Rates up to 200 slm In Situ Flow Verifiers HA-MFV, High Accuracy Mass Flow Verifier Flow Ratio Controllers DELTA™ II Flow Ratio Controller DELTA™ II "Stretch Body" Flow Ratio Controller - a Drop-in Replacement for the Original DELTA™ FRC DELTA™ III 3-zone Flow Ratio Controller DELTA™ IV 4-zone Flow Ratio Controller Vapor Delivery 1150C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Choked Orifice 1152C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Laminar Flow Tube Flow Product Power Supplies, Readouts, & Accessories Cables for Flow Control Products 946 Vacuum System Controller PR4000B Digital Power Supply and Readout 246C Single-Channel Power Supply/Readout 247D Four Channel Power Supply/Readout Test Diagnostic Boards Heaters, Traps & Effluent Management Heaters Series 49 Thermal Management System Series 49P Polyimide Heaters Series 49P Polyimide 120VAC Heaters Series 49P Polyimide 120VAC Heaters for Straight Sections 1.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 1.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 1.7 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 1.9 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 2.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 2.4 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 2.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 3.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 3.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 4.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 4.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections Series 49P Polyimide 120VAC Heaters for Elbows Series 49P Polyimide 120VAC Heaters for 45 degree Elbows Series 49P Polyimide 120VAC Heaters for 90 degree Elbows Series 49P Polyimide 120VAC Heaters for Bellows Series 49P Polyimide 120VAC Heaters for Bellows Series 49P Polyimide 120VAC Heaters for Reducers Series 49P Polyimide 120VAC Heaters for Reducers Series 49P Polyimide 120VAC Heaters for Tees Series 49P Polyimide 120VAC Heaters for Tees Series 49P Polyimide Insulators Series 49 Accessories Series 49P Polyimide 240VAC Heaters Series 49P Polyimide 240VAC Heaters for Straight Sections 1.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 1.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 1.7 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 1.9 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 2.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 2.4 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 2.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 3.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 3.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 4.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 4.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections Series 49P Polyimide 240VAC Heaters for Elbows Series 49P Polyimide 240VAC Heaters for 45 degree Elbows Series 49P Polyimide 240VAC Heaters for 90 degree Elbows Series 49P Polyimide 240VAC Heaters for Bellows Series 49P Polyimide 240VAC Heaters for Bellows Series 49P Polyimide 240VAC Heater Jackets for Reducers Series 49P Polyimide 240VAC Heaters for Reducers Series 49P Polyimide 240VAC Heaters for Tees Series 49P Polyimide 240VAC Heaters for Tees Series 49P Polyimide Insulators Series 49 Accessories Series 49P Polyimide Insulators Series 49P Polyimide Flange Insulators Series 49T PTFE Teflon-woven Heaters Series 49T PTFE 120VAC Heaters Series 49T PTFE 120VAC Heaters for Straight Sections 1.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 1.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 1.7 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 1.9 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 2.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 2.4 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 2.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 3.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 3.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 4.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 4.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections Series 49T PTFE 120VAC Heaters for Elbows Series 49T PTFE 120VAC Heaters for 45 degree Elbows Series 49T PTFE 120VAC Heaters for 90 degree Elbows Series 49T PTFE 120VAC Heaters for Bellows Series 49T PTFE 120VAC Heaters for Bellows Series 49T PTFE 120VAC Heaters for Reducers Series 49T PTFE 120VAC Heaters for Reducers Series 49T PTFE 120VAC Heaters for Tees Series 49T PTFE 120VAC Heaters for Tees Series 49T PTFE Insulators Series 49 Accessories Series 49T PTFE 240VAC Heaters Series 49T PTFE 240VAC Heaters for Straight Sections 1.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 1.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 1.7 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 1.9 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 2.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 2.4 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 2.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 3.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 3.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 4.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 4.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections Series 49T PTFE 240VAC Heaters for Elbows Series 49T PTFE 240VAC Heaters for 45 degree Elbows Series 49T PTFE 240VAC Heaters for 90 degree Elbows Series 49T PTFE 240VAC Heaters for Bellows Series 49T PTFE 240VAC Heaters for Bellows Series 49T PTFE 240VAC Heaters for Reducers Series 49T PTFE 240VAC Heaters for Reducers Series 49T PTFE 240VAC Heaters for Tees Series 49T PTFE 240VAC Heaters for Tees Series 49T PTFE Insulators Series 49 Accessories Series 49T PTFE Insulators Series 49T PTFE Flange Insulators Series 49 Accessories Series 49 Accessories Filter Housing Heater Jackets Series 48 Filter Housing Heaters Series 48 Heaters for Single-Use Filters with NEMA 4 Control Unit Enclosures Traps & Effluent Management Process Traps Metal Etch Trap TEOS Trap Vapor Sublimation Trap Nitrogen Barrier & Scrubber Inlet Transition Devices Scrubber Inlet Transition Kit Virtual Wall™ Nitrogen Barrier Devices Heated Trap Heated Trap Process Trap Parts & Accessories Metal Etch Trap Parts and Accessories TEOS Trap Parts and Accessories Vapor Sublimation Trap Parts and Accessories Related: Vacuum Components, Stainless Steel Fittings Related: Heated Vacuum Valves Lasers & Light Sources Light Analysis Mass Spectrometry Solutions Residual Gas Analyzers (RGA) Microvision 2 Flexible, Integration-ready Residual Gas Analyzer (RGA) e-Vision 2 General Purpose Residual Gas Analyzer (RGA) HPQ3 High Pressure RGA (less than 1 mTorr) HPQ3S High Pressure RGA (less than 8 mTorr) Process Monitors Vision 2000-B™ Vacuum Baseline Monitor RGA Vision 2000-C™ & Vision 2000-E™ RGA for Multi-pressure and CVD/ALD Applications Vision 2000-C™ XD & Vision 2000-E™ XD High Sensitivity RGA for Multi-pressure & CVD/ALD Vision 2000-P™ Process Monitor RGA for Select Pressure and PVD Applications Vision 2000-P™ XD High Sensitivity Process Monitor for Select Pressure & PVD 300mm Resist-Torr® Photoresist Detection Monitor RGA 300mm Resist-Torr® XD High Sensitivity Photoresist Detection RGA HPQ3 High Pressure RGA (less than 1 mTorr) HPQ3S High Pressure RGA (less than 8 mTorr) Atmospheric Pressure Gas Analysis Systems Cirrus™3-XD High Sensitivity Atmospheric Systems with V-lens™ Technology Cirrus™ 3 Atmospheric Pressure Gas Analysis System High Sensitivity XD Systems Cirrus™3 XD High Sensitivity Atmospheric Systems Vision 2000-C™ XD & Vision 2000-E™ XD High Sensitivity RGAs for Multi-pressure & CVD/ALD Vision 2000-P™ XD High Sensitivity Process Monitor for Select Pressure & PVD 300mm Resist-Torr® XD High Sensitivity Photoresist Detection RGA Software for RGA, Process, and Chamber Monitoring Process Eye™ Professional Software Platform for RGA Process Monitoring EasyView RGA Software Platform TOOLweb® RGA Process and Chamber Environment Monitor Software Custom Mass Spectrometry/RGA Engineering Solutions Related: Optical Gas Analyzers Related: Granville-Phillips® 835 Vacuum Quality Monitor System Microwave Integrated Microwave Plasma Subsystems High Power Microwave Plasma System AX2600 & AX2700 Series Microwave Plasma Subsystems Microwave Generators Alter® AL20000 Series 2450 MHz Industrial Microwave Generators AX2500 Series SmartPower® Microwave Generators Alter® GS Series 915 MHz Industrial Microwave Generators Microwave Plasma Sources High Power Microwave Plasma Source AX7610 Chemical Downstream Plasma Source Microwave Components Microwave Power Supplies Alter® CM & CR Series Compact Microwave Power Supplies for 2450 MHz Magnetrons Alter® CM 130 Compact, Air-cooled Microwave Power Supply for 300W, 2.45 GHz Magnetrons Alter® CM 330 Compact, Air-cooled Microwave Power Supply for 1kW, 2.45 GHz Magnetrons Alter® CM 340/CM 440 Compact, Air-cooled Microwave Power Supplies for 1.0 & 1.2 kW, 2.45 GHz Magnetrons Alter® CR 840 Compact, Air-cooled, Resonant Microwave Power Supply for 2kW, 2.45 GHz Magnetrons Alter® SM Series Switch Mode Microwave Power Supplies, for 2450 MHz Magnetrons Alter® SM445 Air-cooled Switch Mode Microwave Power Supply for 1.25 kW, 2.45 GHz Magnetrons with PC Connectivity Alter® SM 845 Air-cooled Switch Mode Microwave Power Supply for 2kW, 2.45 GHz Magnetrons Alter® SM 1250 Air-cooled Switch Mode Microwave Power Supply for 3kW, 2.45 GHz Magnetrons Alter® SM 1280 Air-cooled Switch Mode Microwave Power Supply for 6kW, 2.45 GHz Magnetrons Alter® SM 1690 Air-cooled Switch Mode Microwave Power Supply for 10kW, 2.45 GHz Magnetrons Alter® MPS Series Industrial Switch Mode Microwave Power Supply Systems for 915 MHz Magnetrons Alter® MPS Series Industrial Switch Mode Microwave Power Supply Systems for 915 MHz Magnetrons Microwave Magnetron Heads Alter® TI Series Integral Microwave Magnetron Head with Isolator Alter® TM Series Closed Frame Microwave Magnetron Heads Alter® TX Series Open Frame Microwave Magnetron Heads Accessories for Microwave Products Smartmatch® Series Intelligent Microwave Matching Unit/Autotuner for 3 & 6kW Systems Alter® AG340 Manual 3 Stubs Tuner for Generators up to 10kW - WR340 Alter® DC 2340/DC 1340 Directional Couplers Alter® RD8400 Linear Power Sensor Motion Control Optical Gas Analyzers FTIR Analyzers AIRGARD® CWA/HPM/TIC Ambient Air Analyzer AIRGARD® Plus CWA/TIC Ambient Air Analyzer with Ancillary Electrochemical Sensors MultiGas™ 2030 FTIR Continuous Gas Analyzer MultiGas™ 2030-HS High Speed (5 Hz) FTIR Gas Analyzer MultiGas™ 2032 Purity FTIR Gas Analyzer MultiGas™ 2030 CEM FTIR Gas Analyzer for Continuous Emissions Monitoring MultiGas™ 2030 CEM HiSens Gas Analyzer for Low Level Continuous Emissions Monitoring MultiGas™ 2030 1065-Ready 5 Hz Engine & Vehicle Emissions Measurement and Certification Analyzer MultiGas™ 2030 1065-Ready HiSens Gas Analyzer for PPB Level N2O Vehicle and Engine Emissions Certification Testing MultiGas™ 2030 CEM-Cert FTIR Gas Analyzer for Continuous Emissions Monitoring MGS300-KIT FTIR-based Continuous Emission Monitoring System (CEMS) Integrator Kit NDIR Analyzers Process Sense™ NDIR Analyzer for Chamber Clean Endpoint Detection Precisive® TFS™ Tunable Filter Spectroscopy Precisive® 5 Hydrocarbon Analyzers Precisive® Hydrocarbon Composition Analyzer (Natural Gas, LNG, LPG, BOG, BioGas) Precisive® Trace Hydrocarbon/VOC Analyzer (ppb/ppm Gas Detection) Precisive® 5 Application-specific Analyzers Precisive® 5-282 Natural Gas, Calorific Value/Wobbe Index Monitor Precisive® 5-242B Natural Gas Pipeline Analyzer Precisive® 5-152 LNG Analyzer Precisive® 5-159 LPG Analyzer Precisive® 5-253 Acid & Sour Gas Analyzer Precisive® 5-154 Olefins Analyzer Precisive® 5-155 Olefins & HRVOC Analyzer Precisive® 5-162 Flare Stack Gas Analyzer Precisive 5-271 Syngas Composition, Calorific Value/Wobbe Index Monitor MultiGas™ TFS™ Monitor MultiGas™ TFS™ Monitor Process Sense™ TFS™ Endpoint Sensor Process Sense™ TFS™ Endpoint Sensor for Chamber Clean Processes Related: Mass Spectrometry Solutions Optical Tables & Vibration Isolation Systems Optics Opto-Mechanics Power DC Power Generators RPDG-50 5kW Pulsed DC Plasma Generator RPDG-100 10kW Pulsed DC Plasma Generator RPDG-200 20kW Pulsed DC Plasma Generator RF Power Generators 2MHz RF Plasma Generators KEINOS™ 2MHz 5kW, 11kW & 13kW RF Plasma Generators NOVA® 2 MHz 2.5kW & 5.0kW RF Plasma Generators 13.56MHz RF Plasma Generators GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators elite™ Series 750, 600, & 300 Watt, 13.56 MHz, RF Plasma Generators Impedance Matching Networks 13.56MHz Impedance Matching Networks MWH-100, 13.56MHz, 10kW Impedance Matching Network MW-3513, 13.56MHz, 3500W Impedance Matching Network MW-2513, 13.56MHz, 2500W Impedance Matching Network MWD-25LD, 13.56MHz, 2.5kW Impedance Matching Network Dual-frequency Impedance Matching Networks Dual-frequency Impedance Matching Network RF Amplifiers for MRI 1.5T RF Power Amplifier Systems for MRI S35-64 18kW Solid-state, Hi-rel FET Designed, Water-cooled MRI RF Amplifier with Patented Stability & Linearity Enhancement Technology 3.0T RF Power Amplifier Systems for MRI S41-123 Solid-state, Hi-rel FET Designed, Water-cooled MRI RF Amplifier Systems with Patented Stability & Linearity Enhancement Technology Pressure/Vacuum Measurement Baratron® Direct (Gas Independent) Pressure/Vacuum Capacitance Manometers (0.01-155,000 Torr) Compact Pressure Switches & Transducers Compact Pressure Switches 41B Baratron® Single-End Gauge Pressure Switch (10 - 26,000 Torr) 42B Baratron® Flow-Through Gauge Pressure Switch (10 - 26,000 Torr) 51B Baratron® Single-end, Absolute Pressure/Vacuum Switch (10-26,000 Torr) 52B Baratron® Flow-Through Absolute Pressure Switch (10 - 26,000 Torr) Compact Pressure Transducers AA07A Micro-Baratron® High Pressure, Ultraclean, Single-end Pressure Transducers (1000 - 155,000 Torr) AA08A Micro-Baratron® High Pressure, Ultraclean, Flow-through Pressure Transducers (1000 - 155,000 Torr) General Performance Pressure Switches & Transducers Absolute General Performance Pressure Transducers AA01A a-Baratron® Analog, Unheated, Absolute Capacitance Manometer (1 - 1000 Torr) AA02A a-Baratron® Heated Absolute Capacitance Manometers for General Purpose Vacuum/Pressure Measurement (0.1-1000 Torr/13.3 Pa - 133.3 kPa) 722B Baratron® Compact Absolute Capacitance Manometer (1 to 25,000 Torr) 727A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C 728A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C Differential General Performance Pressure Transducers 226A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with ±15VDC or +24VDC Input Power and Multiple Output Signals 228A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with 2 Trip Points and ±15VDC or +24VDC Input Power General Performance Pressure Switches 141A Baratron® Absolute Ambient Vacuum Switch (0.1-1000 Torr) 142A Baratron® Absolute Heated Vacuum Switch, Temperature Controlled to 100 degrees C (1-1000 Torr) High Performance Pressure Transducers & Isolation Systems Unheated High Performance Pressure Transducers 622C Baratron® Absolute Capacitance Manometer (1-1000 Torr) with Terminal Strip Electrical Connector 623F Baratron® Absolute Capacitance Manometer (10-1000 Torr) with Trip Relays 626C Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) with 15-Pin D-Subminiature Electrical Connector DA01A i-Baratron® Digital, DeviceNet™ Capacitance Manometer (0.1-1,000 Torr) Heated High Performance Pressure Transducers 624F Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 45 degrees C 625F Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 100 degrees C 627F Baratron® Capacitance Manometer (0.02 - 20,000 Torr) Temperature Controlled to 45 Degrees C 628F Baratron® Capacitance Manometer (0.05 - 20,000 Torr) Temperature Controlled to 100 Degrees C 629F Baratron® Heated Absolute Capacitance Manometer (0.02-20,000 Torr) with 9-Pin D-Subminiature Electrical Connector, Temperature Controlled to 45 or 100 degrees C DA02A e-Baratron® Temperature-controlled, Digital, EtherCAT® Capacitance Manometer (0.1-1,000 Torr) E27E e-Baratron® Ethernet-Enabled, Heated Absolute Capacitance Manometer, Etch Sensor (0.1-100 Torr), Temperature Controlled to 45 degrees C E28F Baratron® Capacitance Manometer (0.05 - 100 Torr) with Etch Sensor, Temperature Controlled to 100 Degrees C E29F Baratron® Heated Absolute Capacitance Manometer, Etch Sensor (0.02-100 Torr), Temperature Controlled to 45 or 100 degrees C, with 9-pin D-Subminiature Electrical Connector 628E e-Baratron® Ethernet-enabled Heated Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 100 degrees C 627E e-Baratron® Heated Ethernet-Enabled Absolute Capacitance Manometer (0.1-1000 Torr) Temperature Controlled to 45 degrees C E28E e-Baratron® Ethernet-Enabled, Heated, Absolute Capacitance Manometer, Etch Sensor (0.05-100 Torr), Temperature Controlled to 100 degrees C D24F Baratron® Heated Dual-Range Absolute Capacitance Manometer, (1-1000 Torr), Temperature Controlled to 45 degrees C, with Trip Relays D25F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C, with Trip Relays D27F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C D28F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C DA01A i-Baratron® Digital, DeviceNet™ Capacitance Manometer (0.1-1,000 Torr) E27F Baratron® Capacitance Manometer with Etch Sensor (0.1 - 100 Torr), Temperature Controlled to 45 Degrees C High Temperature, High Performance Pressure Transducers DA03A e-Baratron® High-temperature, Digital, EtherCAT® Capacitance Manometer (1-1000 Torr) 631D Baratron® Heated Absolute Capacitance Manometers (1-1000 Torr), Temperature controlled to 150 or 200 degrees C High Performance Integrated Systems CV7627D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 45 degrees C CV7628D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 100 degrees C Industrial Pressure Transducers Unheated Absolute Industrial Pressure Transducers 230E Baratron® Absolute Pressure/Vacuum Transmitter (10-25,000 Torr) with 4-20 mA Output 430E Baratron® Absolute Pressure/Vacuum Transmitter (1-25,000 Torr), with 4-20 mA Output, NEMA4 Housing 740C High-Pressure Baratron® Gauge Capacitance Manometer (20 - 3000 PSIG) 750C High-Pressure Baratron® Absolute Capacitance Manometer (10 Torr - 3000 PSIA) R740C High-Pressure Baratron® Gauge Capacitance Transducer with Trip Relays (20 - 3000 PSIG) R750C High-Pressure Baratron® Absolute Capacitance Transducer with Trip Relays (10 - 3000 PSIG) Heated Absolute Industrial Pressure Transducers 220DA Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) NEMA1 housing, Temperature Controlled to 45 degrees C 121A Baratron® Absolute Pressure/Vacuum Transmitter (1 - 25,000 Torr), with Bakeable Sensor and Remote Electronics Heated Differential Industrial Pressure Transducers 220DD Baratron® Differential Capacitance Manometer (0.1-1000 Torr) NEMA1 Housing, Temperature Controlled to 45 degrees C 221B Baratron® Differential Capacitance Manometer (10-25,000 Torr) Remote Electronics, Bakeable to 150 degrees C Reference Pressure Transducers Absolute Reference Pressure Transducers 690A Baratron® Heated, High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C 120AA Baratron® High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C Differential Reference Pressure Transducers 698A Baratron® Heated, High Accuracy Differential Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C 120AD Baratron® High Accuracy Differential Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C Accessories, Parts & Cables for Baratron® Transducers PR4000 Cables and Accessories Test Diagnostic Boards LDM Cables 600-Series Baratron® Cables 631 Cables 722 Cables 727/728 Cables 740/750 Cables 120AA/120AD Cables, Power Supplies and Accessories 121A Baratron® Cables 220DA/220DD Baratron® Manometer Cables and Accessories 221 Baratron® Manometer Cables and Accessories 430E Baratron® Manometer Accessories 226A Cables Power Supplies, Readouts, and Accessories for Baratron® Pressure/Vacuum Measurement Products LDM Local Display Module for MKS 700 and 800 Series Baratron® Pressure/Vacuum Transducers 4-20 mA Output Module for Baratron® Capacitance Manometers 660C Single-channel Digital Power Supply and Readout PDR2000A Two-Channel Digital Power Supply/Readout PR4000B Digital Power Supply and Readout 670B Signal Conditioner/Display/Power Supply 274B Three-Channel Sensor Multiplexor 946 Vacuum System Controller Portable Calibration Carts PBTS1A Portable Baratron® Transfer Standard PBMS2B Two-Channel Portable Baratron® Measurement System PVS6E Portable Vacuum Calibration System SRG-3 Spinning Rotor Gauge System Granville-Phillips® Indirect Vacuum Gauges Vacuum Gauge Transducers & Modules 901P MicroPirani/Piezo Loadlock Vacuum Transducer, (1.0x10-5 to 1000 Torr) with Atmospheric Switching 925 MicroPirani™ Vacuum Transducer (1.0x10-5 Torr to Atmosphere) 910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer (1.0x10-5 to 1500 Torr) 275 Mini-Convectron® Module (10-4 Torr to Atmosphere) 902B Absolute Piezo Vacuum Transducer (0.1 to 1000 Torr) 500 Cold Cathode Gauge Module (1x10-10 to 1x10-2 Torr) 523 Wide Range Cold Cathode Vacuum Transducer (1.0x10-7 Torr to Atmosphere) 971B UniMag™ Cold Cathode Vacuum Transducer (1x10-8 to 5x10-3 Torr) 972B DualMag™ Cold Cathode/MicroPirani™ Vacuum Transducer (1x10-8 Torr to Atmosphere) 974B QuadMag™ Cold Cathode/MicroPirani™/Piezo Vacuum Transducer (1x10-8 to 1500 Torr) 355 Micro-Ion® Hot Cathode Vacuum Transducer (1x10-9 to 5x10-2 Torr) 390 Micro-Ion® ATM (1x10-9 Torr to Atmosphere) 392 Micro-Ion® Plus (1x10-9 Torr to Atmosphere) 347 Stabil-Ion® Module (2x10-10 to 2x10-2 Torr) 905 MicroPirani™ Ultra Compact, OEM Vacuum Sensor Kit (1.0x10-5 Torr to Atmosphere) Vacuum Gauges 431 & 423 I-Mag® Cold Cathode Vacuum Sensors (1.0x10-11 to 1.0x10-2 Torr) 370 Stabil-Ion® Bayard-Alpert Vacuum Gauge (3x10-11 to 3x10-2 Torr) 274 Glass Bayard-Alpert Type Ionization Vacuum Gauge (<1x10-9 Torr to 1x10-3) 274 Nude Bayard-Alpert Type Ionization Vacuum Gauge (3x10-11 Torr to 1x10-3) 275 Convectron® Pirani Vacuum Gauge (10-4 Torr to Atmosphere) 355 Micro-Ion® Bayard-Alpert Vacuum Gauges (5x10-10 to 5x10-2 Torr) Controllers for Vacuum Gauges & Transducers 475 Convectron® Vacuum Gauge Controller 358 Micro-Ion® Vacuum Gauge Controller 370 Stabil-Ion® Gauge Controller 307 Bayard-Alpert Gauge Controller 350 Bayard-Alpert UHV Gauge Controllers PDR900 Vacuum Gauge Controller and Display for Series 900 Transducers 937B Digital Combination Vacuum Gauge Controller 946 Vacuum System Controller Vacuum Quality Monitor (VQM®) Systems Granville-Phillips® 835 Vacuum Quality Monitor System Granville-Phillips® 835 VQM Differential Pump System Vacuum Quality Monitor (VQM®) System Accessories Related - Residual Gas Analysis/Mass Spectrometry Cables, Parts & Accessories for Vacuum Gauge Controllers, Sensors & Transducers USB Adapter for Series 900 Vacuum Transducers Legacy Indirect Vacuum Gauges & Controllers 356 Micro-Ion® Plus Modules 385 Convectron® ATM Module 903 Inverted Magnetron Cold Cathode Vacuum Transducer (3.0x10-10 to 5.0x10-3 Torr) 317 Convection-Enhanced Pirani Vacuum Sensors (1.0x10-3 to 1000 Torr) Nude Hot Cathode Ionization Vacuum Sensor (5.0x10-10 to 1.0x10-2 Torr) 943 Cold Cathode Vacuum Gauge Controller for use with 423 i-Mag® and 421 Vacuum Sensors Vacuum Gauge Calibration Equipment SRG-3 Spinning Rotor Gauge System Reactive Gas Dissolved CO2 DI-SOLVER CO2 Compact Carbonated Ultrapure Water Delivery System Ozone Dissolved Ozone Delivery Systems LIQUOZON® Smart High Output 50 slm 3 channel Ozone Water Delivery System LIQUOZON® Single Compact 20 slm Ozone Water Delivery System LIQUOZON® PrimO3 Ozonated Water Delivery System with Optional Recirculation LIQUOZON® HeliO3 Modular Dissolved Ozone Delivery System LIQUOZON® Stream High Output 140 slm Ozone Water Delivery System LIQUOZON® VariO3 Ozonated Water Delivery System with Optional Recirculation Ozone Gas Generators SEMOZON® AX8415 Ultra Clean, High Concentration, High Flow Ozone Generator SEMOZON® AX8407 High-concentration, High Flow Ozone Generator SEMOZON® AX8407C Compact Ozone Generator SEMOZON® AX8410 PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator Ozone Gas Delivery Systems O3MEGA® AX8561 Rack Mounted Integrated Ozone Delivery Subsystem with Electronic Gas & Pressure Control SEMOZON® AX8560 Rack Mounted Integrated Ozone Delivery Subsystem with Manual Gas & Pressure Control SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery Systems SEMOZON® AX8555 4-channel, Standalone Ozone Delivery Systems SEMOZON® AX8575 Multi-Channel Ozone Delivery System with In-rack Chiller SEMOZON® AX8580 Fully Integrated Modular Ozone Delivery System SEMOZON® AX8585 Stand-alone Ozone Delivery System for Advanced Processes Ozone Sanitization LIQUOZON® Ultra Ozone Sanitization of DI Water Loop and Storage Tank EO3™ Ozone Sanitation Generator & System Accessories for Ozone Products Ozone Gas Destruct (OVS) Static Mixer Remote Plasma Sources Plasma Sources for NF3 and Fluorine-based Gases Paragon® AX7710MKS-01 Intelligent Remote Plasma Source (8 slm, NF3 flow) ASTRON® Paragon® AX7700 & AX7710 Reactive Gas Source Platform for New Process Applications (rated to 6.0 slm NF3 flow) ASTRON®ex AX7685 Remote Plasma Source (rated to 6.0 slm NF3 flow) ASTRON®hf-s (split) AX7645 Remote Plasma Source (rated to 15.0 slm NF3 flow) ASTRON®hf+ AX7635 Remote Plasma Source (rated to 22.0 slm NF3 flow) ASTRON® G7 AX7667 High Flow Remote Plasma Source (rated 20-30 SLM of NF3 & 20-30 Torr pressure) Plasma Sources for O2, N2, H2, H2O Remote RF Plasma Sources R*evolution® V AX7696MKS-01 Remote Plasma Source (10 slm Oxygen flow) R*evolution® III AX7695 Remote RF Plasma Source Paragon® H* AX7780/AX7785 Remote Plasma Gas Generators for Hydrogen-based Processes Downstream Plasma Sources