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Automation & Control Automation Platforms MKS Automation Platform Automation & Control Hardware Controllers Programmable Automation Controllers PAC 100 & PAC 1000 Programmable Automation Controllers ECM2 Ethernet Control Module and Platform ECM Ethernet Control Module RMU Remote Monitor Unit - Programmable Automation Controller (PAC) with Compact Networked I/O (Digital, Analog and Industrial Ethernet) for Ethernet Host Interface MKS CM Communications & Fieldbus Coupler Module Temperature Controllers MultiTherm™ 1000 EtherCAT® Temperature Controller MultiTherm™ 2000 Modular Temperature Controller Interface Modules I/O Modules MKS Automation Platform I/O AIO Analog Input/Output Module DIO Digital Input/Output Module MFC Mass Flow Controller Module PWM Pulse Width Modulating Slice Module PWR Power Supply Module TEMP Temperature Input Module Serial Communication Module Pressure Input Module Ethernet I/O Control Devices RMU Remote Monitor Unit - Programmable Automation Controller (PAC) with Compact Networked I/O (Digital, Analog and Industrial Ethernet) for Ethernet Host Interface MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces MultiTherm™ 1000 EtherCAT® Temperature Controller MultiTherm™ 2000 Modular Temperature Controller DeviceNet™ I/O Control Devices MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces AS01391 DeviceNet Digital I/O for a VME card cage (formerly CDN391R) AS01396 DeviceNet Analog I/O for a VME card cage (formerly CDN396R) AS01394 DeviceNet Mixed Digital and Analog I/O for a VME card cage (formerly CDN394R) AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R) AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R) AS01494 DeviceNet Mixed Digital and Analog I/O for CompactPCI (formerly CDN494R) Profibus I/O Control Devices MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces CompactPCI (cPCI) Cards & Cages CDCG-0760 3U CompactPCI (cPCI) Card Cage SCOM-080X 3U and 6U Serial Communication Cards AIAO-0700 3U Analog Input/Output Card DIDO-0710 3U Digital Input/Output Card PWRS-0720 3U Power Supply Card AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R) AS01494 DeviceNet Mixed Digital and Analog I/O for CompactPCI (formerly CDN494R) AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R) Gateways ToolLink™ CDN466/CDN466-5 DeviceNet™ to RS232 Gateways AS01367 Serial Gateway, DeviceNet™ to RS422/485 Interface AS01366 RS232 to DeviceNet™ Gateway with Built-in Data Conversion and Multiple TX/RX Instance Support AS02366 Profibus Serial Gateway, RS232 to Profibus Interface Automation & Control Software MKS Controls Workbench (CWB) Software Programmable Interlocks SenseLink™ QM In-Line Quality Detection IEC 61131-3 Programming Software SenseStream & Virtual BlueBox for Data Collection and Tool Interface Senselink ™ Data Gateway & Monitor: Analog & Digital Inputs and Serial Ports for Sensor Integration with Web-based GUI for Real-time Data Visualization and TOOLweb® Protocol Output Custom Vacuum Solutions Custom Vacuum Fabrication Custom-manufactured Pumpkits Custom-manufactured Manifolds Custom-manufactured Valves, Heaters, & Gauges Custom-manufactured Process Piping Gauge Manifold Kits Custom-manufactured Effluent Management Subsystems Flow/Gas Delivery Thermal & Pressure-based Mass Flow Controllers & Meters G-Series Thermal Mass Flow Controllers and Meters with Fast & Repeatable Performance GE50A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates up to 50 slm GM50A/GM51A General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option GV50A General Purpose Multi-gas, Multi-range, Elastomer sealed Mass Flow Controller with Integral Shut-off Valve GM100A General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option for Flow Rates up to 100 slm GE250A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm I-Series IP66-rated Thermal Mass Flow Controllers & Meters IE50A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controllers for Flow Rates up to 50 slm IM50A IP66-rated, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers for Flow Rates up to 50 slm IM250 IP66-rated, High Flow, Multi-gas, Multi-Range, Metal-sealed Mass Flow Controllers for Flow Rates up to 250 slm IE250A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE500A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm IE1000A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 500 to 1000 slm P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers P2A High Performance Metal-sealed Mass Flow Controllers for Very Low Pressure Drop Applications P4B High Performance Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm P250A High Performance, High Flow Mass Flow Controllers for Flow Rates up to 250 slm High-flow Thermal Mass Flow Controllers & Meters GE250A General Purpose Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE250A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE500A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm IE1000A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 500 to 1000 slm P250A High Performance Mass Flow Controller for Flow Rates up to 250 slm IM250A High Performance Mass Flow Controller with Ingress Protection, IP66 Rating, for Flow Rates up to 250 slm 1579A General Purpose Mass Flow Controller for Flow Rates up to 300 slm 579A General Purpose Mass Flow Meter for Flow Rates up to 300 slm Compact, General Purpose Thermal Mass Flow Controllers MF1 General Purpose Mass Flow Controller with Available EtherCAT, Profinet, Profibus, USB, Modbus, Analog Interfaces Thermal & Pressure-based Mass Flow Controllers for Special Applications P2 Low Pressure, Metal-sealed, Multi-gas, Multi-range, Thermal Mass Flow Controller 1640A Pressure-based Mass Flow Controller Using Sonic Flow for Ambient Temperature Operation up to 50 degrees C 1150C Heated Pressure-based Mass Flow Controller, Using Sonic Flow for High Temperature Operation up to 150 degrees C 1152C Heated Pressure-based Mass Flow Controller, Using Laminar Flow for High Temperature Operation up to 150 degrees C Legacy Mass Flow Controllers & Meters 1179A General Purpose, Elastomer-sealed Mass Flow Controller for Flow Rates up to 20 slm 179A General Purpose, Metal-sealed Mass Flow Meter for Flow Rates up to 20 slm ALTA™ MC20A Metal-sealed Mass Flow Controllers for Flow Rates up to 200 slm In Situ Flow Verifiers GBR3B Tru-Flo® Mass Flow Verifier HA-MFV, High Accuracy Mass Flow Verifier Flow Ratio Controllers DELTA™ II Flow Ratio Controller DELTA™ II "Stretch Body" Flow Ratio Controller - a Drop-in Replacement for the Original DELTA™ FRC DELTA™ III 3-zone Flow Ratio Controller DELTA™ IV 4-zone Flow Ratio Controller Vapor Delivery 1150C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Choked Orifice 1152C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Laminar Flow Tube Flow Product Power Supplies, Readouts, & Accessories Cables for Flow Control Products 946 Vacuum System Controller PR4000B Digital Power Supply and Readout 246C Single-Channel Power Supply/Readout 247D Four Channel Power Supply/Readout Test Diagnostic Boards Heaters, Traps & Effluent Management Heaters Series 49 Thermal Management System Series 49P Polyimide Heaters Series 49P Polyimide 120VAC Heaters Series 49P Polyimide 120VAC Heaters for Straight Sections 1.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 1.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 1.7 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 1.9 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 2.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 2.4 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 2.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 3.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 3.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 4.0 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections 4.5 inch Diameter, 120VAC, Series 49P Polyimide Heaters for Straight Sections Series 49P Polyimide 120VAC Heaters for Elbows Series 49P Polyimide 120VAC Heaters for 45 degree Elbows Series 49P Polyimide 120VAC Heaters for 90 degree Elbows Series 49P Polyimide 120VAC Heaters for Bellows Series 49P Polyimide 120VAC Heaters for Bellows Series 49P Polyimide 120VAC Heaters for Reducers Series 49P Polyimide 120VAC Heaters for Reducers Series 49P Polyimide 120VAC Heaters for Tees Series 49P Polyimide 120VAC Heaters for Tees Series 49P Polyimide Insulators Series 49 Accessories Series 49P Polyimide 240VAC Heaters Series 49P Polyimide 240VAC Heaters for Straight Sections 1.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 1.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 1.7 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 1.9 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 2.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 2.4 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 2.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 3.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 3.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 4.0 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections 4.5 inch Diameter, 240VAC, Series 49P Polyimide Heaters for Straight Sections Series 49P Polyimide 240VAC Heaters for Elbows Series 49P Polyimide 240VAC Heaters for 45 degree Elbows Series 49P Polyimide 240VAC Heaters for 90 degree Elbows Series 49P Polyimide 240VAC Heaters for Bellows Series 49P Polyimide 240VAC Heaters for Bellows Series 49P Polyimide 240VAC Heater Jackets for Reducers Series 49P Polyimide 240VAC Heaters for Reducers Series 49P Polyimide 240VAC Heaters for Tees Series 49P Polyimide 240VAC Heaters for Tees Series 49P Polyimide Insulators Series 49 Accessories Series 49P Polyimide Insulators Series 49P Polyimide Flange Insulators Series 49T PTFE Teflon-woven Heaters Series 49T PTFE 120VAC Heaters Series 49T PTFE 120VAC Heaters for Straight Sections 1.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 1.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 1.7 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 1.9 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 2.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 2.4 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 2.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 3.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 3.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 4.0 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections 4.5 inch Diameter, 120VAC, Series 49T PTFE Heaters for Straight Sections Series 49T PTFE 120VAC Heaters for Elbows Series 49T PTFE 120VAC Heaters for 45 degree Elbows Series 49T PTFE 120VAC Heaters for 90 degree Elbows Series 49T PTFE 120VAC Heaters for Bellows Series 49T PTFE 120VAC Heaters for Bellows Series 49T PTFE 120VAC Heaters for Reducers Series 49T PTFE 120VAC Heaters for Reducers Series 49T PTFE 120VAC Heaters for Tees Series 49T PTFE 120VAC Heaters for Tees Series 49T PTFE Insulators Series 49 Accessories Series 49T PTFE 240VAC Heaters Series 49T PTFE 240VAC Heaters for Straight Sections 1.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 1.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 1.7 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 1.9 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 2.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 2.4 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 2.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 3.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 3.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 4.0 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections 4.5 inch Diameter, 240VAC, Series 49T PTFE Heaters for Straight Sections Series 49T PTFE 240VAC Heaters for Elbows Series 49T PTFE 240VAC Heaters for 45 degree Elbows Series 49T PTFE 240VAC Heaters for 90 degree Elbows Series 49T PTFE 240VAC Heaters for Bellows Series 49T PTFE 240VAC Heaters for Bellows Series 49T PTFE 240VAC Heaters for Reducers Series 49T PTFE 240VAC Heaters for Reducers Series 49T PTFE 240VAC Heaters for Tees Series 49T PTFE 240VAC Heaters for Tees Series 49T PTFE Insulators Series 49 Accessories Series 49T PTFE Insulators Series 49T PTFE Flange Insulators Series 49 Accessories Series 49 Accessories Series 48 Adjustable Set Point Vacuum Component Heater Jackets Adjustable Set Point, 120VAC Heater Jackets Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 1.5 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 2 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 3 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 4 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, weld stubs with tangents) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, weld stubs, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, ISO flanges, long radius) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, weld stub with tangents) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, weld stub, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Bellows Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Reducers Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Reducers with Weld Stubs Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Tees Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Tees with Weld Stubs Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Thick Wall Hose Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Thin Wall Hose Series 48 Heater Jacket Insulators Series 48 Heater Accessories Adjustable Set Point, 240 VAC Heater Jackets Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 1.5 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 2 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 3 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 4 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, weld stubs with tangents) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, weld stubs, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, ISO flanges, long radius) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, weld stub with tangents) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, weld stub, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Bellows Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Reducers Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Reducers with Weld Stubs Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Tees Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Tees with Weld Stubs Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Thick Wall Hose Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Thin Wall Hose Series 48 Heater Jacket Insulators Series 48 Heater Accessories Filter Housing Heater Jackets Series 48 Filter Housing Heaters Series 48 Heaters for Single-Use Filters with NEMA 4 Control Unit Enclosures Traps & Effluent Management Process Traps Metal Etch Trap TEOS Trap Vapor Sublimation Trap Nitrogen Barrier & Scrubber Inlet Transition Devices Scrubber Inlet Transition Kit Virtual Wall™ Nitrogen Barrier Devices Heated Trap Heated Trap Process Trap Parts & Accessories Metal Etch Trap Parts and Accessories TEOS Trap Parts and Accessories Vapor Sublimation Trap Parts and Accessories Related: Vacuum Components, Stainless Steel Fittings Related: Heated Vacuum Valves Lasers & Light Sources Light Analysis Mass Spectrometry Solutions Residual Gas Analyzers (RGA) Microvision 2 Flexible, Integration-ready Residual Gas Analyzer (RGA) e-Vision 2 General Purpose Residual Gas Analyzer (RGA) HPQ3 High Pressure RGA (less than 1 mTorr) HPQ3S High Pressure RGAs (less than 8 mTorr) RGA Vacuum Process Monitors Vision 2000-B™ Vacuum Baseline Monitor RGA Vision 2000-C™ & Vision 2000-E™ RGA for CVD and Etch Vision 2000-P™ Process Monitor RGA HPQ3 High Pressure RGA (less than 1 mTorr) HPQ3S High Pressure RGAs (less than 8 mTorr) RGA Process and Chamber Environment Hardware and Software Monitors 300mm Resist-Torr® Photoresist Detection Monitor RGA Atmospheric Pressure Gas Analysis Systems Cirrus™3-XD Compact Benchtop and Rack-mounted Atmospheric Systems with V-lens™ Technology Cirrus™2 Benchtop Atmospheric Pressure Gas Analysis System Cirrus™2 Benchtop Atmospheric Pressure System with Multi-stream Inlet Cirrus™2 Benchtop Atmospheric Pressure System with Integrated Optical Sensor for Carbon Monoxide (CO) Software for RGA, Process, and Chamber Monitoring Process Eye™ Professional Software Platform for RGA Process Monitoring EasyView RGA Software Platform TOOLweb® RGA Process and Chamber Environment Monitor Software Related: Optical Gas Analyzers Related: Granville-Phillips® 835 Vacuum Quality Monitor System Microwave Integrated Microwave Plasma Subsystems AX2600 & AX2700 Series Microwave Plasma Subsystems Microwave Generators Alter® SG Series Air-cooled, Solid State Microwave Generators Alter® AL20000 Series 2450 MHz Industrial Microwave Generators AX2500 Series SmartPower® Microwave Generators Alter® GS Series 915 MHz Industrial Microwave Generators Microwave Plasma Sources Microwave Plasma Source AX7610 Chemical Downstream Plasma Source Microwave Components Microwave Power Supplies Alter® CM & CR Series Compact Microwave Power Supplies for 2450 MHz Magnetrons Alter® CM 130 Compact, Air-cooled Microwave Power Supply for 300W, 2.45 GHz Magnetrons Alter® CM 330 Compact, Air-cooled Microwave Power Supply for 1kW, 2.45 GHz Magnetrons Alter® CM 340/CM 440 Compact, Air-cooled Microwave Power Supplies for 1.0 & 1.2 kW, 2.45 GHz Magnetrons Alter® CR 840 Compact, Air-cooled, Resonant Microwave Power Supply for 2kW, 2.45 GHz Magnetrons Alter® SM Series Switch Mode Microwave Power Supplies, for 2450 MHz Magnetrons Alter® SM445 Air-cooled Switch Mode Microwave Power Supply for 1.25 kW, 2.45 GHz Magnetrons with PC Connectivity Alter® SM 845 Air-cooled Switch Mode Microwave Power Supply for 2kW, 2.45 GHz Magnetrons Alter® SM 1250 Air-cooled Switch Mode Microwave Power Supply for 3kW, 2.45 GHz Magnetrons Alter® SM 1280 Air-cooled Switch Mode Microwave Power Supply for 6kW, 2.45 GHz Magnetrons Alter® SM 1690 Air-cooled Switch Mode Microwave Power Supply for 10kW, 2.45 GHz Magnetrons Alter® MPS Series Industrial Switch Mode Microwave Power Supply Systems for 915 MHz Magnetrons Alter® MPS Series Industrial Switch Mode Microwave Power Supply Systems for 915 MHz Magnetrons Microwave Magnetron Heads Alter® TI Series Integral Microwave Magnetron Head with Isolator Alter® TM Series Closed Frame Microwave Magnetron Heads Alter® TX Series Open Frame Microwave Magnetron Heads Accessories for Microwave Products Smartmatch® Series Intelligent Microwave Matching Unit/Autotuner for 3 & 6kW Systems Alter® AG340 Manual 3 Stubs Tuner for Generators up to 10kW - WR340 Alter® DC 2340/DC 1340 Directional Couplers Alter® RD8400 Linear Power Sensor Motion Control Optical Gas Analyzers FTIR Analyzers AIRGARD® CWA/HPM/TIC Ambient Air Analyzer AIRGARD® Plus CWA/TIC Ambient Air Analyzer with Ancillary Electrochemical Sensors MultiGas™ 2030 FTIR Continuous Gas Analyzer MultiGas™ 2030-HS High Speed (5 Hz) FTIR Gas Analyzer MultiGas™ 2032 Purity FTIR Gas Analyzer MultiGas™ 2030 CEM FTIR Gas Analyzer for Continuous Emissions Monitoring MultiGas™ 2030 CEM HiSens Gas Analyzer for Low Level Continuous Emissions Monitoring MultiGas™ 2030 1065-Ready 5 Hz Engine & Vehicle Emissions Measurement and Certification Analyzer MultiGas™ 2030 1065-Ready HiSens Gas Analyzer for PPB Level N2O Vehicle and Engine Emissions Certification Testing MultiGas™ 2030 CEM-Cert FTIR Gas Analyzer for Continuous Emissions Monitoring MGS300 System Certified FTIR-based Continuous Emissions Monitoring System (CEMS) MGS300-KIT FTIR-based Continuous Emission Monitoring System (CEMS) Integrator Kit NDIR Analyzers Process Sense™ NDIR Analyzer for Chamber Clean Endpoint Detection Precisive® TFS™ Tunable Filter Spectroscopy Precisive® 5 Hydrocarbon Analyzers Precisive® Hydrocarbon Composition Analyzer (Natural Gas, LNG, LPG, BOG, BioGas) Precisive® Trace Hydrocarbon/VOC Analyzer (ppb/ppm Gas Detection) Precisive® 5 Application-specific Analyzers Precisive® 5-282 Natural Gas Calorific Value/Wobbe Index Monitor Precisive® 5-242B Natural Gas Pipeline Analyzer Precisive® 5-152 LNG Analyzer Precisive® 5-159 LPG Analyzer Precisive® 5-253 Acid & Sour Gas Analyzer Precisive® 5-154 Olefins Analyzer Precisive® 5-155 Olefins & HRVOC Analyzer Precisive® 5-162 Flare Stack Gas Analyzer MultiGas™ TFS™ Monitor MultiGas™ TFS™ Monitor Related: Mass Spectrometry Solutions Optical Tables & Vibration Isolation Systems Optics Opto-Mechanics Power DC Power Generators RPDG-50 5kW Pulsed DC Plasma Generator RPDG-100 10kW Pulsed DC Plasma Generator RPDG-200 20kW Pulsed DC Plasma Generator RF Power Generators 2MHz RF Plasma Generators KEINOS™ 2MHz 5kW, 11kW & 13kW RF Plasma Generators NOVA® 2 MHz 2.5kW & 5.0kW RF Plasma Generators 13.56MHz RF Plasma Generators GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators elite™ Series 750, 600, & 300 Watt, 13.56 MHz, RF Plasma Generators Impedance Matching Networks 13.56MHz Impedance Matching Networks MWH-100, 13.56MHz, 10kW Impedance Matching Network MW-3513, 13.56MHz, 3500W Impedance Matching Network MW-2513, 13.56MHz, 2500W Impedance Matching Network MWD-25LD, 13.56MHz, 2.5kW Impedance Matching Network MWH-5, 13.56MHz, 500W Impedance Matching Network Dual-frequency Impedance Matching Networks Dual-frequency Impedance Matching Network RF Amplifiers for MRI 1.5T RF Power Amplifier Systems for MRI S35-64 18kW Solid-state, Hi-rel FET Designed, Water-cooled MRI RF Amplifier with Patented Stability & Linearity Enhancement Technology 3.0T RF Power Amplifier Systems for MRI S41-123 Solid-state, Hi-rel FET Designed, Water-cooled MRI RF Amplifier Systems with Patented Stability & Linearity Enhancement Technology Pressure/Vacuum Measurement Baratron® Direct (Gas Independent) Pressure/Vacuum Capacitance Manometers (0.01-155,000 Torr) Absolute & Gauge Process Measurement (Direct Pressure/Vacuum Measurement) Analog Communications (Direct, Absolute & Gauge Pressure/Vacuum Measurement) Ambient Temperature Operation (Direct, Absolute & Gauge, Analog Pressure/Vacuum Measurement) 121A Baratron® Absolute Pressure/Vacuum Transmitter (1 - 25,000 Torr), with Bakeable Sensor and Remote Electronics 230E Baratron® Absolute Pressure/Vacuum Transmitter (10-25,000 Torr) with 4-20 mA Output a-Baratron® AA01A Analog, Unheated, Absolute Capacitance Manometer (0.1 - 1000 Torr) 622C Baratron® Absolute Capacitance Manometer (1-1000 Torr) with Terminal Strip Electrical Connector 623F Baratron® Absolute Capacitance Manometer (10-1000 Torr) with Trip Relays 626C Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) with 15-Pin D-Subminiature Electrical Connector 722B Baratron® Compact Absolute Capacitance Manometer (1 to 25,000 Torr) 740C High-Pressure Baratron® Gauge Capacitance Manometer (20 - 3000 PSIG) 750C High-Pressure Baratron® Absolute Capacitance Manometer (10 Torr - 3000 PSIA) R740C High-Pressure Baratron® Gauge Capacitance Transducer with Trip Relays (20 - 3000 PSIG) R750C High-Pressure Baratron® Absolute Capacitance Transducer with Trip Relays (10 - 3000 PSIG) AA07A Micro-Baratron® High Pressure, Ultraclean, Single-end Pressure Transducers (1000 - 155,000 Torr), RoHS Compliant AA08A Micro-Baratron® High Pressure, Ultraclean, Flow-through Pressure Transducers (1000 - 155,000 Torr), RoHS Compliant 870B Micro-Baratron® High Pressure, Ultraclean, Non-Incendive Single-end Pressure Transducers (1000 - 155,000 Torr) 872B Micro-Baratron® High Pressure, Ultraclean, Non-Incendive Flow-through Pressure Transducers (1000 - 155,000 Torr) Heated Analog Capacitance Manometers (Direct, Absolute, Analog Pressure/Vacuum Measurement) a-Baratron® AA02A Heated Absolute Capacitance Manometers for General Purpose Vacuum/Pressure Measurement (0.1-1000 Torr/13.3 Pa - 133.3 kPa) 627F Baratron® Capacitance Manometer (0.02 - 20,000 Torr) Temperature Controlled to 45 Degrees C E27F Baratron® Capacitance Manometer with Etch Sensor (0.1 - 100 Torr), Temperature Controlled to 45 Degrees C 628F Baratron® Capacitance Manometer (0.05 - 20,000 Torr) Temperature Controlled to 100 Degrees C E28F Baratron® Capacitance Manometer (0.05 - 100 Torr) with Etch Sensor, Temperature Controlled to 100 Degrees C 629F Baratron® Heated Absolute Capacitance Manometer (0.02-20,000 Torr) with 9-Pin D-Subminiature Electrical Connector, Temperature Controlled to 45 or 100 degrees C E29F Baratron® Heated Absolute Capacitance Manometer, Etch Sensor (0.02-100 Torr), Temperature Controlled to 45 or 100 degrees C, with 9-pin D-Subminiature Electrical Connector 624F Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 45 degrees C 727A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C 625F Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 100 degrees C 728A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C 631D Baratron® Heated Absolute Capacitance Manometers (1-1000 Torr), Temperature controlled to 150 or 200 degrees C CV7627D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 45 degrees C CV7628D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 100 degrees C Heated, Dual-range Capacitance Manometers (Absolute Analog Pressure/Vacuum Measurement) D24F Baratron® Heated Dual-Range Absolute Capacitance Manometer, (1-1000 Torr), Temperature Controlled to 45 degrees C, with Trip Relays D25F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C, with Trip Relays D27F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C D28F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C NEMA Compliant (Direct, Absolute, Analog Pressure/Vacuum Measurement) 430E Baratron® Absolute Pressure/Vacuum Transmitter (1-25,000 Torr), with 4-20 mA Output, NEMA4 Housing 220DA Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) NEMA1 housing, Temperature Controlled to 45 degrees C High Accuracy, Wide Range Systems (Direct, Absolute, Analog Pressure/Vacuum Measurement) 120AA Baratron® High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C 690A Baratron® Heated, High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C Digital Communications (Direct, Absolute Pressure/Vacuum Measurement) i-Baratron® DA01A Digital DeviceNet™ Absolute Capacitance Manometer e-Baratron® DA02A Temperature-controlled, Digital, Absolute Capacitance Manometer with EtherCAT® Communications (0.1-1,000 Torr) 627C e-Baratron® Heated Ethernet-Enabled Absolute Capacitance Manometer (0.1-1000 Torr) Temperature Controlled to 45 degrees C E27C e-Baratron® Ethernet-Enabled, Heated Absolute Capacitance Manometer, Etch Sensor (0.1-100 Torr), Temperature Controlled to 45 degrees C 628C e-Baratron® Ethernet-enabled Heated Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 100 degrees C E28C e-Baratron® Ethernet-Enabled, Heated, Absolute Capacitance Manometer, Etch Sensor (0.05-100 Torr), Temperature Controlled to 100 degrees C Relay Output (Vacuum/Pressure Switches) Ambient Temperature Operation (Direct, Absolute, Pressure/Vacuum Switches) 141A Baratron® Absolute Ambient Vacuum Switch (0.1-1000 Torr) 41B Baratron® Single-End Gauge Pressure Switch (10 - 26,000 Torr) 42B Baratron® Flow-Through Gauge Pressure Switch (10 - 26,000 Torr) 51B Baratron® Single-end, Absolute Pressure/Vacuum Switch (10-26,000 Torr) 52B Baratron® Flow-Through Absolute Pressure Switch (10 - 26,000 Torr) Temperature Controlled to 100 degrees C (Direct, Absolute, Pressure/Vacuum Switches) 142A Baratron® Absolute Heated Vacuum Switch, Temperature Controlled to 100 degrees C (1-1000 Torr) Differential Process Measurement (Direct Pressure/Vacuum Measurement) Ambient Temperature Operation (Direct, Differential Pressure/Vacuum Measurement) 226A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with ±15VDC or +24VDC Input Power and Multiple Output Signals 228A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with 2 Trip Points and ±15VDC or +24VDC Input Power 221B Baratron® Differential Capacitance Manometer (10-25,000 Torr) Remote Electronics, Bakeable to 150 degrees C NEMA1 Compliant (Direct, Differential Pressure/Vacuum Measurement) 220DD Baratron® Differential Capacitance Manometer (0.1-1000 Torr) NEMA1 Housing, Temperature Controlled to 45 degrees C High Accuracy, Wide Range Systems (Direct, Differential Pressure/Vacuum Measurement) 120AD Baratron® High Accuracy Differential Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C 698A Baratron® Heated, High Accuracy Differential Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C Power Supplies, Readouts, and Accessories for Baratron® Pressure/Vacuum Measurement Products LDM Local Display Module for MKS 700 and 800 Series Baratron® Pressure/Vacuum Transducers 4-20 mA Output Module for Baratron® Capacitance Manometers 660B Single-channel Digital Power Supply and Readout PDR2000A Two-Channel Digital Power Supply/Readout PR4000B Digital Power Supply and Readout PR4000 Cables and Accessories 670B Signal Conditioner/Display/Power Supply Test Diagnostic Boards 274B Three-Channel Sensor Multiplexor 120AA/120AD Cables, Power Supplies and Accessories 600-Series Baratron® Cables 722 Cables 870/872 Cables 121A Baratron® Cables 740/750 Cables 727/728 Cables 631 Cables 226A Cables LDM Cables 430E Baratron® Manometer Accessories 220DA/220DD Baratron® Manometer Cables and Accessories 221 Baratron® Manometer Cables and Accessories Contact MKS Application Engineering for accessories. Calibration for Baratron® Pressure/Vacuum Capacitance Manometers Granville-Phillips® Indirect Vacuum Gauges Vacuum Gauge Transducers & Modules 901P MicroPirani/Piezo Loadlock Vacuum Transducer, (1.0x10-5 to 1000 Torr) with Atmospheric Switching 925 MicroPirani™ Vacuum Transducer (1.0x10-5 Torr to Atmosphere) 910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer (1.0x10-5 to 1500 Torr) 275 Mini-Convectron® Module (10-4 Torr to Atmosphere) 902B Absolute Piezo Vacuum Transducer (0.1 to 1000 Torr) 500 Cold Cathode Gauge Module (1x10-10 to 1x10-2 Torr) 523 Wide Range Cold Cathode Vacuum Transducer (1.0x10-7 Torr to Atmosphere) 971B UniMag™ Cold Cathode Vacuum Transducer (1x10-8 to 5x10-3 Torr) 972B DualMag™ Cold Cathode/MicroPirani™ Vacuum Transducer (1x10-8 Torr to Atmosphere)