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Industries

Environmental Monitoring, Defense and Security Industries Supported by MKS Instruments
Life Sciences and Research Industries Supported by MKS Instruments
Process and Industrial Manufacturing Industries Supported by MKS Instruments
Thin Film Industries Supported by MKS Instruments

Markets

Analytical Instruments Market Support from MKS Instruments
Pharmaceutical and Biopharmaceutical Market Support from MKS Instruments
Coating Market Support from MKS Instruments
Defense and Security Market Support from MKS Instruments
Engine Emissions Market Support from MKS Instruments
Flat Panel Display Market Support from MKS Instruments
Food & Beverage Market Support from MKS Instruments
Gas Processing Market Support from MKS Instruments
Infrastructure Protection Market Support from MKS Instruments
LED Market Support from MKS Instruments
Medical Devices and Instruments Market Support from MKS Instruments
Petro/Refining Market Support from MKS Instruments
Power Generation Markets Supported by MKS Instruments
Scientific Research Market Support from MKS Instruments
Semiconductor Market Support from MKS Instruments
Solar Market Support from MKS Instruments
Stack Emissions Market Support from MKS Instruments

Products

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Automation & Control Automation Platforms MKS Automation Platform Programmable Automation Controllers PAC 100 & PAC 1000 Programmable Automation Controllers ECM2 Ethernet Control Module and Platform ECM Ethernet Control Module RMU Remote Monitor Unit - Programmable Automation Controller (PAC) with Compact Networked I/O (Digital, Analog and Industrial Ethernet) for Ethernet Host Interface Data Acquisition, Sensor Integration, Data Analysis SenseStream & Virtual BlueBox for Data Collection and Tool Interface Senselink ™ Data Gateway & Monitor: Analog & Digital Inputs and Serial Ports for Sensor Integration with Web-based GUI for Real-time Data Visualization and TOOLweb® Protocol Output Temperature Controllers MultiTherm™ 1000 EtherCAT™ Temperature Controller MultiTherm™ 2000 Modular Temperature Controller Software Solutions for Automation MKS Controls Workbench (CWB) Software Programmable Interlocks SenseStream & Virtual Bluebox SenseLink™ Data Gateway & Monitor SenseLink™ QM In-Line Quality Detection IEC 61131-3 Programming Software I/O & Distributed Programmable I/O Ethernet I/O Control Devices RMU Remote Monitor Unit - Programmable Automation Controller (PAC) with Compact Networked I/O (Digital, Analog and Industrial Ethernet) for Ethernet Host Interface MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces MultiTherm™ 1000 EtherCAT™ Temperature Controller MultiTherm™ 2000 Modular Temperature Controller DeviceNet™ I/O Control Devices MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces AS01391 DeviceNet Digital I/O for a VME card cage (formerly CDN391R) AS01396 DeviceNet Analog I/O for a VME card cage (formerly CDN396R) AS01394 DeviceNet Mixed Digitial and Analog I/O for a VME card cage (formerly CDN394R) AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R) AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R) AS01494 DeviceNet Mixed Digitial and Analog I/O for CompactPCI (formerly CDN494R) Profibus I/O Control Devices MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces MKS I/O Modules AIO Analog Input/Output Module DIO Digital Input/Output Module MFC Mass Flow Controller Module Pressure Input Module PWM Pulse Width Modulating Slice Module PWR Power Supply Module Serial Communication Module TEMP Temperature Input Module Communications & Fieldbus Couplers MKS CM Communications & Fieldbus Coupler Module Gateways ToolLink™ CDN466/CDN466-5 DeviceNet™ to RS232 Gateways AS01366 RS232 to DeviceNet™ Gateway with Built-in Data Conversion and Multiple TX/RX Instance Support AS01367 Serial Gateway, DeviceNet™ to RS422/485 Interface AS02366 Profibus Serial Gateway, RS232 to Profibus Interface CompactPCI (cPCI) Cards & Cages CDCG-0760 3U CompactPCI (cPCI) Card Cage SCOM-080X 3U and 6U Serial Communication Cards AIAO-0700 3U Analog Input/Output Card DIDO-0710 3U Digital Input/Output Card PWRS-0720 3U Power Supply Card AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R) AS01494 DeviceNet Mixed Digitial and Analog I/O for CompactPCI (formerly CDN494R) AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R) Custom Vacuum Solutions Custom Vacuum Fabrication Custom-manufactured Pumpkits Custom-manufactured Manifolds Custom-manufactured Valves, Heaters, & Gauges Custom-manufactured Process Piping Gauge Manifold Kits Custom-manufactured Effluent Management Subsystems Data Collection & Analysis Multivariate Analysis Software Umetrics Flow/Gas Delivery Thermal & Pressure-based Mass Flow Controllers & Meters G-Series Thermal Mass Flow Controllers and Meters with Fast & Repeatable Performance GE50A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates up to 50 slm GM50A/GM51A General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option GV50A General Purpose Multi-gas, Multi-range, Elastomer sealed Mass Flow Controller with Integral Shut-off Valve GE250A General Purpose Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm I-Series IP66-rated Thermal Mass Flow Controllers & Meters IE50A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controllers for Flow Rates up to 50 slm IM50A IP66-rated, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers for Flow Rates up to 50 slm IM250 IP66-rated, High Flow, Multi-gas, Multi-Range, Metal-sealed Mass Flow Controllers for Flow Rates up to 250 slm IE250A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE500A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm IE1000A IP66-rated, Multi-gas, Multi-range, Elastomer-sealed Mass Flow Controller for Flow Rates from 500 to 1000 slm P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers P2A High Performance Metal-sealed Mass Flow Controllers for Very Low Pressure Drop Applications P4B High Performance Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm P250A High Performance, High Flow Mass Flow Controllers for Flow Rates up to 250 slm High-flow Thermal Mass Flow Controllers & Meters GE250A General Purpose Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE250A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 100 to 250 slm IE500A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 250 to 500 slm IE1000A IP66-rated, Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Flow Rates from 500 to 1000 slm P250A High Performance Mass Flow Controller for Flow Rates up to 250 slm IM250A High Performance Mass Flow Controller with Ingress Protection, IP66 Rating, for Flow Rates up to 250 slm 1579A General Purpose Mass Flow Controller for Flow Rates up to 300 slm 579A General Purpose Mass Flow Meter for Flow Rates up to 300 slm Compact, General Purpose Thermal Mass Flow Controllers MF1 General Purpose Mass Flow Controller with Available EtherCAT, Profinet, Profibus, USB, Modbus, Analog Interfaces Thermal & Pressure-based Mass Flow Controllers for Special Applications P2 Low Pressure, Metal-sealed, Multi-gas, Multi-range, Thermal Mass Flow Controller 1640A Pressure-based Mass Flow Controller Using Sonic Flow for Ambient Temperature Operation up to 50 degrees C 1150C Heated Pressure-based Mass Flow Controller, Using Sonic Flow for High Temperature Operation up to 150 degrees C 1152C Heated Pressure-based Mass Flow Controller, Using Laminar Flow for High Temperature Operation up to 150 degrees C Legacy Mass Flow Controllers & Meters 1179A General Purpose, Elastomer-sealed Mass Flow Controller for Flow Rates up to 20 slm 179A General Purpose, Metal-sealed Mass Flow Meter for Flow Rates up to 20 slm ALTA™ MC20A Metal-sealed Mass Flow Controllers for Flow Rates up to 200 slm In Situ Flow Verifiers GBR3B Tru-Flo® Mass Flow Verifier HA-MFV, High Accuracy Mass Flow Verifier Flow Ratio Controllers DELTA™ II Flow Ratio Controller DELTA™ II "Stretch Body" Flow Ratio Controller - a Drop-in Replacement for the Original DELTA™ FRC DELTA™ III 3-zone Flow Ratio Controller DELTA™ IV 4-zone Flow Ratio Controller Vapor Delivery 1150C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Choked Orifice 1152C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Laminar Flow Tube Flow Product Power Supplies, Readouts, & Accessories Cables for Flow Control Products 946 Vacuum System Controller PR4000B Digital Power Supply and Readout 246C Single-Channel Power Supply/Readout 247D Four Channel Power Supply/Readout Test Diagnostic Boards Heaters, Traps & Effluent Management Heaters Series 46 Single Set Point Vacuum Component Heater Jackets Single Set Point Heater Jackets with Low Temperature Alert (LTA) Series 46 Single Set Point Heater Jackets with LTA for 1.5 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets with LTA for 2 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets with LTA for 3 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets with LTA for 4 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets with LTA for Elbows (45 degree, ISO flanges, standard modulus) Series 46 Single Set Point Heater Jackets with LTA for Elbows (45 degree, weld stubs with tangents) Series 46 Single Set Point Heater Jackets with LTA for Elbows (45 degree, weld stubs, standard modulus) Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, ISO flanges, long radius) Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, ISO flanges, standard modulus) Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, weld stub with tangents) Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, weld stub, standard modulus) Series 46 Single Set Point Heater Jackets with LTA for ISO Flanged Bellows Series 46 Single Set Point Heater Jackets with LTA for ISO Flanged Reducers Series 46 Single Set Point Heater Jackets with LTA for Reducers with Weld Stubs Series 46 Single Set Point Heater Jackets with LTA for ISO Flanged Tees Series 46 Single Set Point Heater Jackets with LTA for Tees with Weld Stubs Series 46 Single Set Point Heater Jackets with LTA for Thick Wall Hose Series 46 Single Set Point Heater Jackets with LTA for Thin Wall Hose Series 46 Heater Jacket Insulators Series 46 Heater and LTA Accessories Single Set Point Heater Jackets without Low Temperature Alert (LTA) Series 46 Single Set Point Heater Jackets without LTA for 1.5 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets without LTA for 2 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets without LTA for 3 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets without LTA for 4 inch diameter Straight Sections Series 46 Single Set Point Heater Jackets without LTA for Elbows (45 degree, ISO flanges, standard modulus) Series 46 Single Set Point Heater Jackets without LTA for Elbows (45 degree, weld stubs with tangents) Series 46 Single Set Point Heater Jackets without LTA for Elbows (45 degree, weld stubs, standard modulus) Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, ISO flanges, long radius) Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, ISO flanges, standard modulus) Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, weld stub with tangents) Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, weld stub, standard modulus) Series 46 Single Set Point Heater Jackets without LTA for ISO Flanged Bellows Series 46 Single Set Point Heater Jackets without LTA for ISO Flanged Reducers Series 46 Single Set Point Heater Jackets without LTA for Reducers with Weld Stubs Series 46 Single Set Point Heater Jackets without LTA for ISO Flanged Tees Series 46 Single Set Point Heater Jackets without LTA for Tees with Weld Stubs Series 46 Single Set Point Heater Jackets without LTA for Thick Wall Hose Series 46 Single Set Point Heater Jackets without LTA for Thin Wall Hose Series 46 Heater Jacket Insulators Series 46 Heater and LTA Accessories Series 48 Adjustable Set Point Vacuum Component Heater Jackets Adjustable Set Point, 120VAC Heater Jackets Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 1.5 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 2 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 3 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 4 inch diameter Straight Sections Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, weld stubs with tangents) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, weld stubs, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, ISO flanges, long radius) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, weld stub with tangents) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, weld stub, standard modulus) Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Bellows Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Reducers Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Reducers with Weld Stubs Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Tees Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Tees with Weld Stubs Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Thick Wall Hose Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Thin Wall Hose Series 48 Heater Jacket Insulators Series 48 Heater Accessories Adjustable Set Point, 240 VAC Heater Jackets Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 1.5 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 2 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 3 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 4 inch diameter Straight Sections Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, weld stubs with tangents) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, weld stubs, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, ISO flanges, long radius) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, ISO flanges, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, weld stub with tangents) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, weld stub, standard modulus) Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Bellows Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Reducers Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Reducers with Weld Stubs Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Tees Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Tees with Weld Stubs Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Thick Wall Hose Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Thin Wall Hose Series 48 Heater Jacket Insulators Series 48 Heater Accessories Filter Housing Heater Jackets Series 48 Filter Housing Heaters Series 48 Heaters for Single-Use Filters with NEMA 4 Control Unit Enclosures Series 46 Heaters for Single-Use Filters with NEMA 2 Control Unit Enclosures Traps & Effluent Management Process Traps Metal Etch Trap TEOS Trap Vapor Sublimation Trap Nitrogen Barrier & Scrubber Inlet Transition Devices Scrubber Inlet Transition Kit Virtual Wall™ Nitrogen Barrier Devices Process Trap Parts & Accessories Metal Etch Trap Parts and Accessories TEOS Trap Parts and Accessories Vapor Sublimation Trap Parts and Accessories Related: Vacuum Components, Stainless Steel Fittings Related: Heated Vacuum Valves Lasers & Light Sources Light Analysis Mass Spectrometry Solutions Residual Gas Analyzers (RGA) Microvision 2 Flexible, Integration-ready Residual Gas Analyzer (RGA) e-Vision 2 General Purpose Residual Gas Analyzer (RGA) HPQ3 High Pressure RGA (less than 1 mTorr) HPQ3S High Pressure RGAs (less than 8 mTorr) RGA Vacuum Process Monitors Vision 2000-B™ Vacuum Baseline Monitor RGA Vision 2000-C™ & Vision 2000-E™ RGA for CVD and Etch Vision 2000-P™ Process Monitor RGA HPQ3 High Pressure RGA (less than 1 mTorr) HPQ3S High Pressure RGAs (less than 8 mTorr) RGA Process and Chamber Environment Hardware and Software Monitors 300mm Resist-Torr® Photoresist Detection Monitor RGA Atmospheric Pressure Gas Analysis Systems Cirrus™3-XD Compact Benchtop and Rack-mounted Atmospheric Systems with V-lens™ Technology Cirrus™2 Benchtop Atmospheric Pressure Gas Analysis System Cirrus™2 Benchtop Atmospheric Pressure System with Multi-stream Inlet Cirrus™2 Benchtop Atmospheric Pressure System with Integrated Optical Sensor for Carbon Monoxide (CO) Software for RGA, Process, and Chamber Monitoring Process Eye™ Professional Software Platform for RGA Process Monitoring EasyView RGA Software Platform TOOLweb® RGA Process and Chamber Environment Monitor Software Related Products: Optical Gas Analyzers Related Products: Granville-Phillips® 835 Vacuum Quality Monitor System Microwave Integrated Microwave Plasma Subsystems ASTeX® AX2600 & AX2700 Series Microwave Plasma Subsystems Microwave Generators Alter® SG Series Air-cooled, Solid State Microwave Generators Alter® AL20000 Series 2450 MHz Industrial Microwave Generators ASTeX® AX2500 Series SmartPower® Microwave Generators Alter® GS Series 915 MHz Industrial Microwave Generators Microwave Plasma Sources ASTeX® AX7610 Chemical Downstream Plasma Source Microwave Components Microwave Power Supplies Alter® CM & CR Series Compact Microwave Power Supplies for 2450 MHz Magnetrons Alter® CM 130 Compact, Air-cooled Microwave Power Supply for 300W, 2.45 GHz Magnetrons Alter® CM 330 Compact, Air-cooled Microwave Power Supply for 1kW, 2.45 GHz Magnetrons Alter® CM 340/CM 440 Compact, Air-cooled Microwave Power Supplies for 1.0 & 1.2 kW, 2.45 GHz Magnetrons Alter® CR 840 Compact, Air-cooled, Resonant Microwave Power Supply for 2kW, 2.45 GHz Magnetrons Alter® SM Series Switch Mode Microwave Power Supplies, for 2450 MHz Magnetrons Alter® SM445 Air-cooled Switch Mode Microwave Power Supply for 1.25 kW, 2.45 GHz Magnetrons with PC Connectivity Alter® SM 845 Air-cooled Switch Mode Microwave Power Supply for 2kW, 2.45 GHz Magnetrons Alter® SM 1250 Air-cooled Switch Mode Microwave Power Supply for 3kW, 2.45 GHz Magnetrons Alter® SM 1280 Air-cooled Switch Mode Microwave Power Supply for 6kW, 2.45 GHz Magnetrons Alter® SM 1690 Air-cooled Switch Mode Microwave Power Supply for 10kW, 2.45 GHz Magnetrons Alter® MPS Series Industrial Switch Mode Microwave Power Supply Systems for 915 MHz Magnetrons Alter® MPS Series Industrial Switch Mode Microwave Power Supply Systems for 915 MHz Magnetrons Microwave Magnetron Heads Alter® TI Series Integral Microwave Magnetron Head with Isolator Alter® TM Series Closed Frame Microwave Magnetron Heads Alter® TX Series Open Frame Microwave Magnetron Heads Accessories for Microwave Products ASTeX® Smartmatch® Series Intelligent Microwave Matching Unit/Autotuner for 3 & 6kW Systems Alter® AG340 Manual 3 Stubs Tuner for Generators up to 10kW - WR340 Alter® DC 2340/DC 1340 Directional Couplers Alter® RD8400 Linear Power Sensor Motion Control Optical Gas Analyzers FTIR Analyzers AIRGARD® CWA/HPM/TIC Ambient Air Analyzer AIRGARD® Plus CWA/TIC Ambient Air Analyzer with Ancillary Electrochemical Sensors AIRGARD® Biogas Siloxane Monitor MultiGas™ 2030 FTIR Continuous Gas Analyzer MultiGas™ 2030-HS High Speed (5 Hz) FTIR Gas Analyzer MultiGas™ 2032 Purity FTIR Gas Analyzer MultiGas™ 2030 CEM FTIR Gas Analyzer for Continuous Emissions Monitoring MultiGas™ 2030 CEM HiSens Gas Analyzer for Low Level Continuous Emissions Monitoring MultiGas™ 2030 1065-Ready 5 Hz Engine & Vehicle Emissions Measurement and Certification Analyzer MultiGas™ 2030 1065-Ready HiSens Gas Analyzer for PPB Level N2O Vehicle and Engine Emissions Certification Testing MultiGas™ 2030 CEM-Cert FTIR Gas Analyzer for Continuous Emissions Monitoring MGS300 System Certified FTIR-based Continuous Emissions Monitoring System (CEMS) MGS300-KIT FTIR-based Continuous Emission Monitoring System (CEMS) Integrator Kit NDIR Analyzers Process Sense™ NDIR Analyzer for Chamber Clean Endpoint Detection Precisive® TFS™ Tunable Filter Spectroscopy Precisive® 5 Hydrocarbon Analyzers Precisive® Hydrocarbon Composition Analyzer (Natural Gas, LNG, LPG, BOG, BioGas) Precisive® Trace Hydrocarbon/VOC Analyzer (ppb/ppm Gas Detection) Precisive® 5 Application-specific Analyzers Precisive® 5-242B Natural Gas Pipeline Analyzer Precisive® 5-152 LNG Analyzer Precisive® 5-159 LPG Analyzer Precisive® 5-253 Acid & Sour Gas Analyzer Precisive® 5-154 Olefins Analyzer Precisive® 5-155 Olefins & HRVOC Analyzer Precisive® 5-162 Flare Stack Gas Analyzer Related: Mass Spectrometry Solutions Optical Tables & Vibration Isolation Systems Optics Opto-Mechanics Power DC Power Generators Continuous DC Power Generators Optima® OPT-50, 5kW DC Plasma Generator Optima® OPT-100, 10 kW DC Plasma Generator Optima® OPT-200, 20kW DC Plasma Generator Optima® OPT-400, 40kW DC Plasma Generator Optima® OPT-600, 60kW DC Plasma Generator Optima® OPT-800, 80kW DC Plasma Generator Pulsed DC Power Generators RPDG-50 5kW Pulsed DC Plasma Generator RPDG-100 10kW Pulsed DC Plasma Generator RPDG-200 20kW Pulsed DC Plasma Generator RF Power Generators 2MHz RF Plasma Generators KEINOS™ 2MHz 5kW, 11kW & 13kW RF Plasma Generators NOVA® 2 MHz 2.5kW & 5.0kW RF Plasma Generators 13.56MHz RF Plasma Generators SurePower® Series 13.56 MHz ,3.5 to 13kW RF Plasma Generators GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators elite™ Series 750, 600, & 300 Watt, 13.56 MHz, RF Plasma Generators Impedance Matching Networks 13.56MHz Impedance Matching Networks MWH-100, 13.56MHz, 10kW Impedance Matching Network MW-3513, 13.56MHz, 3500W Impedance Matching Network MW-2513, 13.56MHz, 2500W Impedance Matching Network MWD-25LD, 13.56MHz, 2.5kW Impedance Matching Network MWH-5, 13.56MHz, 500W Impedance Matching Network Dual-frequency Impedance Matching Networks Dual-frequency Impedance Matching Network Additional Impedance Matching Products RF Amplifiers for MRI 1.5T RF Power Amplifier Systems for MRI S35-64 18kW Solid-state, Hi-rel FET Designed, Water-cooled MRI RF Amplifier with Patented Stability & Linearity Enhancement Technology 3.0T RF Power Amplifier Systems for MRI S41-123 Solid-state, Hi-rel FET Designed, Water-cooled MRI RF Amplifier Systems with Patented Stability & Linearity Enhancement Technology Pressure/Vacuum Measurement Baratron® Direct (Gas Independent) Pressure/Vacuum Capacitance Manometers (0.01-155,000 Torr) Absolute & Gauge Process Measurement (Direct Pressure/Vacuum Measurement) Analog Communications (Direct, Absolute & Gauge Pressure/Vacuum Measurement) Ambient Temperature Operation (Direct, Absolute & Gauge, Analog Pressure/Vacuum Measurement) 121A Baratron® Absolute Pressure/Vacuum Transmitter (1 - 25,000 Torr), with Bakeable Sensor and Remote Electronics 230E Baratron® Absolute Pressure/Vacuum Transmitter (10-25,000 Torr) with 4-20 mA Output a-Baratron® AA01A Analog, Unheated, Absolute Capacitance Manometer (0.1 - 1000 Torr) 622C Baratron® Absolute Capacitance Manometer (1-1000 Torr) with Terminal Strip Electrical Connector 623B Baratron® Absolute Capacitance Manometer (10-1000 Torr) with Trip Relays 626C Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) with 15-Pin D-Subminiature Electrical Connector 722B Baratron® Compact Absolute Capacitance Manometer (1 to 25,000 Torr) 740C High-Pressure Baratron® Gauge Capacitance Manometer (20 - 3000 PSIG) 750C High-Pressure Baratron® Absolute Capacitance Manometer (10 Torr - 3000 PSIA) R740C High-Pressure Baratron® Gauge Capacitance Transducer with Trip Relays (20 - 3000 PSIG) R750C High-Pressure Baratron® Absolute Capacitance Transducer with Trip Relays (10 - 3000 PSIG) 870B Micro-Baratron® High Pressure, Ultraclean, Non-Incendive Single-end Pressure Transducers (1000 - 155,000 Torr) 872B Micro-Baratron® High Pressure, Ultraclean, Non-Incendive Flow-through Pressure Transducers (1000 - 155,000 Torr) Heated Analog Capacitance Manometers (Direct, Absolute, Analog Pressure/Vacuum Measurement) a-Baratron® AA02A Heated Absolute Capacitance Manometers for General Purpose Vacuum/Pressure Measurement (0.1-1000 Torr/13.3 Pa - 133.3 kPa) 627F Baratron® Capacitance Manometer (0.02 - 20,000 Torr) Temperature Controlled to 45 Degrees C E27F Baratron® Capacitance Manometer with Etch Sensor (0.1 - 100 Torr), Temperature Controlled to 45 Degrees C 628F Baratron® Capacitance Manometer (0.05 - 20,000 Torr) Temperature Controlled to 100 Degrees C E28F Baratron® Capacitance Manometer (0.05 - 100 Torr) with Etch Sensor, Temperature Controlled to 100 Degrees C 629F Baratron® Heated Absolute Capacitance Manometer (0.02-20,000 Torr) with 9-Pin D-Subminiature Electrical Connector, Temperature Controlled to 45 or 100 degrees C E29F Baratron® Heated Absolute Capacitance Manometer, Etch Sensor (0.02-100 Torr), Temperature Controlled to 45 or 100 degrees C, with 9-pin D-Subminiature Electrical Connector 624F Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 45 degrees C 727A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C 625F Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 100 degrees C 728A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C 631D Baratron® Heated Absolute Capacitance Manometers (1-1000 Torr), Temperature controlled to 150 or 200 degrees C CV7627D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 45 degrees C CV7628D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 100 degrees C Heated, Dual-range Capacitance Manometers (Absolute Analog Pressure/Vacuum Measurement) D24F Baratron® Heated Dual-Range Absolute Capacitance Manometer, (1-1000 Torr), Temperature Controlled to 45 degrees C, with Trip Relays D25F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C, with Trip Relays D27F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C D28F Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C NEMA Compliant (Direct, Absolute, Analog Pressure/Vacuum Measurement) 430E Baratron® Absolute Pressure/Vacuum Transmitter (1-25,000 Torr), with 4-20 mA Output, NEMA4 Housing 220DA Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) NEMA1 housing, Temperature Controlled to 45 degrees C High Accuracy, Wide Range Systems (Direct, Absolute, Analog Pressure/Vacuum Measurement) 120AA Baratron® High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C 690A Baratron® Heated, High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C 615A Baratron® High Accuracy Absolute Capacitance Manometer (1-20,000 Torr), Bakeable to 400 degrees C Digital Communications (Direct, Absolute Pressure/Vacuum Measurement) i-Baratron® DA01A Digital DeviceNet™ Absolute Capacitance Manometer e-Baratron® DA02A Temperature-controlled, Digital, Absolute Capacitance Manometer with EtherCAT® Communications (0.1-1,000 Torr) 627C e-Baratron® Heated Ethernet-Enabled Absolute Capacitance Manometer (0.1-1000 Torr) Temperature Controlled to 45 degrees C E27C e-Baratron® Ethernet-Enabled, Heated Absolute Capacitance Manometer, Etch Sensor (0.1-100 Torr), Temperature Controlled to 45 degrees C 628C e-Baratron® Ethernet-enabled Heated Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 100 degrees C E28C e-Baratron® Ethernet-Enabled, Heated, Absolute Capacitance Manometer, Etch Sensor (0.05-100 Torr), Temperature Controlled to 100 degrees C Relay Output (Vacuum/Pressure Switches) Ambient Temperature Operation (Direct, Absolute, Pressure/Vacuum Switches) 141A Baratron® Absolute Ambient Vacuum Switch (0.1-1000 Torr) 41B Baratron® Single-End Gauge Pressure Switch (10 - 26,000 Torr) 42B Baratron® Flow-Through Gauge Pressure Switch (10 - 26,000 Torr) 51B Baratron® Single-end, Absolute Pressure/Vacuum Switch (10-26,000 Torr) 52B Baratron® Flow-Through Absolute Pressure Switch (10 - 26,000 Torr) Temperature Controlled to 100 degrees C (Direct, Absolute, Pressure/Vacuum Switches) 142A Baratron® Absolute Heated Vacuum Switch, Temperature Controlled to 100 degrees C (1-1000 Torr) Differential Process Measurement (Direct Pressure/Vacuum Measurement) Ambient Temperature Operation (Direct, Differential Pressure/Vacuum Measurement) 226A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with ±15VDC or +24VDC Input Power and Multiple Output Signals 228A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with 2 Trip Points and ±15VDC or +24VDC Input Power 221B Baratron® Differential Capacitance Manometer (10-25,000 Torr) Remote Electronics, Bakeable to 150 degrees C NEMA1 Compliant (Direct, Differential Pressure/Vacuum Measurement) 220DD Baratron® Differential Capacitance Manometer (0.1-1000 Torr) NEMA1 Housing, Temperature Controlled to 45 degrees C High Accuracy, Wide Range Systems (Direct, Differential Pressure/Vacuum Measurement) 120AD Baratron® High Accuracy Differential Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C 698A Baratron® Heated, High Accuracy Differential Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C 616A Baratron® High Accuracy Differential Capacitance Manometer, Bakeable to 400 degrees C (1-20,000 Torr) Power Supplies, Readouts, and Accessories for Baratron® Pressure/Vacuum Measurement Products LDM Local Display Module for MKS 700 and 800 Series Baratron® Pressure/Vacuum Transducers 4-20 mA Output Module for Baratron® Capacitance Manometers 660B Single-channel Digital Power Supply and Readout PDR2000A Two-Channel Digital Power Supply/Readout PR4000B Digital Power Supply and Readout PR4000 Cables and Accessories 670B Signal Conditioner/Display/Power Supply Test Diagnostic Boards 274B Three-Channel Sensor Multiplexor 120AA/120AD Cables, Power Supplies and Accessories 600-Series Baratron® Cables 722 Cables 870/872 Cables 121A Baratron® Cables 740/750 Cables 727/728 Cables 631 Cables 226A Cables LDM Cables 430E Baratron® Manometer Accessories 220DA/220DD Baratron® Manometer Cables and Accessories 221 Baratron® Manometer Cables and Accessories Contact MKS Application Engineering for accessories. Calibration for Baratron® Pressure/Vacuum Capacitance Manometers Granville-Phillips® Indirect Vacuum Gauges Vacuum Gauge Transducers & Modules 901P MicroPirani/Piezo Loadlock Vacuum Transducer, (1.0x10-5 to 1000 Torr) with Atmospheric Switching 925 MicroPirani™ Vacuum Transducer (1.0x10-5 Torr to Atmosphere) 910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer (1.0x10-5 to 1500 Torr) 275 Mini-Convectron® Module (10-4 Torr to Atmosphere) 902B Absolute Piezo Vacuum Transducer (0.1 to 1000 Torr) 500 Cold Cathode Gauge Module (1x10-10 to 1x10-2 Torr) 971B UniMag™ Cold Cathode Vacuum Transducer (1x10-8 to 5x10-3 Torr) 972B DualMag™ Cold Cathode/MicroPirani™ Vacuum Transducer (1x10-8 Torr to Atmosphere) 974B QuadMag™ Cold Cathode/MicroPirani™/Piezo Vacuum Transducer (1x10-8 to 1500 Torr) 354 Micro-Ion® Module (1x10-9 to 5x10-2 Torr) 390 Micro-Ion® ATM (1x10-9 Torr to Atmosphere) 392 Micro-Ion® Plus (1x10-9 Torr to Atmosphere) 347 Stabil-Ion® Module (2x10-10 to 2x10-2 Torr) 905 MicroPirani™ Ultra Compact, OEM Vacuum Sensor Kit (1.0x10-5 Torr to Atmosphere) Vacuum Gauges 431 & 423 I-Mag® Cold Cathode Vacuum Sensors (1.0x10-11 to 1.0x10-2 Torr) 370 Stabil-Ion® Bayard-Alpert Vacuum Gauge (3x10-11 to 3x10-2 Torr) 274 Glass Bayard-Alpert Type Ionization Vacuum Gauge (<1x10-9 Torr to 1x10-3) 274 Nude Bayard-Alpert Type Ionization Vacuum Gauge (3x10-11 Torr to 1x10-3) 275 Convectron® Pirani Vacuum Gauge (10-4 Torr to Atmosphere) 355 Micro-Ion® Bayard-Alpert Vacuum Gauges (5x10-10 to 5x10-2 Torr) Controllers for Vacuum Gauges & Transducers 475 Convectron® Vacuum Gauge Controller 358 Micro-Ion® Vacuum Gauge Controller 370 Stabil-Ion® Gauge Controller 307 Bayard-Alpert Gauge Controller 350 Bayard-Alpert UHV Gauge Controllers PDR900 Vacuum Gauge Controller and Display for Series 900 Transducers 937B Digital Combination Vacuum Gauge Controller 946 Vacuum System Controller Vacuum Quality Monitor (VQM®) Systems Granville-Phillips® 835 Vacuum Quality Monitor System Granville-Phillips® 835 VQM Differential Pump System Vacuum Quality Monitor (VQM®) System Accessories Related - Residual Gas Analysis/Mass Spectrometry Cables, Parts & Accessories for Vacuum Gauge Controllers, Sensors & Transducers USB Adapter for Series 900 Vacuum Transducers Legacy Indirect Vacuum Gauges & Controllers 356 Micro-Ion® Plus Modules 385 Convectron® ATM Module 903 Inverted Magnetron Cold Cathode Vacuum Transducer (3.0x10-10 to 5.0x10-3 Torr) 909AR Digital and Analog Hot Cathode Vacuum Transducer (5.0x10-10 to 5.0x10-2 Torr) 979B Atmosphere to Vacuum Transducer (5.0x10-10 Torr to atmosphere) 999 Quattro Multi-Sensor Vacuum Transducer ( 5.0x10-10 Torr to atmosphere) with Atmospheric Switching 317 Convection-Enhanced Pirani Vacuum Sensors (1.0x10-3 to 1000 Torr) 345 Pirani Vacuum Sensors (1.0x10-4 to 100 Torr) Mini Ion Gauge (MIG), Hot Cathode Ionization Vacuum Sensor, (5.0x10-10 to 1.0x10-2 Torr) Nude Hot Cathode Ionization Vacuum Sensor (5.0x10-10 to 1.0x10-2 Torr) 316 Low Vacuum Gauge Controllers 943 Cold Cathode Vacuum Gauge Controller for use with 423 i-Mag® and 421 Vacuum Sensors 945 Pirani Vacuum Gauge Controller for use with 345 Vacuum Sensors 947 Convection-Enhanced Pirani Vacuum Gauge Controller for use with 317 Vacuum Sensors Vacuum Gauge Calibration Equipment SRG-3 Spinning Rotor Gauge System Pressure/Vacuum Rate Calibrators PBTS1A Portable Baratron® Transfer Standard PBMS2B Two-Channel Portable Baratron® Measurement System PVS6E Portable Vacuum Calibration System SRG-3 Spinning Rotor Gauge System Pressure/Vacuum Switches Reactive Gas Dissolved CO2 DI-SOLVER CO2 Compact Carbonated Ultrapure Water Delivery System Ozone Dissolved Ozone Delivery Systems LIQUOZON® Smart High Output 50 slm 3 channel Ozone Water Delivery System LIQUOZON® Single Compact 20 slm Ozone Water Delivery System LIQUOZON® PrimO3 Ozonated Water Delivery System with Optional Recirculation LIQUOZON® HeliO3 Modular Dissolved Ozone Delivery System LIQUOZON® Stream High Output 140 slm Ozone Water Delivery System Ozone Gas Generators SEMOZON® AX8407 High-concentration, High Flow Ozone Generator SEMOZON® AX8407C Compact Ozone Generator SEMOZON® AX8410 PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator Ozone Gas Delivery Systems O3MEGA® AX8561 Rack Mounted Integrated Ozone Delivery Subsystem with Electronic Gas & Pressure Control SEMOZON® AX8560 Rack Mounted Integrated Ozone Delivery Subsystem with Manual Gas & Pressure Control SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery Systems SEMOZON® AX8555 4-channel, Standalone Ozone Delivery Systems SEMOZON® AX8575 Multi-Channel Ozone Delivery System with In-rack Chiller SEMOZON® AX8585 Stand-alone Ozone Delivery System for Advanced Processes Ozone Sanitization LIQUOZON® Ultra Ozone Sanitization of DI Water Loop and Storage Tank EO3™ Ozone Sanitation Generator & System Accessories for Ozone Products Ozone Gas Destruct (OVS) Static Mixer Remote Plasma Sources Plasma Sources for NF3 and Fluorine-based Gases ASTRON® Paragon® AX7700 & AX7710 Reactive Gas Source Platform for New Process Applications (rated to 6.0 slm NF3 flow) ASTRON®i AX7670 Remote Plasma Source (rated to 3.0 slm NF3 flow rate) ASTRON®ex AX7685 Remote Plasma Source (rated to 6.0 slm NF3 flow) ASTRON®hf-s (split) AX7645 Remote Plasma Source (rated to 15.0 slm NF3 flow) ASTRON®hf AX7640 Remote Plasma Source (rated to 15.0 slm NF3 flow) ASTRON®hf+ AX7635 Remote Plasma Source (rated to 22.0 slm NF3 flow) ASTRON® G7 AX7667 High Flow Remote Plasma Source (rated 20-30 SLM of NF3 & 20-30 Torr pressure) Plasma Sources for O2, N2, H2, H2O Remote RF Plasma Sources R*evolution® III AX7695 Remote RF Plasma Source Paragon® H* AX7780/AX7785 Remote Plasma Gas Generators for Hydrogen-based Processes Downstream Plasma Sources AX7610-Q Chemical Downstream Plasma Source with a Quartz Tube AX7610-S Chemical Downstream Plasma Source with a Sapphire Tube Vacuum & Stainless Steel Components ButtWeld Vacuum Components & Fittings Series 23 Buttweld 45-Degree Elbows Series 23 Buttweld 45-Degree Elbows with Tangents Series 23 Buttweld 90-Degree Elbows Series 23 Buttweld 90-Degree Elbows with Tangents Series 23 Buttweld Braided Metal Hose Series 23 Buttweld Crosses Series 23 Buttweld Endcaps Series 23 Buttweld Reducers Series 23 Buttweld Reducing Tees Series 23 Buttweld Tees Series 23 Buttweld Tubing ISO-KF Vacuum Components & Fittings Series 31 ISO-KF Blank Flanges Series 31 ISO-KF Weld Flanges Series 31 ISO-KF Seals Series 31 ISO-KF to KF Reducers Series 31 ISO-KF Adapters Series 31 ISO-KF Clamps Series 31 ISO-KF Crosses and Tees Series 31 ISO-KF Elbows and Straight Sections Series 31 ISO-KF Bellows and Flexible Hose Series 31 Flangeless Tubing Series 31 ISO-KF Viewports, Feedthroughs, and Bourdon Gauges ISO-Universal Vacuum Components & Fittings