Compact Ozone Generator

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The SEMOZON® AX8407C is a compact ozone generator capable of high concentrations of ultraclean ozone at relatively low flow. It is available in 4 output configurations for process flexibility and the lowest cost by matching performance to process requirements. It leverages the innovative design for high efficiency ozone production with low-flow, high-concentration ozone from an extremely compact size. The generator utilizes patented ozone generating cell technology, producing ozone through silent electrical discharge to achieve the highest output concentration levels available.

Ozone Performance:

SEMOZON® AX8407C Typtical Ozone Output


Applications for the AX8407C in semiconductor production include Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), photoresist strip, cleaning, contaminant removal, surface conditioning and oxide growth it is also used for sterilization, disinfection, environmental remediation and other applications requiring a compact source for low cost, point-of-use ozone.


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Part NumberPriceQTY
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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.