579A
General Purpose Mass Flow Meter for Flow Rates up to 300 slm

photo - 579 Digital, Elastomer-sealed, High Flow Rate Mass Flow Meter

The MKS Type 579 is a digital mass flow meter of the latest generation developed for a multitude of applications in research and industry. The 579 is based on proven MKS technology and offers a fast controller settling time as well as high accuracy in the entire control range. For example, this makes it possible to integrate the 579 into fast cycle processes in which the idle time for the stabilization of the process conditions has to be minimal and reproducible.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

VCR® is a registered trademark of Swagelok® Company.

Configurations:

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Part NumberFull Scale RangeFittingsConnectorPriceQTY
579A01351LR3BV50 slm of NitrogenSwagelok® 8 VCR® male15-pin Type "D"Quote Only
579A01312LR3BV100 slm of NitrogenSwagelok® 8 VCR® male15-pin Type "D"Quote Only
579A01322LR3BV200 slm of NitrogenSwagelok® 8 VCR® male15-pin Type "D"Quote Only
579A01332LR3BV300 slm of NitrogenSwagelok® 8 VCR® male15-pin Type "D"Quote Only
579A00451LR3BV50 slm of ArgonSwagelok® 8 VCR® male15-pin Type "D"Quote Only
579A00412LR3BV100 slm of ArgonSwagelok® 8 VCR® male15-pin Type "D"Quote Only
579A00422LR3BV200 slm of ArgonSwagelok® 8 VCR® male15-pin Type "D"Quote Only
579A00432LR3BV300 slm of ArgonSwagelok® 8 VCR® male15-pin Type "D"Quote Only

Documents & Downloads:

1579/579 data sheet
579 specifications
579 dimensional drawing
579A 3D STP files
579 pin-outs
579A/B manual
MKS Mass Flow Control Power Supplies & Readouts data sheet

Related Products:

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.