General Purpose Mass Flow Meter for Flow Rates up to 300 slm
The MKS Type 579 is a digital mass flow meter of the latest generation developed for
a multitude of applications in research and industry. The 579 is based on proven MKS
technology and offers a fast controller settling time as well as high accuracy in the entire
control range. For example, this makes it possible to integrate the 579 into fast cycle
processes in which the idle time for the stabilization of the process conditions has to be
minimal and reproducible.