General Purpose Mass Flow Controller for Flow Rates up to 300 slm
The MKS Type 1579 is a digital mass flow controller of the latest generation developed for
a multitude of applications in research and industry. The 1579 is based on proven MKS
technology and offers a fast controller settling time as well as high accuracy in the entire
control range. For example, this makes it possible to integrate the 1579 into fast cycle
processes in which the idle time for the stabilization of the process conditions has to be
minimal and reproducible.
Due to its compact design, the 1579 allows space-saving designs of gas supply systems.
The electrical connection is provided via Sub-D-connectors for both analog and Profibus
variants in conformance with all CE regulations. Whereas in R&D mass flow controllers
are mainly used in conjunction with power supply and readout units developed by MKS
especially for this purpose, OEMs in industry focus increasingly on digital, bus-compatible