1579A
General Purpose Mass Flow Controller for Flow Rates up to 300 slm

photo - 1579 Digital, Elastomer-sealed, High Flow Rate Mass Flow Controller

The MKS Type 1579 is a digital mass flow controller of the latest generation developed for a multitude of applications in research and industry. The 1579 is based on proven MKS technology and offers a fast controller settling time as well as high accuracy in the entire control range. For example, this makes it possible to integrate the 1579 into fast cycle processes in which the idle time for the stabilization of the process conditions has to be minimal and reproducible.

Due to its compact design, the 1579 allows space-saving designs of gas supply systems. The electrical connection is provided via Sub-D-connectors for both analog and Profibus variants in conformance with all CE regulations. Whereas in R&D mass flow controllers are mainly used in conjunction with power supply and readout units developed by MKS especially for this purpose, OEMs in industry focus increasingly on digital, bus-compatible components.

Features & Benefits

  • Full Scale Flow Ranges from 50 slm to 300 slm
  • Multiple Supply Voltages 24 VDC and ±15 VDC
  • Controller Settling Time of less than 1 second
  • Available with analog and Profibus DP interface
  • Storage of up to 15 Gas Tables (Multigas/Multirange)
  • Plug-compatible with earlier MKS MFCs
  • Compact design
  • Analog Interface Version comes with a diagnostics port
  • CE Mark compliant

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

VCR® is a registered trademark of Swagelok® Company.

Configurations:

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Part NumberFull Scale RangeFittingsConnectorPriceQTY
1579A01312LR1BV100 slm of NitrogenSwagelok® 8 VCR® male15-pin Type "D"Quote Only
1579A01322LR1BV200 slm of NitrogenSwagelok® 8 VCR® male15-pin Type "D"Quote Only
1579A01332LR1BV300 slm of NitrogenSwagelok® 8 VCR® male15-pin Type "D"Quote Only
1579A00412LR1BV100 slm of ArgonSwagelok® 8 VCR® male15-pin Type "D"Quote Only
1579A00422LR1BV200 slm of ArgonSwagelok® 8 VCR® male15-pin Type "D"Quote Only
1579A00432LR1BV300 slm of ArgonSwagelok® 8 VCR® male15-pin Type "D"Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.