NOVA® 2 MHz RF Plasma Generators
NOVA®-25A 2.5 kW 2 MHz RF Plasma Generator
NOVA®-50A 5.0 kW 2 MHz RF Plasma Generator

photo - NOVA 2.5 kW and 5.0 kW 2 MHz RF Plasma Generators

NOVA® Series 2 MHz RF Plasma Generators offer advanced RF plasma generation and control for low cost and high yield in the most demanding thin film processing applications.

Features & Benefits:

  • Auto-Frequency Tuning allows fixed matching networks - faster tuning and lower system cost.
  • Excellent Reliability - increased uptime and lower cost of ownership.
  • Automatic load mismatch protection guards against power amplifier over-dissipation from adverse loads
  • Unlimited load impedance range - more forward power "headroom" and stable power into any load.
  • Active front panel for full generator control.

Applications:

The NOVA® RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, photovoltaic devices, flat panel displays, and data storage devices.

All MKS Instruments' RF Generators are NRTL certified and CE marked.

Mismatched Power Output
Worst phase forward power referenced to rating

VSWR NOVA®-25A NOVA®-50A
1.5:1 2500 W 5000 W
2.0:1 2250 W 4500 W
3.0:1 1750 W 3500 W

Configurations:

Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberDescriptionPriceQTY
NOVA®-25ANOVA®-25A 2.5 kW 2 MHz RF Plasma GeneratorQuote Only
NOVA®-50ANOVA®-50A 5.0 kW 2 MHz RF Plasma GeneratorQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 585-427-8300.

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