High Flow Valves (HFV)
High Conductance, Large Port, Vacuum Isolation Valves

photo - MKS High Conductance, Large Port, Vacuum Isolation Valve

MKS High Flow Valves (HFV) are high conductance vacuum isolation valves for use with large line diameters. A welded stainless steel bellows allows for maximum stroke length and high conductance. The small diameter welded bellows also allows the reduction in size for the bonnet mounting while maintaining valve serviceability. The High Flow Valve uses a pulled Stainless Steel body and Aluminum sealing plate for weight reduction.

Features & Benefits:

  • Meets high flow requirements of large forelines (6" - 10" line diameters)
  • Heatable design
  • Orientation independent operation
  • NW160 (6 in), NW200 (8 in), and NW250 (10 in) sizes
  • 1,000,000 cycles MTBF (clean environments)
  • Corrosion Resistant Shield Available

Applications:

MKS High Flow Valves are designed for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow (large pump line diameter) manufacturing applications under vacuum.

Configurations:

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Part NumberPriceQTY
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Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.