Ultra High Vacuum (UHV)
Metal-sealed Vacuum Isolation Valves

photo - MKS UHV Metal-sealed, Ultra High Vacuum Bellows-sealed Valve

MKS Ultra High Vacuum (UHV) Valves are specially designed with Con-flat (CF) metal bonnet seals that limits outgassing and permeation allowing a lower system base pressure. A welded stainless steel bellows ensures a long cycle life with high conductance at the lowest base pressures. The UHV Valve's lifetime can extend to 1,000,000 cycles under clean conditions, increasing system uptime. The UHV Valve is assembled in a clean room for use in ultraclean system environments. The body is available with a choice of bead blasted or electropolished finishes.

Features & Benefits:

  • Limits outgassing and permeation for lower base system pressure
  • Welded bellows provides higher conductance then a formed bellows
  • ISO-KF or CF flanges
  • Electropolished finishes available


UHV Valves are designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and applications requiring an ultraclean environment.


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Part NumberPriceQTY
UHV Ultra-High Vacuum ValveQuote Only

Documents & Downloads:

UHV Valve data sheet

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.