High Cycle Valves (HCV)
10 Million Cycle Life Vacuum Isolation Valves

photo - MKS High Cycle Valve

MKS High Cycle Valves (HCV) are high performance vacuum isolation valves designed specifically for long cycle life in demanding applications. It has a specially designed formed bellows and pneumatic actuator to extend cycle life to 10,000,000 cycles in clean environments.

Features & Benefits:

  • Optimized for 10,000,000 cycles MTBF (clean environments)
  • Bellows-sealed isolation valve
  • NW25 - NW50 sizes available
  • Support available for direct mounting into load lock chamber

Applications:

MKS High Cycle Valves are designed for applications where valve cycle life is critical such as a semiconductor load lock chamber.

Configurations:

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Part NumberPriceQTY
High Cycle Valve (HCV)Quote Only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.