E28E e-Baratron® Ethernet-Enabled, Heated, Absolute Capacitance Manometer, Etch Sensor
(0.05-100 Torr), Temperature Controlled to 100°C
Direct, Absolute, Pressure/Vacuum Measurement with Digital Communications

photo - E28E e-Baratron - Ethernet-Enabled, Heated, Absolute Capacitance Manometer, Etch Sensor (0.05-100 Torr), Temperature Controlled to 100 degrees C

The Ethernet-enabled E28E e-Baratron® adds the ability to network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system. e-Baratrons® embedded internet browser software allows them to communicate with any Windows®-based PC. The Ethernet port operates in parallel with analog communications, so it can be diagnosed during processing. The E28E e-Baratron® has an LED status indicator. The E28E is equipped with the patented Etch sensor that reduces drift in processes with condensable byproducts.

Features & Benefits:

  • Patented Etch sensor reduces drift
  • Both analog and Ethernet communications are compatible with existing and networked process tools
  • Real-time Ethernet communications can be run in parallel with analog communications, for in-situ diagnostics
  • Embedded internet web browser communicates with any Windows®-based PC
  • Graphical User Interface (GUI) for device and process diagnostics
  • Easy-to-understand external indicators for immediate status information

Applications:

High-accuracy semiconductor, flat panel display, and industrial applications that require a heated manometer for repeatable vacuum and pressure measurement.

VCR® is a registered trademark of Swagelok® Company.

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberSensor TypePressure Range full scaleFittingCalibrationAnalog ConnectorDigital ConnectorPriceQTY
E28E.1TCEF1B1Etch0.1 mmHg (Torr)Swagelok® 8 VCR® FemaleVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E.1TCEF5B1Etch0.1 mmHg (Torr)Swagelok® 8 VCR® FemaleHorizontal15-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E.1TGAF1B1Etch0.1 mmHg (Torr)NW 16KFVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E01TCEE1B1Etch1 mmHg (Torr)Swagelok® 8 VCR® FemaleVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E01TGAE1A1Etch1 mmHg (Torr)NW 16KFVertical9-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E01TBAE1B1Etch1 mmHg (Torr)Straight 0.50 inch (12 mm) OD tubeVertical9-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E11TCEE1B1Etch10 mmHg (Torr)Swagelok® 8 VCR® FemaleVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E11TGAE1B1Etch10 mmHg (Torr)NW 16KFVertical15-pin "D" type with thread lockRJ45 EthernetQuote Only
E28E11TBAE1A1Etch10 mmHg (Torr)Straight 0.50 inch (12 mm) OD tubeVertical9-pin "D" type with thread lockRJ45 EthernetQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.