E28F Baratron® Capacitance Manometer with Etch Sensor
(0.05 - 100 Torr) Temperature Controlled to 45 Degrees C

photo - E28F Baratron Capacitance Manometer with Etch Sensor

The MKS E28F is the RoHS-compliant solution for etch process-induced drift. Based on the industry-standard Baratron® capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The E28F Baratron® manometer is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today's lower process pressures.

Based on established Baratron® capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 128, 628A, 628B, 628D, E28B, and E28D Baratron® capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.

Features & Benefits:

  • Excellent long-term stability
  • Percent of Reading accuracy for more precise output signal in lower pressure ranges
  • Full Scale ranges low as 50 mTorr (0.07 mbar) for precise measurement of low pressure processes

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Part NumberFull Scale RangeFittingAccuracyOptionsPriceQTY
E28F11TBE1B10 Torr (mm Hg)Swagelok® 8 female VCR®0.0025Vertical calibration, no heater status indicationQuote Only
E28F11TDE2B10 Torr (mm Hg)NW16-KF0.0025Vertical calibration, heater status indicationQuote Only
E28F.1TBF5B0.1 Torr (mm Hg)Swagelok® 8 female VCR®0.005Horizontal calibration, no heater status indication (<1 Torr only)Quote Only
E28F.1TDF5B0.1 Torr (mm Hg)NW16-KF0.005Horizontal calibration, no heater status indication (<1 Torr only)Quote Only
E28FU5TBF6B0.05 Torr (mm Hg)Swagelok® 8 female VCR®0.005Horizontal calibration, heater status indication (<1 Torr only)Quote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.