E28F Baratron® Capacitance Manometer with Etch Sensor
(0.05 - 100 Torr) Temperature Controlled to 45 Degrees C
Based on the industry standard Baratron® capacitance manometer technology, the E28F temperature regulated capacitance manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift.
The E28F Baratron® manometer is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today's lower process pressures.