E28F Baratron® Capacitance Manometer with Etch Sensor
(0.05 - 100 Torr) Temperature Controlled to 45 Degrees C

photo - E28F Baratron Capacitance Manometer with Etch Sensor

Based on the industry standard Baratron® capacitance manometer technology, the E28F temperature regulated capacitance manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. The E28F Baratron® manometer is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today's lower process pressures.

Based on established Baratron® capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 128, 628A, 628B, 628D, E28B, and E28D Baratron® capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.

Features & Benefits:

  • Excellent long-term stability
  • Percent of Reading accuracy for more precise output signal in lower pressure ranges
  • Full Scale ranges low as 50 mTorr (0.07 mbar) for precise measurement of low pressure processes

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberFull Scale RangeFittingAccuracyOptionsPriceQTY
E28F11TBE1B10 Torr (mm Hg)Swagelok® 8 female VCR®0.0025Vertical calibration, no heater status indicationQuote Only
E28F11TDE2B10 Torr (mm Hg)NW16-KF0.0025Vertical calibration, heater status indicationQuote Only
E28F.1TBF5B0.1 Torr (mm Hg)Swagelok® 8 female VCR®0.005Horizontal calibration, no heater status indication (<1 Torr only)Quote Only
E28F.1TDF5B0.1 Torr (mm Hg)NW16-KF0.005Horizontal calibration, no heater status indication (<1 Torr only)Quote Only
E28FU5TBF6B0.05 Torr (mm Hg)Swagelok® 8 female VCR®0.005Horizontal calibration, heater status indication (<1 Torr only)Quote Only

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.