E27F Baratron® Capacitance Manometer with Etch Sensor
(0.1 - 100 Torr) Temperature Controlled to 45 Degrees C
The E27F is the RoHS-compliant solution for etch process-induced drift. Based on the industry-standard Baratron® capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The E27F Baratron® manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 45°C) is in control. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today's lower process pressures.