Granville-Phillips® 835 VQM Differential Pump System

photo - MKS, Granville-Phillips 835 VQM Differential Pump System

The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM) to address the needs of process monitoring and process control applications at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.

Typical Usage:

  • Monitoring gas reactions
  • Determining when to start a process
  • Detecting contaminants
  • Controlling the amount of reactive gas introduced
  • Leak detection

Key Features:

  • Operation from 3 Torr to 5x10-9 Torr
  • 1-145 amu range or optionally 1-300 amu
  • Fast: 120 msec scan
  • Easy to setup including calibration
  • Quickly see gas composition and trend information
  • Includes turbo and roughing pumps

The "Configurations" tab lists common configurations for this product. Contact Customer Service for additional configurations.

Configurations:

Purchase now or request a quote:
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Part NumberDescriptionPriceQTY
835901-DPS-1M1-1VQM Differential Pumping System, Orifice 3 for range 90 mTorr to 3000 mTorr, Manual Valve, 1-145 amu, 110 VACQuote Only
835901-DPS-3M1-1VQM Differential Pumping System, Orifice 3 for range 1 mTorr to 45 mTorr, Manual Valve, 1-145 amu, 110 VACQuote Only
835901-DPS-3M3-1VQM Differential Pumping System, Orifice 3 for range 1 mTorr to 45 mTorr, Manual Valve, 1-300 amu, 110 VACQuote Only
835901-DPS-2P1-1VQM Differential Pumping System, Orifice 2 for range 9 mTorr to 350 mTorr, Pneumatic Valve, 1-145 amu, 110 VACQuote Only
835500-U1-1VQM 835 Controller, 1-145 amu, 110 VACQuote Only
835500-U3-1VQM 835 Controller, 1-300 amu, 110 VACQuote Only
835300-03MVQM Cable from Gauge to Controller, 3 metersQuote Only
835400VQM Software SuiteQuote Only
802301-03MCable to connect Total Pressure Gauge to VQM Controller, 3 metersQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.