Thermal & Pressure-based Mass Flow Controllers for Special Applications

Many process applications use source materials that are liquids or solids or have low vapor pressures at room temperature. Each source material and application will define unique requirements for its measurment and control. Some materials may be delivered at typical ambient temperatures using a low pressure drop device. Others will require heating to develop sufficient vapor pressure for delivery to the process environment. MKS offers a variety of products (both thermal & pressure-based mass flow controllers) designed for the direct control delivery of these materials without the need for a carrier gas.

photo - P2 Low Pressure, Metal-sealed, Multi-gas, Multi-range, Thermal Mass Flow Controller

P2 Low Pressure, Metal-sealed, Multi-gas, Multi-range, Thermal Mass Flow Controller

  • Thermal based flow measurement and control
  • For ambient temperature operation from 0 to 45 degrees Centigrade
  • Full scale flow rates of 2 sccm to 20 sccm with low pressure drop
  • Analog I/O only: 0 to 5 VDC

website  |  data sheet

photo - 1640A Pressure-based Mass Flow Controller

1640A Pressure-based Mass Flow Controller Using Sonic Flow for Ambient Temperature Operation up to 50 degrees C

  • Pressure based MFC using viscous flow through a choked orifice (sonic flow)
  • For ambient temperature operation fro 0 to 45 degrees Centigrade
  • Analog I/O: 0 to 5 VDC
  • Product configuration unique to each application - Contact Flow Applications

website  |  data sheet

photo - 1150C Heated Pressure-based Mass Flow Controller

1150C Heated Pressure-based Mass Flow Controller, Using Sonic Flow for High Temperature Operation up to 150 degrees C

  • Uses principle of choked (sonic) flow through and orifice
  • For controlled temperature operation between 30 and 150 degrees Centigrade
  • Analog I/O: 0 to 5 VDC
  • Product configuration unique to each application - Contact Flow Applications

website  |  data sheet

photo - 1152C Heated Pressure-based Mass Flow Controller

1152C Heated Pressure-based Mass Flow Controller, Using Laminar Flow for High Temperature Operation up to 150 degrees C

  • Uses principle of viscous flow through a laminar flow tube
  • For controlled temperature operation between 30 and 150 degrees Centigrade
  • Analog I/O: 0 to 5 VDC
  • Product configuration unique to each application - Contact Flow Applications

website  |  data sheet