Integrated Microwave Plasma Subsystems

photo - High Power Microwave Plasma System

High Power Microwave Plasma System

The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates. The High Power Microwave Plasma System provides avdanced closed loop power control with < 1% output accuracy variation for optimal wafer to wafer repeatability.

Features:

  • High power microwave plasma system @ 2.45 GHz
  • Advanced closed loop power control with <1% output accuracy variation
  • Instant plasma ignition
  • Autotune system within <1.5 seconds

learn more  |  data sheet

photo - ASTeX AX2600 & AX2700 Series Microwave Plasma Subsystems

ASTeX AX2600 & AX2700 Series Microwave Plasma Subsystems

MKS Instruments ASTeX® AX2600 and AX2700 Series Microwave Plasma Subsystems are complete, ready-to-integrate microwave plasma solutions. These microwave plasma delivery systems include the AX2500 SmartPower® Microwave Generator, SmartMatch® Tuner, Isolator, and AX7610 Microwave Applicator.

Features:

  • Fully automatic hands-off operation
  • Automatic plasma tuning
  • Closed loop control power regulation
  • Power Accuracy: <±1.5% of maximum power

learn more  |  data sheet