Optical Gas Analyzers

MultiGas & AIRGARD® FTIR Gas Analysis Instruments
Precisive® TFS Sensor Platforms

MultiGas™ & AIRGARD® FTIR (Fourier Transform Infrared) and Process Sense™ NDIR (Nondispersive Infrared) real-time and in-line gas analysis Instruments from MKS are capable of ppb to ppm sensitivity for multiple gas species including NF3, NH3, H2, NO and N2O and gases with as much as 30% water.

photo - Precisive 5 TFS Analyzer

The Precisive® TFS™ (Tunable Filter Spectroscopy) sensor platform consists of a light source, a sample cell (for gases, liquids or solids), a wavelength separating element (spectrometer) and a photo-detector. A wavelength separating element "slices" the wavelength components of the broadband light source which then interacts with the sample molecules. The resulting spectrum acts as "fingerprints" which are used to identify sample components and/or quantify the sample composition.

Product Catalog

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MKS FTIR Products brochure
MKS Instruments Gas Analysis product overview
New - Continuous Emission Monitoring for Clay Ceramic Manufacturing
from Ceramics Industry Magazine

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 978-645-5500.