In Situ Diagnostic Access Valve
MKS IDA™ (In-situ Diagnostics Access) Valves are a multi-purpose, multi-port, dual valve designed to replace the standard isolation valve used in capacitance manometer and other types of gauge isolation in the semiconductor industry.
The IDA™ Valve increases accuracy and reduces the time needed for gauge or capacitance manometer zeroing and calibration during preventative maintenance intervals. It also provides a safe, controlled, cost-effective process chamber access port for additional functions, such as system leak checks and diagnostics.
The IDA™ Valve joins a pneumatically actuated primary valve with a manually actuated secondary valve, both based on the MKS Cv Valve design. This configuration has two standard, mirror-image port orientations for your system: a left-oriented body and a right-oriented body.