The Vision 2000-A Residual Gas Analyzer (RGA) improves process productivity and product quality by providing real-time trace level monitoring of various gas species, including precursors, reaction byproducts, and contaminants during ALD and CVD processes. It can monitor the chamber baseline for air leaks and background contamination levels. In-situ monitoring of ALD and CVD processes can help characterize and prevent damage to production equipment and wafer yield loss owing to precursor concentration change, chamber leak or contamination.
Additional CAD file downloads are not available for this product.
VISION-2000-A - Drawings
Additional drawings are not available for this product.
VISION-2000-A
Sign In
Password Reset
Enter your email address below to reset your account password.
Password Reset
Email Verification Required
Cart Items Updated
Remove Product
Remove this product from your comparison list?
Check Order Status
Provide an order number and postal code to check the status of an order or download an invoice for an order that has shipped. Login to view your complete order history.
Sign In Required
To access this and other valuable technical resources, please sign in or register for a new online account.
Add to Cart
ALD or CVD Process Monitor, 1-100, 1-200 or 1-300 amu