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process sense tfs end point monitor
Online Gas Monitor, Process Sense™ TFS™ w/Tunable Filter Spectroscopy

Specifications

  • Type
    Chamber Endpoint Sensor
  • Measurement Technique
    Tunable Filter Spectroscopy
  • Measurement Range
    SiF4: 1 - 200 ppm (at 760 Torr)
  • Detection Limit
    2 ppm SiF4
  • Response Time
    1 second report rate
  • Calibration Accuracy
    ±10%
  • Repeatability
    <1% Full Scale, consecutive measurements
  • Electrical Connector
    DB15
  • Power Requirements
    120 VAC, 230 VAC, or 24 VDC (2 amp)
  • Dimensions
    Sensor: 17.2 x 5.9 x 5.5 in. (437 x 150 x 140 mm)
    Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm)
  • Weight
    3.2 kg (7 lbs)
  • Analog Output
    Analog 1 (AO1): 0 - 10 V (user configurable)
    Analog 2 (AO2): 0 - 10 V (user configurable)
  • Digital Output
    Digital 1: Fault status signal
    Digital Service Port: Diagnostic codes
  • Sample Pressure
    0.5 - 760 Torr
  • Sample Temperature
    20 - 60°C
  • Fittings
    NW25 (other sizes available upon request)
  • Compliance
    CE

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